ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Side 1/4 1/4 1,3,5 (P,EA,EB) Port 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 Port size 1/4 C6 (One-touch fitting for 6) 4,2 (A,B) Port C10 (One-touch fitting for 10) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Station W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to

Vacuum Pad: Ball Joint Type

1 3.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 1 15.5 1 34 1 35.5 13 35 32 Additional Dimensions by Stroke Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 H I H I Stroke Stroke K P K P 5.1 K P K P 5.1 20 20 +10 5.6 +10 5.6 0 0 30 30 1 +1 +20 +4.9 +4.4 1 +1 +4.9 +4.4 +20 50 50 +25 +40 +49.9 +49.4 +25 +40 +49.9 +49.4 717 Vacuum Pad: Ball Joint Type Lateral Vacuum Entry Without Buffer

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE SET reduction

PSE550/300

value may change 1 digit. 2 1 1 mmH2O mmHg Series PSE530 pressure sensors are also applicable.

0.01

4, G 1/4 NPT 1/4 Rc 1/4, G 1/4 NPT 1/4 Female thread Rc 1/4, G 1/4, NPT 1/4 Resin Case material Resin Aluminum Stainless steel Air (Nitrogen) Fluid 0.01 m (filtration efficiency: 99.99%) Note) Nominal filtration rating Initial pressure drop 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure (at 20C) 1.0 MPa (in case of nitrogen: 0.99 MPa) 5 to 45C Operating

Clean Regulator

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

VCB

6A) 1/4 (8A) 3.0 1/8: 0.21 1/4: 0.24 2 VCB2 0.5 9.2 (0.51) 4 0.3 11.7 (0.65) 5 2.0 6.3 (0.35) 3 0.8 9.7 (0.54) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 3/8: 0.40 1/2: 0.49 3 VCB3 0.5 14.4 (0.80) 5 3.0 0.2 24.8 (1.38) 7 0.1 37.8 (2.10) 10 3.0 6.3 (0.35) 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 3/8: 0.55 1/2: 0.62 3/4: 0.78 1.3 10.8 (0.60) 4 0.7 15.3 (0.85) 5 3.0 4 VCB4 0.3 24.8 (

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 1939 Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes (Double Action Type) Series VHS4510/5510 Model When in the exhaust position, the valve may be padlock secured. This prevents erroneous operation.

ITV

ITV301l 0.005 to 0.1MPa ITV303l 0.005 to 0.5MPa 1.12-1 1/4, 3/8, 1/2 ITV305l 0.005 to 0.9MPa Series ITV209l Controls vacuum pressure steplessly in proportion to an electric signal.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Model Orifice size Port size Material Body Seal 4.5 mm 10 mm 6 mm 8 mm 3 mm 2 mm VX21 1/8, 1/4 NBR 1/4, 3/8 Brass Stainless steel VX22 FKM 1/2 EPDM 1/4, 3/8 VX23 PTFE 1/2 Normally Open (N.O.)

25

Rc, NPT, G 1/8 PB PB With LQ3 fitting With LQ1 fitting (6.35) PAF (1.2) PA PB 55 15 FLUID IN FLUID OUT 4.5 30 41 7 (140) (149) 139 79 87 77 2 4.5 FLUID IN Rc, NPT, G 1/8 With nut (LQ1/LQ3 fittings) 1/4" tube extension Caution 1.

PSE540/560

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.

Speed Controller with Uni One-touch Fitting AS Series

Metric size Inch size Elbow type Universal type 1 8 3.2 4 6 8 10 12 " 5 32" 3 16" 1 4" 5 16" 3 8" 1 2" 1 8 AS221F-U01 AS231F-U01 Gasket 1 4 AS221F-U02 AS231F-U02 1 4 AS321F-U02 AS331F-U02 Female thread 3 8 AS321F-U03 AS331F-U03 Uni thread 1 2 AS421F-U04 AS431F-U04 Note 1) Elbow type only Note 2) indicates the control type (0 for meter-out and 1 for meter-in).

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 1) [ ]: Denotes the normal position.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

9 @0 @1 @2 @3 @4 @5 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass Brass No. q w e r t y u i o !0 !1 !2 !

VCL

Max.operating pressure differential (MPa) Port size Flow characteristics Max.system pressure (MPa) Orifice size (mm) Weight (kg) Class Model PAX Cv converted Av x 10 -6(m 2) 2 0.16 3.8 1.5 PB 3 0.33 7.9 0.8 1/8 (6A) 1/4 (8A) 1/8 : 0.21 1/4 : 0.24 2 VCL2 2.0 4 0.51 12 0.4 5 0.65 16 0.25 3 0.35 8.4 1.5 4 0.54 13 0.8 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4 : 0.42 3/8 : 0.40 1/2 : 0.49 VCL3 3 5 0.80

,

85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8

,

85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override

VCS

Orifice and Port Size Combinations Class Orifice size (mm) T Conduit terminal (1) Port size 4 2 3 7 5 10 1/8 (6A) 2 1/4 (8A) 1/4 (8A) 3 3/8 (10A) 1/2 (15A) 1/4 (8A) Available types of electrical entry are either G, C and T.