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Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing December, 1999 D-SMC.L.A. P-80 (D)

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved Printed in Japan. 1st printing January, 2001 D-SMC.L.A. P-80 (N) All specifications in this catalog are subject to change without notice. This catalog is printed on recycled paper with concern for the global environment.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

vacuum/low pressure T VQ Port size (IN, OUT port) Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge voltage suppressor VKF Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03

Conduit terminal DIN terminal VQ7 Conduit terminal with indicator light DL DIN terminal with indicator light Piping Option EVS 0 Bottom ported 1 Side ported Port size Rated voltage VFN 4 Without sub-plate Applicable valve model Port size 1 100 VAC, 50/60 Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Under the New Measurement Law, products for overseas use only (SI unit type for use in Japan). 02 1/4 X X X 03 3/8 X X 04 1/2 X 06 3/4 X X Options 10 1 X Nil B With bracket Handle / Bonnet material S Built-in Silencer (EXH port) A Flame resistant PBT B: Packed together S: Assembled for shipping B Aluminum # For connection of the modular type FRL combination, the spacer or the spacer with

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing July, 2003 D-YGA P-120 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

B C D H NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B 19.6 M12 x 1 4 8.1 M4 x 0.7 3.2 6, 10 6, 10 17 7 21.9 M14 x 1 5 9.2 M5 x 0.8 4 16 16 19 8 30 M20 x 1.5 8 15 M8 x 1.25 5 20 20 26 13 37 M26 x 1.5 8 19.6 M10 x 1.25 6 25 25 32 17 T-bracket 4 x TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

lube Air Oil Auto feed tank PT ALF400 ALT-9 Oil distributor Auto feed tank 14-13-6 Auto Feed Lube, Auto Feed Tank Series ALF400 to 900, ALT-5, -9 How to Order Operating Pressure Range Tank and line pressure ALF 40 02 0 Tank pressure (MPa) (2) (1) Option Operating allowable range Operating allowable range Auto Feed Lube Port size Description Applicable model Symbol Nil 02 03

For Safety Instructions, Actuators Precautions, refer to Precautions for Handling Pneumatic Devices (M-03-E3A). Mounting Mounting Caution Caution 1. Take care to avoid nicks or other damage on the outside surface of the cylinder tube. This can lead to damage of the scraper and wear ring, which in turn can cause malfunction. 2. Take care regarding rotation of the external slider.

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8)

Example) AW30K-03BE-1N-B B AW 30 03 BE K q w e r t y q Body size 20 30 40 60 Symbol Description w With backflow function Nil Without backflow function K Note 1) With backflow function + e Pipe thread type Nil Rc N Note 2) NPT F Note 3) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 r Port size 10 1 + a Mounting Nil Without mounting option B Note 5) With bracket H With set nut (for panel mount

NO BORE SIZE B R NX ND U NO6-40UNF 0.94 0.75 0.39 0.54 0.188 0.188 0.56 NY-J010B 10 (3/8) NO10-32UNF 0.94 0.75 0.39 0.54 0.188 0.188 0.56 NY-J016B 16 (5/8) Note) includes Rod Jam Nut, Clevis Pin and 2 Retaining Rings PART NO BORE SIZE A B C D PART NO BORE SIZE A B C D 0.31 0.11 0.11 5-40UNC JM-005 6 (1/4) 0.44 0.50 0.16 1/4-28UNF JM-025 6 (1/4) 0.31 0.36 0.11 6-40UNF JM-006 10 (3/8) JM-03

-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MT printing MT 16400SZ Printed in Japan.

Latching Symbol 50.8 psi (0.35 MPa) 50.8 psi (0.35 MPa) 50.8 psi (0.35 MPa) 72.5 psi (0.5 MPa) 00 Note 1) 58 psi (0.4 MPa) 65.3 psi (0.45 MPa) Supply Valve/Release Valve Electrical Entry Note 4) 1 Single unit 03 04 05 06 0.3 mm PV, PD 0.4 mm PV, PD common port (PV = PD) L-type plug connector With lead wire 0.5 mm L 0.6 mm Note 1) Vacuum pump system only L-type plug connector Without

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QW printing QW 8150SZ Printed in Japan. D-DN