ZP3

N 10 9 Model A B C q Pad dia.

Vacuum Unit

C A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown

2/3 Port Valve

Description B VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Bracket (with bolt and washer) 4.2-30 VNH Specifications 3 port valve 2 port valve A B A B VNH311 20A A B VNH411 25A A B VNH113 10A A B VNH213 15A A B VNH313 20A A B VNH413 25A A B VNH133 10A A B VNH233 15A A B VNH333 20A A B VNH433 25A A B VNH111 10A VNH211 15A Model Operating fluid pressure Fluid Operation 0 to 7.0MPa 0 to

15

Value) A side B side Traveling parallelism [mm] (Every 300 mm) LEF Model q C side traveling parallelism to A side w D side traveling parallelism to B side q LEJ LEFB25 0.05 0.03 LEFB32 0.05 0.03 LEFB40 0.05 0.03 C side w LEL D side LEM Note) Traveling parallelism does not include the mounting surface accuracy.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

RHC

1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A B C A B A B A B A B Application Same tubing size 1 2 1 2 1 2 3 1 2 1 2 1 2 Refer to the applicable tubing table.

LVQ

S) SMC C A B D SMC B A SMC (Max. T) U Z M N LVQ40, LVQ60 C B A D (Max.

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specification Bracket mounting size Accessory specification With pressure gauge With auto drain Model Port size B C D A K J H G F E Q T N P K L M B AC10B AC20B AC25B AC30B

5 Port Air Operated Valve

2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1 (P) 3

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

0.56 0.66 0.70 B 0.56 0.66 0.70 A 1.50 1.81 2.29 A 1.50 1.81 2.29 B 0.48 0.58 0.61 B 0.48 0.58 0.61 A 1.42 1.72 2.21 A 1.42 1.72 2.21 B 0.60 0.70 0.74 B 0.60 0.70 0.74 A 1.54 1.85 2.33 A 1.54 1.85 2.33 B 0.37 0.46 0.50 B 0.37 0.46 0.50 A 1.30 1.61 2.10 A 1.30 1.61 2.10 Bore Bore 075 (3/4") 106 (1 1/16") 150 (1 1/2") 075 (3/4") 106 (1 1/16") 150 (1 1/2") Mounting Height (NCDM) (in) D-C7 D-C80

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

4 SMC 37.6 53.6 B 2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 :

JXCx-OMU0004

11. 11.1 [5m ] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 S B B-6 9 B A-6 8 3 14.2 2 1 8 14) B1 A1 17.7 6 5 2 1 18 B6 A6 16 15 L 11 30.7 11.2 [820m] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 4 A 10m* Shield B 15m* Vcc B-4 12 C 20m*

MGG

GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 63 SZ + Stroke B Front mounting flange C port A, B port B port A 20 C port A port A ' View A-A' GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 41 Made to Order Specifications Series MGG Auto Switch Rail Mounting 8 MGG XC13 Bearing type Mounting type Stroke Auto switch type Auto switch symbol Bore size Auto switch rail mounting

ZR

A SMC PRESSURE SWITCH SMC PRESSURE SWITCH B B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32.4 32.4 VJ3233-X17 PRESS. 2.5~7kgf/cm2 SOL.a SOL.b VJ3233-X17 PRESS. 2.5~7kgf/cm2 SOL.a SOL.b B B A A RESET SET RESET SET Pitch 33 B B A A B B A A VJ3233-X17 PRESS. 2.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Magnet B External slider tube Spacer Space ring Slide table Side plate A Side plate B y u i o !

F

E A D: M-5E B U L K H E A D R E D U C E R: M-5ER R E D U C I N G B U S H I N G: M-5B M5 female to 18 female taper M5 female to 18 male taper P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R T E C H N I C A L SPECIFICATIONS S T R A I G H T B A R B C O N N E C T O R: M-01AU-4 M-01AU-6 S T R A I G H T A D A P T O R: M-01H-4 M-01H-6 Applicable Tube Material Nylon Soft Nylon Polyurethane

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Hs Series C85 Series CP96 Series C96 Series C55 Auto switch Ht B Auto Switch Proper Mounting Position (mm) D-Z7 D-Z80 D-Y59 D-Y69 D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BA Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-F5W D-J59W D-F5 D-J5 D-F5BA D-F59F D-A3 D-A44 D-G39 D-K39 D-A9 D-A9V D-A5 D-A6 D-P4DW D-F5NT D-A59W A B A B A B A B A B A B A B A B A B Bore size 32 40 50 63 80 100 125 6.5

JXCx-OMT0001CN

12.5 ([5m ] (a) (b) L E C P * B -* A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (c) 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (d) S 4 + B-1 5 A-1 1 + B-3 2 A-3 (8) (a) (b) (14.2) B1 A1 (17.7) 2 1 (14) (18) 6 (10.2) B6 5 A6 2 1 B1 A1 B3 A3 (d) (5.7) 15 16 (c) L (11) (30.7) 12.6 ([820m] (a) (b) LE CP * B A B-1

KJ

Port B Release button Release button Chuck Collet Seal Seal Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R male thread KM15 KM16 Seal Port A Port A Release button Seal Body O-ring Body Guide Rod Collet Port B Chuck Port B Release button Release button Seal Chuck Collet Seal Port A: One-touch fitting Port B: One-touch fitting Stud