CG5-S

0 t !3 w With air cushion !2 !1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

Aluminum High Vacuum Angle Valve

r, t, u, i, o, !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Series VQ Metal Seal/Rubber Seal Body Ported

assembly (8 terminals) T kit (4) (4) r AXT100-2-TA2 Terminal block assembly (8 terminals) T kit t VQ Note 1) A S kit is composed of a flat cable housing assembly (AXT100-2-PS20) of q SI unit and w P kit (20 pins).

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Compact 5-Port Solenoid Valve

Specification External pilot (SUP/EXH block assembly) q e r t w y u i q Series w Type 10 Side ported e Wiring 1 JSY1000 3 JSY3000 5 JSY5000 TC Spring type terminal block box T Terminal block box r Valve stations t P, E port entry U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 24 stations) TC: Spring type terminal block box T: Terminal block box Symbol Stations

Table of Contents

for 4 C6: One-touch fitting for 6 M5: M5 thread Note) 3 position types need two stations.

VM

Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø4 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C4L (ø4 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)