XL

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Hygienic Design Cylinder Series HY

8 L1 22 24 X 12 14 (mm) Bore size A 60 61 H M4 x 0.7 M5 x 0.8 20 25 B 50 51 C 8 10 D 8 10 E 33 40 F 6 6 I 42 50 K 5 5 KA 6 8 L 10 10 M 22 26 N 4.4 5.4 OA M5 x 0.8 M6 x 1.0 Q 14 14 R 10 10 Stroke range 50 or less 50 or less DNote 1) Refer to pages 885 to 889 for details about the rod end nut, mounting bracket and accessory bracket.

Process Valve Series VNA

M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 VCC 20 24 24 70 92 109 413 Series VNH Specific Product Precautions Be sure to read before handling.

0.55

Refer to back page 6 for changing the type of actuation. Manifold Option Description Part no.

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular F.R.L. Unit

N.C. 0.2MPa Note 2) AD38 AD38NNote 6) AD38 AD38NNote 6) AD48 AD48NNote 6) AD48 AD48NNote 6) Note 3) AD37 AD37NNote 6) AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) Float type auto drain Y300 IS1000M-30 Y300 IS1000M-30 Y400 IS1000M-40 Y500 IS1000M-50 Spacer Pressure switch Note 5) Note 4) Note 5) 01 (02) Y310(01) 02 Y510(02) 03 Y310(01) 02 Y410(02) 03 T-interface Y210Note 5) 02 03

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10

Brake mechanism added

30 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Different surfaces) ML2B D-A44 n 55 + 50 (n 2) (n = 2, 3, 4, ) 75 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Same surface) 1 10 80 90 75 (Different surfaces) (Same surface) 20 100 75 100 80 100 90 100 2 D-A3C D-G39C D-K39C 20 +

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

MY2

3 MY2C16 @9 %6 !4 #1@3@9 !5@8 @7 %5!

HRX-OM-W069

A signal type for contact output signal 4 to 6 can be selected by the customer. Refer to Table 2.4-3 Signal type for contact output signals 4 to 6. (1) (2) (3) Setting of contact output signal 4 to 6 Selection of signal type Table 2.4-2 Setting of contact output signal 4 to 6 No.

Return Filter

(Refer to 6. Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance When installing, allow sufficient space for maintenance. When installing, allow sufficient space for maintenance.

Fieldbus system PROFIBUS DP compatible SI unit

System diag.2 7 6 5 4 3 2 1 0 Byte 8 Bit No.

A_HEC-OM-I009

Specifications -6-1 6.1 Specification table -6-1 6.2 Performance chart -6-2 1) Cooling capacity -6-2 2) Heating capacity -6-2 3) Pump capacity -6-3 7 Preparation for Operation -7-1 7.1 Preparation for circulating fluid -7-1 7.2 Power supply -7-2 7.3 Grounding -7-2 7.4 Supply circulating fluid and drain -7-2 7.5 Check repair -7-3 7.5.1 Daily check -7-3 7.5.2 Check after seismic vibration and

ZR

Arrangement (Right valve station which is looked from valve side is first station.) 06 B Both sides 6 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 1 1 1 station only 1 station only 6 6 6 stations only 6 stations only All stations A All stations A If more than one spacer is required, specify all spacers.

4/5 Port Air Operated Valve Series SYJA3000

8.5 8.5 (Pitch) P = 16 33 (Pitch) P = 17 One-touch fitting (A, B port) 24.5 1/8 (A, B port) Applicable tubing O.D.: 6, 1/4" Other dimensions are the same as the grommet type.

Refrigerated Thermo-chiller

6 15/22 18/23 3/4 5/6 9/10 13/14 6/7 13/14 Rc 1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 20 14 30 23 30 20 25 60 46 Refer to page 94.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.