Size: 32, Motor Mounting Position: R (Right Side Parallel), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 25: 12; Size 32: 16; Size 40: 20), Stroke: 850mm, Motor Option: without Option, Grease Application: N (without, Roller Specification), Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: H (Size 25: 20; Size 32: 24; Size 40: 30), Stroke: 800mm, Motor Option: B (with Lock), Grease Application: with, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 32, Motor Mounting Position: R (Right Side Parallel), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: H (Size 25: 20; Size 32: 24; Size 40: 30), Stroke: 1000mm, Motor Option: B (with Lock), Grease Application: with, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: B (Size 16: 5; Size 25: 6; Size 32: 8), Stroke: 100mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: D (Double Clevis), Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 30mm, Motor Option: B (with Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: G (Head Flange), Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 16, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 30mm, Motor Option: B (with Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: G (Head Flange), Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 16: 10; Size 25: 12; Size 32: 16), Stroke: 150mm, Motor Option: B (with Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: B (Size 16: 5; Size 25: 6; Size 32: 8), Stroke: 50mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: D (Double Clevis), Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 40, Motor Mounting Position: In-line (sizes 25, 32, 40, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 25: 3; Size 32: 4; Size 40: 5), Stroke: 800mm, Motor Option: without Option, Grease Application: with, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 25: 3; Size 32: 4; Size 40: 5), Stroke: 650mm, Motor Option: B (with Lock), Grease Application: with, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 40, Motor Mounting Position: In-line (sizes 25, 32, 40, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: B (Size 25: 6; Size 32: 8; Size 40: 10), Stroke: 1200mm, Motor Option: B (with Lock), Grease Application: with, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

7

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + T When P2 + 0.1 > b, subsonic flow P1 + 0.1 VXH VXF VX3 VXA 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + T 157 VXD Series Q : Air flow rate [L/min (ANR)] C : Sonic conductance [dm3/(sbar)], dm3 (Cubic decimeter) of SI = L (liter). b : Critical pressure ratio [] P1 : Upstream pressure [MPa

MTS

Refer to graph (16) based on horizontal mounting, the maximum speed of 600 mm/s, and 125 stroke.

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

Description Material Note ALF400, 400-06 ALF500, 600 ALF800, 900 Platinum silver painted Body Housing Aluminum die-casted Aluminum casted Aluminum die-casted 1 2 Platinum silver painted Replacement Parts No. Description Material Part no. Qty.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Sine Rodless Cylinder Series REBR Direct Mount Type

, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.