High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

JA/JAH/JB/JS

ExampleRod end nut for JS40 CV MVGQ CC RB J D-X 20Data 10-19-13 14 Series JS Dimensions JS10, 16 Center of sphere M M U D J U F B G H C E P Use the precision spanner for clock 4 mm in the case of mounting male thread of JS10.

JA/JAH/JB/JS

ExampleRod end nut for JS40 CV MVGQ CC RB J D-X 20Data 10-19-13 14 Series JS Dimensions JS10, 16 Center of sphere M M U D J U F B G H C E P Use the precision spanner for clock 4 mm in the case of mounting male thread of JS10.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 12 14.5 6.5 15 31 6.3 Operating port 2 x M5 x 0.8 Other dimensions are the same as basic type. 808 MXQ 1322Air Slide Table Dimensions: MXQ12 1322Basic Operating port 2 x M5 x 0.8 J I 10 Max. 13 (Retraction end adjuster) 5.5 Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 2 x M2.5 x 0.45 thread depth 3 Operating port 2 x M3 x 0.5 Vacuum suction port M5 x 0.8 2 6 J I 5 Max. 10.5 (With stroke adjuster at retraction end) 4 7 0.5 19 3 5.5 5.5 5.5 3 3 6.5 2 x M2.5 x 0.45 thread depth 3 12.5 K Stroke adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 18 N x M3 x 0.5

SMC

2.7 7.7 32.7 55.7 80.7 13-/22-MXS20 22.9 63.6 35.6 92.6 119.6 26.6 16.6 6.6 6.6 11.6 25.6 53.6 82.6 109.6 16.6 26.6 36.6 16.6 21.6 3 13-/22-MXS25 56.5 40.5 89.5 104.5 31.5 21.5 11.5 11.5 14.5 30.5 46.5 79.5 94.5 21.5 31.5 41.5 21.5 24.5 3 27 133 MXS Air slide table 13221322Dimensions: MXS6 Basic style 2-M2.5 x 0.45 thread depth 3 Operating port 2-M3 x 0.5 Vacuum suction port M5x0.8 2 6 J

MVGQ

G5-S 50 stroke or less CV MVGQ CC RB J DKit no.

MNB

Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread

MNB

Max. ambient temperature Symbol Rod boot material J 60C Nylon tarpaulin 110C K Heat resistant tarpaulin Maximum ambient temperature for the rod boot itself.

MHL2

50 70 Note 1) J dimension is at fully closed.

MHL2

J dimension is different from the value which is subtracted stroke from G dimension.

MNB

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR D C E GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Type Insert pin (single) Insert pin material (J/K type only) Nil S Resin Stainless steel LQ-GH J 07 Holder (single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

MGP

Table 1 How to calculate the kinetic energy of load Bore size (mm) Allowable kinetic energy (J) 12 0.043 16 0.075 M+m 2 u=1.4ua u Ek= 2 20 0.11 25 0.18 Ek : Kinetic energy (J) M : Weight of driven object m : Weight of cylinder moving part (kg) u : Max. speed (m/s) ua: Average speed (m/s) 32 0.29 40 0.52 50 0.91 63 1.54 80 2.71 100 4.54 Note) Select a cylinder so that "Ek" does not exceed

CRQ2

Shaft Type Variation/Without Key Groove Shaft Type: T, J, K Size Rotating angle CRQ2B CDRQ2B Specifications Shaft type Air (Non-lube) Fluid Single round shaft (T), Double shaft (J), Double round shaft (K) Applicable shaft type Refer to How to Order on page 11-8-2 for further information.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

4-FD Cushion adjustment screw Width across flats G GA 4-J Air release GB MM R (max.)

C95Series

. __ I -='.1' .J.. ~ ~ _.

Cylinder

---J Nil --Without auto switch 9O---D-90(O.5m lead wire) B Nose mount I I I T.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-