Electric Actuator / Guide rod Slider

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In pos[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -19- Example of step data input (2) < Positioning operation Ralative > a b c d e f g h i j k No.

Air cylinder

Please refer to "Fig.1 Allowable lateral load applied to rod end" (Page 8) Table 2 Operating range and kinetic energy Bore size 6 10 16 Allowable kinetic energy 0.12 J 0.035 J 0.090 J Warning Operate the actuator with allowable kinetic energy (Table 2) or less.

Electric Actuator / Low profile slider type

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In posn[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -23- Example of step data input (2) < Positioning operation Relative > a b c d e f g h i j k No.

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

CU

Series CU comparison Allowable kinetic energy (J) Noise reduction of more than 11dB is possible (compared to Series CU20 with rubber bumper). : with air cushion : with rubber bumper 3 Interchangeable mounting Mounting dimensions (J, K, R, and E) are the same as the rubber bumper type Series CU. 2 1 0.70 0.44 0.11 0.28 0.29 0. 18 R 20 25 32 Bore size (mm) E Improved repeatability When compared

Lubrication Equipment

, #3 SAC4006, #3 SAC5000, #3 SAC6000, #3 AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 1.17-6 AL1000 to 6000 Dimensions Metal bowl Option specifications/1000cm 3 tank Metal bowl with level gauge Model Metal bowl Metal bowl with level gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177 177 254 268 162 197 197 274 288 Model Port size A B C D LL M P E F G H J

MLGC

EK M : Kinetic energy (J) : Load weight (kg) + Weight of movable part (kg) : Piston speed (m/s) EK= 2 M 2 Allowable Kinetic Energy When Locking 40 1.19 {12.1} 32 0.67 {6.8} 25 0.42 {4.3} 20 0.26 {2.7} Bore size (mm) Piston speed (m/s) J {kgf cm} Stopping Accuracy (Not including tolerance of control system.)

MLGP

Bore size (mm) a b c d e b a 6.5 8.5 11 10.5 13.5 17.8 5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100

MLGP

Bore size (mm) a b c d e b a 6.5 8.5 11 10.5 13.5 17.8 5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100

VM

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 Q L1 L2 M1 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

Pin Cylinders Series CJP2/CJP

S + Stroke H A' F GB GA 2 x P A F' Mounting nut Width across flats B1 A' Rod end nut Width across flats B2 30 D-1 D E J C MM Without rod end thread NN W B (mm) Symbol A A' B B1 B2 C D E F F' GA GB H J MM NN P S W Z Bore size 6 10 16 7 9 14 14 5.5 2 3 16.5 8 6.5 5.5 6.5 17 6 M3 x 0.5 M10 x 1.0 M3 x 0.5 21 3 38 10 12 15 17 7 2.5 4 19 8 6.5 6 7 20 7 M4 x 0.7 M12 x 1.0 M3 x 0.5 24.5 3 44.5 12

Air Slide Table Series MXJ

(Not plugged in the case of the clean series) J 12 I (Plugged when the product is not a symmetric type.)

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Grease pack part no.: GR-S-010 (10 g) 435 Series MGZ Dimensions Basic style GA DL 2 x P (Rc, NPT, G) GB Y Y WM XAH7 depth XL +0.2 0 4 x MM depth M LL LM WL D1 HR KA C B E D 2 x 4 x J E MA MB KA MC C K NB N B S + Stroke H ZZ + Stroke (mm) Stroke range Bore size (mm) H HR D1 J K KA LL LM B D C DL E GA GB 40 50 63 40 45 50 57.5 63.5 69 78 92 110 M6 x 1 M8 x 1.25 M8 x 1.25 25 25 25 36 46 53 30

Parallel Style Air Gripper Series MHZ

MHZ Flat Type Fingers [3] MHF 4 x MM thread depth L (Thread for mounting attachment) MHL K J MHR A A D G B MHK MHS D B MHC K J F MHT C MHY S W MHW O -X (mm) F G Mass (g) L MM J K D C B W Model A MRHQ Open Closed MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 +0.2 0 5 4 5 8 10 12 15 18 1 1.4 1.4 1.6 2 3 3 3 5 6 8 10 12 16 M2

VHK

C D E F G J K 2(A) 1(P) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHKlR-01S-01S 13 13 17 19 22 VHKlR-02S-02S 17 VHKlR-03S-03S 19 3.6-5 VHKlR-04S-04S 22

VXA21/22

port provides plug. 4.1-65 VVXA21/22 Dimensions Common SUP style Individual SUP style L: Dimensions Model Stations 2 3 4 5 6 7 8 9 10 L L1 L2 L1 L2 100 86 126 108 136 122 172 154 172 158 218 200 208 194 264 246 244 230 310 292 280 266 356 338 316 302 402 384 352 338 448 430 388 374 494 476 VVXA21m VVXA22m Model VVXA21m VVXA22m A 38 49 B 20.5 [17.5] 26.5 [22.5] N 45 49 M 54 58 K 6.5 8.5 J

Title not found

D'Fg'V comply with lEC529, tP65, and J|SC092O Jet stream proot structure. Standard s on Solid State 1000m/S, 50MQ or more underthe test s00vDc 1000 vAc 1 case ano Nore 1) IEC Jtsc0920 Note 1) Terminalconduit lype (D-A3, A3'A, rcrc, G39, G39A, G39C, K39A, and K39C) are compiled with tEC529, tP63, and J|SC0920 (Water proo{) structure.

Title not found

Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.

&snac

I 6 4 , 1 C h o m e , 5 h i m b a s n i , M i n a t o k u T o k v o 1 0 5 0 0 0 4 , J a p a n T E L . 0 3 3 5 0 2 B ? 7 t L 0 J ,r-O c ) ( d o a F D r a i n ( M i n i m u m c I e a r