VR4151/4152

1/4" 13.2 13.2 54.4 7.1 36.2 25.6 16.8 16.8 23.5 22.5 VR1210F-09 5/16" 15.2 15.2 60.4 8.1 38.2 28.2 18.7 18.7 24.0 VR1220F-07 1/4" 13.2 13.2 59 7.4 37.9 25.6 16.8 16.8 31.4 23.9 19.8 VR1220F-09 5/16" 15.2 15.2 65 8.2 39.7 28.2 18.7 18.7 31.9 VR1220F-11 3/8" 17.9 18.5 69.8 9.5 25.8 44.5 31 20.8 20.8 53.0 5-7-6 Transmitters: AND Valve with One-touch Fittings VR1211F Model Relay valves for

฀AS

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

AS

AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 AS-32B AS-33B AS-34B AS-35B AS-34B AS-31B AS-33B AS-36B AS-32B AS-37B AS-38B M3 M3 AS-36B AS-34B 4 4 AS-35B AS-37B AS-32B AS-34B AS-36B AS-38B AS-41B AS-42B AS-44B AS-45B M4 M4 4 4 AS-45B AS-42B AS-44B AS-47B AS-46B Precautions when options are ordered Threaded studs for manifold are

Regulator for Chemical Liquids Series LVR

Applicable model LVR20 LVR40 06 6 x 4 LVR20 LVR40 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 2

Vacuum Unit Series ZK2

ZK2 07 Without option B 10 09 Bracket P to N C to N Use when a single unit is mounted to the floor in an upright position is requested.

AC Servo Motor Driver

Stop Stop Command : [9][2] Data No. : [0][0] Data : 01 (SON turned ON) Command : [9][2] Data No. : [0][0] Data : 07 (SON, LSP, LSN turned ON) Stop. END Command : [8][B] Data No. : [0][0] Data : 0 (Test operation mode cancel) Cancel the test operation mode. 13 29 13.

AC Servo Motor Driver (Network card type ）

PF _ _ ] 06: Parameter for manufacturer setting 07: Parameter for manufacturer setting 08: Parameter for manufacturer setting 09: Parameter for manufacturer setting 0A: Parameter for manufacturer setting 0B: [Pr. PL _ _ ] 0C: [Pr. PT _ _ ] 0E: [Pr.

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

30

(inch) a b Note 2) Effective area (mm2) Applicable tube b Note 1) D2 Note 1) D1 Q Weight (g) D1 M2 O L1 L2 L3 M1 N Model KQB2T01-03 KQB2T03-07 KQB2T07-09 KQB2T09-11 KQB2T11-13 3.8 7.1 16.4 36 56 5.6 5.6 8 8 8 3.2 3.2 4.2 4.2 4.2 8.5 11.7 20.2 28.9 41.8 4.1 4.4 6.3 7.1 8.1 9.1 11.7 13.7 16 19.6 8.3 9.1 11.7 13.7 16 14.2 15.5 19.3 20.6 23.3 14.1 15.9 17.6 21 23 21.1 22.7 29.6 31.7 35.4 12.6

212

Applicable model LVR20 LVR40 LVR50 06 6 x 4 LVR20 LVR40 LVR50 07 1/4" x 5/32" 12 12 x 10 11 3/8" x 1/4" 19 19 x 16 13 1/2" x 3/8" 19 3/4" x 5/8" : Basic size : With reducer 07 LVR 2 0 T Tube extensions Body class Pilot port thread type Symbol Type Nil Rc N NPT Symbol Body class 2 2 4 4 Tubing size Tube extensions Metric size Inch size Symbol Tubing size Applicable model Symbol Tubing O.D.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type 32P How to Order 10--SS5YJ3--32P-07 -C4 Applicable connector assembly Refer to page 505.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

How to Order 10 SS5YJ3 32P 07 C4 Applicable connector assembly Refer to page 294. A, B port M5 x 0.8, C4 Clean series P, R port thread type Stations Applicable blanking plate assembly Refer to page 302.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

11.4 52.2 6.2 25.2 53 47.6 16.5 6 12.8 AS2051F-07-3 AS3001F-08-3 64.4 8.2 32.1 60.9 55.5 18 15.5 1/4" 13.2 54.4 7.1 26 53.8 48.4 17 15.2 8 3.5 17 13 21 18.5 16 3.5 AS2051F-09-3 AS3001F-10-3 71.6 9.8 33.7 62.5 57.1 21 5/16" 15.2 59.8 8.1 27 54.8 49.4 18 10 18.5 AS3001F-07-3 AS3001F-12-3 76 11 34.9 63.7 58.3 22 1/4" 13.2 59 7.4 31.3 60.1 54.7 17 20.9 12 AS3001F-09-3 AS4001F-10-3 82 11.3 35

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Micro Mechanical Valve Series VM1000

220 200 VM430-01-00 VM430-01-01 VM430-01-01S VM430-01-02 VM430-01-02S Basic VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Roller lever Hard steel roller Polyacetal roller Hard steel roller One way roller lever Straight plunger VM430-01-05 Polyacetal roller Hard steel roller Roller plunger VM430-01-06 VM430-01-06S VM430-01-07

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Pad diameter/form Silicone rubber Urethane rubber FKM ZHP63BM 2.9 0 20.3 ZHP80BM 5.0 0 35.1 ZHP63UM 1.5 0 10.6 ZHP80UM 2.1 0 15.5 255 ZHP Series Exhaust Characteristics/Flow Rate Characteristics (Representative Value) Flow Rate Characteristics Exhaust Characteristics ZHP-07 ZHP-07 (Supply pressure: 0.35 MPa) 50 45 40 35 30 25 20 15 10 5 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30

HRX-OM-M005

CH1-07 CH2-07 Reservoir High Level WRN Continued Drain the circulating fluid. Check the load specification. Replacement of the thermal fuse is required. Call the supplier for service. CH1-08 CH2-08 Temp. Fuse Cutout FLT Stop The circulating fluid tank was raised in temperature. The temperature of the circulating fluid exceeded the specified value.