For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com ZU S 05 A Port size Nozzle diameter 05 0.5 mm 07 0.7 mm Nil 6 One-touch tting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specications 1 .
How to Order Metric size (Release button: Light gray) Metric size ZFB 0 Inch size ZFB 1 Body type Symbol Filtration area (mm2) 10 1037 20 1584 30 1980 40 3016 Inch size (Release button: Orange) Applicable tubing size Metric size Symbol Applicable tubing Applicable model ZFB10 ZFB20 ZFB30 04 4 06 6 08 8 10 10 Inch size Symbol Applicable tubing Applicable model ZFB10 ZFB20 ZFB30 ZFFB40 05
P1 P2 P1 P2 Vacuum source (Vacuum pump) Nozzle Nozzle Note) Since the calculated value may not meet the approximate value due to leakage and pressure loss in the piping system, please check the result by using actual equipment. 950 Flow Sensor Series PFMV5 How to Order PFMV5 05 1 Option (shipped together) Measurement flow range 05 10 30 05F 10F 30F Nil 0.0 to 0.5 l/min None With L-type bracket
Valve stations 02 2 stations 05 5 stations 10 stations 10 Precautions Be sure to read before handling. For Safety Instructions and Splenoid Valve Precautions, refer to page 3-13-2. Mounting Caution 1. SUP port and EXH port are positioned on both sides of manifold block. Air can be supplied from either side; however, the unused port must be plugged in this case.
Series VS3115/3110 Manifold Specifications Specifications Manifold type Max. number of stations B mount 10 stations Port location/Port size P A E P A E Port direction Applicable valve model Exhaust type Side Side Side Side Bottom Side VS3114-00 Base Base Base Common 1 4 3 8 3 8 Accessory AXT338-17A Blanking plate (With gaskets and screw) How to order manifold VVS31 1 0 05 Thread type EXH
Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19. 13-6-2 Vacuum Ejector In-line Type Series ZU How to Order ZX ZU 05 S ZR ZU07 ZM Maximum vacuum pressure S 85 kPa ZH L 48 kPa ZU05 ZU Nozzle diameter 05 0.5 mm ZL 07 0.7 mm Circuit diagram ZY EXE ZQ Specifications
For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .
Body Size: 05 (400 L/min. 14.1 scfm), Thread Type: Body Size 05: M Thread; Body Size 10-40 R Thread, Port Size: M5 (M5 x 0.8)
Wiring type: 3-wire type, Output Type: NPN type, Lead wire length(m): 0.5, Made-to-order specifications: None
Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 4, Threaded Adapter Shape: [Elbows] Elbow, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter Elbow Shape: [Universal Elbows
Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 6, Threaded Adapter Shape: [Elbows] Elbow, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter Elbow Shape: [Universal Elbows
Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): -, Threaded Adapter Shape: [Elbows] Elbow, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter Elbow Shape: [Universal Elbows
Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 4, Threaded Adapter Shape: [Elbows] Elbow, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter Elbow Shape: [Universal Elbows
Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 6, Threaded Adapter Shape: [Elbows] Elbow, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter Elbow Shape: [Universal Elbows
Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): -, Threaded Adapter Shape: [Elbows] Elbow, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter Elbow Shape: [Universal Elbows
Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 4, Threaded Adapter Shape: [Elbows] Elbow, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter Elbow Shape: Hex socket head
Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 6, Threaded Adapter Shape: [Elbows] Elbow, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter Elbow Shape: Hex socket head
Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Branch, Tube Size 1(φ): 4, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter to Tubes Shape: [Branch Y] Branch, Compatible Fluid: Water / Air, Type
Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Branch, Tube Size 1(φ): 6, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter to Tubes Shape: [Branch Y] Branch, Compatible Fluid: Water / Air, Type
Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Branch, Tube Size 1(φ): -, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter to Tubes Shape: [Branch Y] Branch, Compatible Fluid: Water / Air, Type