1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Digital Gap Checker

The sub screen display can be selected from 6 display options.

Fieldbus System

Push Pull connector (24 V): 2 pcs.

MHx-OMM0057

R R 1. 2. 2 9 - 3-7 1 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 10 - 2 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 11 - M2.54 5 6 5~6mm 0.05~0.1 Nm90 D-Y59/Y69/Y7P/Y7PV D-M9(V) D-Y7W/Y7WV D-M9W(V) D-M9A(V)L MHL2-10D 0.8 0.3 MHL2-16D 0.5 0.4 MHL2-20D 0.5 0.7 ON MHL2-25D 0.5 0.6 OFF MHL2-32D 0.5 0.6 MHL2-40D 0.5 0.9 1. 2. 12 - 3-8

Power Clamp Cylinder

15) 63 How to Order Right type CKZ63 42 3681N R 47 37 54 78 Arm position/Mounting hole A A 20 Arm position Mounting hole Symbol Center type D1 6 6 6 8 8 8 D2 9 9 9 10.2 10.2 10.2 D3 14 14 14 17.5 17.5 17.5 L 6 6 6 8 8 8 Left type A B C D E F Center Right Left Center Right Left 2 x D1H7 through (9) 300.2 2 x D2 through 300.02 1050.1 144 65 280.1 150.2 22 L D3 Sectional view A-A (1:1) 80 How

MHF2

71 6 MHS 62 86 MHC 33 Finger closing port M5 x 0.8 2-M6 x 1 thread depth 6 56 MHT Mounting thread E 13 MHY 25 30 41 25 MHW MRHQ 2-5.2 through (Mounting hole) 0 -0.1 32 E Misc.

MHF2

6, !9 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit no. Description Contents MHF2-20D2 MHF2-20D1 MHF2-20D MHF20-PS MHF20-PS MHF20-PS Seal kit @0, @1, @2 MHF-A2002-2 MHF-A2002-1 MHF-A2002 Finger assembly e, r, t, y, !4, !6, !

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS-FG

Port size N M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

Series SYJA300 3 Port Air Operated Valve

Base mounted M5 X 0.8 Rc(PT) 1 /8, 1 /4 01 02 01 02 SYJA714N.C. Base mounted (With sub-plate) 130 (Without sub-plate 80) SYJA724N.O. Note) Model number for base mounted style without sub-plate is SYJA5 2 and SYJA7 2. 1 2 1 2 Body ported Series SYJA500 With Bracket Model No. of air operated valve SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not assembled.

MK

6 !7 !8 !

CJP

X 1.5 20 23.5 29.5 36 5 37.5 43.5 50 6 CJPB6SCJP6, #6 CJPB10SCJP10, #6 CJPB15SCJP15, #6 1.2-10

AS

Rod O.D.Applicable tubing O.D. 10 20 25 30 M5 standard 01 standard 02 standard 03 standard 04-04 06-06 08-08 10-10 4 4 6 6 8 8 10 10 wBring up the body, while holding it down. w eTake the finger off the release ring and remove the speed controller from the One-touch fitting.

Air Suction Filter

Example: In case of 6 stations of air suction filter ZFA100-01 ZZFA1-06 1 pc. (Brackets for 6 stations) ZFA100-01 6 pcs.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

view) 5 19.5 12 27 (45) 9 17 8 M3 x 0.5 thread depth 4 Vacuum suction port 2 2 6 x M3 x 0.5 thread depth 6 (A, B, C common view) -0 -0.05 3.5-0.03 0 3.5-0.03 0 8 Open: 22, Closed: 14 15 15 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 5 5 6 6 With Auto Switch: MDHR2-15R 11221122MDHR2-15E port location B 3 x M3 x 0.5 thread depth 6 P.C.D.29 (Mounting thread) 44 45 42 120 120

KA

Soft nylon Polyurethane 4 3.2 KAL23-00 17.5 18 20 4.3 4.5 5.3 18.5 21 22 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 39.7 39.7 25.0 25.0 14.9 14.9 6 6 3 KAL04-00 KAL06-00 11.4 11.4 4.2 4.2 3.4 2.9 8 6 23 26.5 28.5 6 6.8 7.5 KAL08-00 10 17 12 10 KAL10-00 KAL12-00 21 Branch tee: KAT Effective area (mm2) Weight (g) Tube O.D. (mm) D L M Q Part No.

Sine Rodless Cylinder Series REBR Direct Mount Type

6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.

EX250-SAS3_5_7_9_eng

Please keep this manual handy for future reference. 2 (0 V) Power supply for output equipment (-) 1 3 3 AS-i ASInterface line (-) (24 V) Power supply for output equipment (+) 4 LED Indication Tie-rod (2 pcs.) Accessory 3 4 2 Power supply connector for output equipment 7 M12 4-pin plug SI No. Description Function 1 No.