Compact

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08

LX Series Compact Electric Actuators

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08

ZL3-OM00601

Caution CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, could result in death or serious injury. Warning 1.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

0.5

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

ZQ-OM01401

) 4 3.2 () 5 4 () 24 - No.ZQ-OM01401-B ZS-39-5G ZQ1-LW6-N-A 1) N NPN P PNP (1) 3 Assy ZQ1-PL11-A 4 Assy ZQ1-FC1-A 5 (10 ) ZQ1-FE2-A 6 ZQ1-CV 7 V VVQ1000-50A-C4 (1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

ZL3-OM00801

16 No.ZL3-OM00801-A 7.2 1 (/) ZL3/ZL6 ZL3-JSY3140-5LZ -a 1 3) 2) DC24V 1) 300mm 300mm * *0.150.18Nm 2) D: E: 1 1 1 1 3) 1 1 2 X12 ZL3/ZL6 SY100-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa

ISE70_75.eng

When piping, tighten to an appropriate torque of 13.6 to 15 Nm for ISE70 series and 25 to 28 Nm for ISE75/75H series. DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Danger: Other Settings Measurement mode DOWN OUT1 Initial setting Press the SET button continuously for 2 seconds or longer.

The ZSM1 series diaphragm type vacuum switch is available in a solid state non-contact or a reed type design. The ZSM1 has a response time of 100 ms. It is lightweight, compact and has a long life.

The ZSM1 series diaphragm type vacuum switch is available in a solid state non-contact or a reed type design. The ZSM1 has a response time of 100 ms. It is lightweight, compact and has a long life.

The ZSM1 series diaphragm type vacuum switch is available in a solid state non-contact or a reed type design. The ZSM1 has a response time of 100 ms. It is lightweight, compact and has a long life.

The ZSM1 series diaphragm type vacuum switch is available in a solid state non-contact or a reed type design. The ZSM1 has a response time of 100 ms. It is lightweight, compact and has a long life.

This is a legacy product.

This is a legacy product.

Vacuum Pad

Weight(g) ZP3B-T1J -B3 ZP3B-T1K -B3 ZP3B-T1J3-B3 ZP3B-T1J6-B3 ZP3B-T1K3-B3 ZP3B-T1K6-B3 ZP3-015U ZP3-02U ZP3-035U 3.5 4.3 6.7 8.1 7 5 M3 x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 Width across flat 8 3 Width across flat 10 B 2 2 B 1.5 D 2 2 D A M6 x 0.75 M8 x 0.75 A 1.5 0.8 0.4 1.5 Dimensions (per stroke) Dimensions (per stroke) Model 4 7 0.8 A 21 28 B 10 14 D A 23.5 30 B 11 14.5

Vacuum Pad

Weight(g) ZP3B-T1J -B3 ZP3B-T1K -B3 ZP3B-T1J3-B3 ZP3B-T1J6-B3 ZP3B-T1K3-B3 ZP3B-T1K6-B3 ZP3-015U ZP3-02U ZP3-035U 3.5 4.3 6.7 8.1 7 5 M3 x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 Width across flat 8 3 Width across flat 10 B 2 2 B 1.5 D 2 2 D A M6 x 0.75 M8 x 0.75 A 1.5 0.8 0.4 1.5 Dimensions (per stroke) Dimensions (per stroke) Model 4 7 0.8 A 21 28 B 10 14 D A 23.5 30 B 11 14.5

Vacuum Pad

Weight(g) ZP3B-T1J -B3 ZP3B-T1K -B3 ZP3B-T1J3-B3 ZP3B-T1J6-B3 ZP3B-T1K3-B3 ZP3B-T1K6-B3 ZP3-015U ZP3-02U ZP3-035U 3.5 4.3 6.7 8.1 7 5 M3 x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 Width across flat 8 3 Width across flat 10 B 2 2 B 1.5 D 2 2 D A M6 x 0.75 M8 x 0.75 A 1.5 0.8 0.4 1.5 Dimensions (per stroke) Dimensions (per stroke) Model 4 7 0.8 A 21 28 B 10 14 D A 23.5 30 B 11 14.5

Space Saving Vacuum Ejector Vacuum Pump System

ZQ-OM00801-D Circuit Diagram Specifications of a Single Unit Ejector System L a L a L a t t t c h c h c h i i i L a L a L a n g n g n g 32 t t t t t t c c c y y y h h h Doc. no. ZQ-OM00801-D Pump system 33 - Doc. no. ZQ-OM00801-D Manifold Specifications Ejector System ZZQ1-BSB ZZQ1-BSC Pump system ZZQ1-OB ZZQ1-OC 34 - Doc. no. ZQ-OM00801-D Mass Ejector System Pump system 35 - Doc. no.

Digital Flow Switch (Remote type sensor unit)

Tubing size B 3 27.5 mm 3 23 mm 4 33 mm 4 39 mm -26No.PF-OMG0006-F PF2D520S-131S Tubing size A Tubing size B 4 33 mm 4 23 mm 5 39 mm 5 28 mm -27No.PF-OMG0006-F PF2D540S-191S Tubing size A Tubing size B 5 39 mm 5 39 mm 6 49.5 mm 6 49 mm -28No.PF-OMG0006-F Revision history A: Full scale revision due to the change of the format and addition of items.