System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: L-type Plug Connector, Vacuum, V Port: Inch Size, ø5/16" One-touch Fitting, Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached)], Pump System PE Port Female Thread: -, Individual

System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: L3 (L-type Plug Connector), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached)], Pump System PE Port

System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: L3 (L-type Plug Connector), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached)], Pump System PE Port

System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: L3 (L-type Plug Connector), Vacuum, V Port: 08 (Metric Size, ø8 One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached)]

System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: L3 (L-type Plug Connector), Vacuum, V Port: 09 (Inch Size, ø5/16" One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached)]

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Red (DC) Black(DC) VFS Blue 100V AC 110V AC 200V AC 220V AC Red Blue 100V AC 110V AC 200V AC 220V AC Red VS VS7 Indicator light With light and surge voltage suppressor Circuit for DC Circuit for AC Light A() A [+] SOL SOL C(+) C ZNR Light [] Due to the use of non-polar light, the VQZ series has no polarity.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification as M5.

Return Filter FH100 Series

D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70 387 540 17.5 3 520

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Note) 1/2 standard Metric size 23 04 06 08 10 12 Inch size Made to Order Refer to page 608 for details. 3.2 01 03 05 07 09 11 13 1/8" With One-touch fittings 4 5/32" Caution 6 3/16" 8 1/4" Be sure to read before handling.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

VXZ

C. Normally closed N. O.

5

Auto switch model Bore size (mm) 20 25 32 40 D-M9(V) D-M9W(V) D-A9(V) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) REA D-M9A(V) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of b, c, d, e) BM5-040S (A set of b, c, d, e) REB Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch

CV/MVGQ

O.D. of cover : 1.7 mm Socket Coil ML2B Cover Hook For DC C J G5-S 3.

CV/MVGQ

O.D. of cover : 1.7 mm Socket Coil ML2B Cover Hook For DC C J G5-S 3.

HRX-OM-S004

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Please contact SMC regarding the connection thread NPT and pressure gauge supply for Both MPa and psi unit specifications. 1076 A 1021-AR-B Regulator Dimensions AR20-B to 40-06-B 10212 x P1 (Port size) Pressure gauge (Option) A BB C B Q V AA H K IN OUT R Applicable tubing 6/4 P2 (Pressure gauge port size) F J D U Bracket (Option) T N S M J Panel fitting dimension Y W IN OUT Z Plate thickness

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB DBT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 -X BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

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Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

ZP C ZCU Dimensions H B AMJ Ball joint type: 10 to 32 Misc.

Vacuum Pad: Ball Joint Type

C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 16 18 32 35 2 13 16 49 40 50 ZPT F-B5-A14 (Without buffer/Male thread) M14 x 1 M5 x 0.8 Hexagon width across flats 19 5 5 20 D 5 F Hexagon width across flats 21 C