25

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

VCB

Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53

Rotary Table Series MSU

II Rotary Table/ Vane Type High Precision Series MSUA Sizes 1, 3, 7, 20 How to Order Connection port position Bearing type Nil E Side ports Top ports A High precision Available with side ports only, when equipped with switch unit. Free-mount Without Auto Switch Unit 20 90 S M SUA With Auto Switch Unit 20 90 S D SUA L R73 M Number of auto switches 1 pc. 2 pcs.

MRQB-OM0002

E1 2 I E[J]I[kg][rad/s] Imr m[kg] rm 5.1 19 I I I I kg kg kg kg m m m m 2 2 2 2 m: m: m: m: kg kg kg kg b 20 5-2. 5.1 5.1 32 0.023[J] 40 0.028[J] 2 t [rad]t[s] E E1 2 I t E 2 I t E[J][rad]I[kg] 2 t (1) t = & (2) C C t 2 1 tdt 2 + = = & & t=0 =0C=0 t 2 1 t 2 1 2 = = & t 2 = 21 5-3.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Lead wire length 0.5 m Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN D-P5DWL is available for 40 to 100. In addition to the models in the above table, there are some other auto switches that are applicable.

EX510-GDN1.eng

(Removal procedure and ) Applicable message I/O message size Input: Max. 8 byte, Output: Max. 8 byte (Changeable by switch settings) 1 2 Baud rate 125 kbps 250 kbps 500 kbps 500 m or less Thick cable 250 m or less 100 m or less Max. length of Network 3 4 Thin cable 100 m or less 156 m or less 78 m or less 39 m or less Total extended cable length Note: Max. extended cable length is 6 m. 11

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

35) 10 (10) 16.5 19.2 18.4 21.6 20.5 23.2 22.4 25.6 05 20 10 A A 30 (25) 10 (10) 1 15 10 For D-F9, D-M9 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotating angle.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

35) 10 (10) 16.5 19.2 18.4 21.6 20.5 23.2 22.4 25.6 05 20 10 A A 30 (25) 10 (10) 1 15 10 For D-F9, D-M9 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotating angle.

Series H, DL, L, LL Self-align Fittings

M H2 (Hex.) L2 L1 Thread R(PT) Part No.

Series 10-, 21- AF-A Air Filter

45 47.5 9.8 14 18 20 24 24 91.4 121.9 153.9 155.9 226.9 240.9 40 53 70 75 90 95 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

With Factory Installed

<m Bowl capacity (cm 3) 15 20 45 Bowl material Polycarbonate Construction Relieving type 0.37 1.16 Weight (kg) Standard accessory Bowl guard Accessory (optional) Part No. Part no. DescriPti~del AW2001 AW3001 AW4001 Bracket B220 B320 B420 t .0MPa 1 10kgf/cm2) GC30-10 Gauge Symbol O.2M Pa 1 2.0kgflcm2) GC30-2 Accessory NOlen Float type N.O. AD43 AD44 auto drain N.C.

JXCx-OMT0032CN

M 24V 0V 0V (2) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (LEC)OFF 22 - 7.CN3 1 2 3 4 5 TM() 1 VDeviceNet 2 CAN_L CAN(L) 3 SHIELD 4 CAN_H CAN(H) TM() 5 V+ DeviceNet DeviceNet TMCAN_HCAN_L 1201% 1/4W 23 - 8.CN1IF(CONT) 8.1 (LEC)8 LEC-CG1-1LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD LEC-CGD LEC-CGR c) M12 4pin LEC-CG1b) M12 4pin b) M12 4pin

High Precision Digital Pressure Switch, Series ZSE40/ISE40

ZSE40(F)/ISE40W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port. (Refer to Specific Product Precautions 4 on the back cover for details.)

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

4/5 Port Air Operated Valve Series SYJA3000 1

Lubrication Not required Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) Note 1) In the case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.

D-F6N/D-F6P/D-F6B

Lead Wire Lead wires with a connector indication Lead wire length indication Part No. of Lead Wires with Connectors (Applicable only for connector type) D-M9BW (Example) L Model Lead wire length D-LC05 0.5 m Symbol Lead wire length D-LC30 3 m Length 0.5 m 1 m 3 m 5 m None 0.5 m 1 m 0.5 m 1 m 0.5 m 1 m 3 m Solid state 2) Reed 3) Tolerance 15 mm 30 mm 90 mm 150 mm 15 mm 30 mm 15 mm 30 mm

Thermo-chiller

Model HRL100-Am-20 HRL200-Am-20 HRL300-Am-20 CH1 CH2 CH1 CH2 CH1 CH2 Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 1.4 2.2 3.0 Control method PID control Ambient temperature [C] 2 to 45 Circulating uid CH1: Tap water/CH2: Tap water, Deionized water1 Set temperature range [C] CH1: 15 to 25/CH2: 20 to 40 Cooling capacity2 [kW] 9 18 19 18 26 18 Heating