SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Compact Cylinder with Solenoid Valve/

Unit: Nm T Bore size (mm) Non-rotating accuracy 32 to 63 0.1 T Cylinder stroke (mm) Bore size (mm) + 15 20 25 30 35 40 45 50 75 100 5 10 32 40 50 63 0.66 1.06 0.59 0.96 1.70 3.90 0.53 0.88 1.56 3.62 0.49 0.81 1.45 3.37 0.45 0.75 1.35 3.15 0.42 0.70 1.26 2.96 0.39 0.65 1.19 2.80 0.36 0.61 1.12 2.65 0.34 0.58 1.06 2.51 0.32 0.55 1.01 2.39 0.25 0.43 0.80 1.92 0.20 0.36 0.67 1.61 3 Series

VK300

F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

Manifold Specifications

(However, there are no levers between t and q. They can be disconnected by merely pulling them apart.) Fig. (1) Black White 1 station (11 stations) A side coil B side coil (b) Lever Black White 2 station (12 stations) A side coil D-sub connector Connector terminal no.

VZM400

2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !3 Rubber t POM End cover !

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note Platinum silver Platinum silver Black Black q Description Sub-plate Body Aluminum die-casted Stainless steel w e Mounting bolt and gasket are not attached. : Thread type Spool/Sleeve Adapter plate Thread Type r Resin t Resin End plate Nil Standard Rc y Resin Piston NPT N Option T NPTF G F Replacement Parts Description Material Part no. No.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Lock plate Lever on ejector side ZK2 w ZQ Lock plate ZR Lock screw Adapter plate ZB t 2. After the pad has been replaced, lock the lock plate completely before use. (Refer to q shown in the figure below.) If the lock plate is not locked completely, the pad may drop due to the vibration or load during operation. q ZA Holder y ZX Non-rotating hole Plate ZM 3.

ZSE30A(F)/ISE30A

Pressure Momentary change Set-value P-1 H-1 t (ms) t (ms) Time Switch output operation in normal conditions ON OFF Time Switch output operation when anti-chattering function is on. ON OFF Time J Power-saving mode (F7) Power-saving mode can be selected. It shifts to the power-saving mode without button operation for 30 seconds.

Counter/Extension Cable

HOLD BANK1 BANK2 t (DIN rail mounting) MULTI COUNTER: CEU5 UP Counting input pulse duration COUNT PRESET FUNC. 68 0.2 LEFT RIGHT 35.5 A: B: C: D: t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPT NPTF G N T F VV3ZA2 031 01 50 Thread type VZA200 01 S Thread type Nil Nil Rc NPT NPTF G Rc NPT NPTF G N T F N T F 1800 Series VZA200/400 3 Port Air Operated Valve Dimensions Body ported : VZA4 2-P-01 Pilot port M5 x 0.8 Mounting hole 2 x 3.4 2 x 3.4 mounting hole (Non-locking

MY1

Horizontal mounting z y Wd: Work piece (500g) x y Wc: MHL2-16D1 (795g) x z Wa: Connection plate t = 10 (880g) 3. Ceiling mounting 4. Vertical mounting x MY1MW40-500 z y x y z Wb: MGGLB25-200 (4.35kg) Center of gravity Weight and center of gravity for each work piece 2 Load blocking Work piece no.

NCA1

Not applicable for types: Double rod (W), Trunnion (T), XC8, XC9, XC10, XC11, Over sized rod (XB5) with front mounts.

Series HAW Water Cooled Aftercooler 1

Description Housing Outside tube Body Flower fin tube assembly Material Note SGP, SS400 STK FC200 C1220T Flower fin Flower fin q w e r q w e r Water chamber cover FC200 t AFF AM Replacement Parts Replacement Parts Misc. HAW22 HAW55 HAW75 HAW37 HAW110 No. Description HAW2 HAW7 Material No.

Compact Cylinder with Air Cushion

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Carbon steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l D d H B C Part no.

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

RQ

Knuckle Pin (Common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel Material: Carbon steel Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l D d H B C Part no.

MGC

Ball bushing bearing CX Front mounting flange type D-X 20Data Long stroke Slide bearing View B-B' Component Parts Description Rod cover Tube cover Piston Piston rod Bushing Cushion ring A Cushion ring B Magnet Seal retainer Cushion valve Packing retainer Lock nut Wear ring Rod end nut Cushion seal A Cushion seal B Piston gasket Description Slide bearing Ball bushing bearing No. q w e r t

MLGC

J K L H I GR O GK GL GQ N S P GD M Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9 70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T

, Controller Mounting: 8 (DIN Rail Mounting), Communication Plug Connector or I/O Cable Length for JXC: T (T-branch, for DeviceNetâ„¢ or CC-LInk)