NCG/CG1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 114 119 121 139 162 162 196 196 11 11 11 12 13 13 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 110 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 12 12 12 13 14 14 20 20 Up to 350 Up to

4/5 Port Solenoid Valve

136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220 212 SS5YJ3-32, S32Stations -C4 Station n L1 L2 Station 2 42.5 33.5 Station 20 231.5 222.5 3 53 44 4 63.5 54.5 5 74 65 6 84.5 75.5 7 95 86 8 105.5 96.5 9 116 107 10 126.5 117.5 11 137 128 12 147.5 138.5 13 158 149 14 168.5 159.5 15 179 170 16 189.5 180.5 17 200 191 18 210.5 201.5 19

Compact 5-Port Solenoid Valve

COM. 13 14 13 14 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 1 2 1 2 1 2 (P, PC: 26 pins) (PG, PGC: 20 pins) (PH, PHC: 10 pins) A mixture of single and double wiring can be specified on the manifold specification sheet. The maximum number of stations is determined according to the number of solenoids.

AC Servo Motor Driver (CC-Link Type ）

G3-G4 contact specifications Maximum voltage: 120V AC/DC Maximum current: 0.5A/4.8VDC Maximum capacity: 2.4VA 13 11 13.

ZP

-11-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

AC Servo Motor Driver (CC-Link Type ）

G3-G4 contact specifications Maximum voltage: 120V AC/DC Maximum current: 0.5A/4.8VDC Maximum capacity: 2.4VA 13 11 13.

Vacuum Pad

16 20 32.5 39 49 11 14.5 20.5 13 16 20 32.5 39 49 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

16 20 32.5 39 49 11 14.5 20.5 13 16 20 32.5 39 49 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

16 20 32.5 39 49 11 14.5 20.5 13 16 20 32.5 39 49 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

JIS Standard Hydraulic Cylinder

10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2 CH2 CHA CH2F (mm) Auto switch model Bore size (mm) 32 Related Products 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

11 13.5 A 21 16 14 16.5 A 9 7 9.5 B 10 10.5 13 13 13.5 19 21.5 20.5 B 16.5 22 24.5 23.5 B 15 17.5 16.5 A 10 13 16 16 18.5 13.5 11.5 14 A 20 15 13 15.5 B 10.5 11 13.5 13.5 14 19.5 22 21 B 15.5 21 23.5 22.5 A 7 10 13 13 15.5 10.5 8.5 11 B 7.5 8 10.5 10.5 11 16.5 19 18 A 17 12 10 12.5 B 12.5 18 20.5 19.5 12 16 20 25 32 40 50 63 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W

Table of Contents

AXT500-13 VQ7060-13-2 VQ7060-13-1 VQ7060-13-3 37 x 1.6 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Pilot valve assembly Double check spacer DIN terminal q w e r t y u i o MYN-11 MYN-16 VQZ110QVV71-FPG UKL-S1 3-10-10 11 Series VQ7-6 Manifold Specifications How to Order Manifold VV71 6 02D 02R VK Air release valve coil rating Stations 1 1 station VZ Silencer box Nil 1 2 3 4 9 None

1

20 13 31 Dimensional Range Not Possible to Machine Additionally B C D A B C D A 91 16 Bore (mm) 20 25 32 40 50 Bore (mm) 20 25 32 40 23 13 31 D LX Model MXH6 MXH10 MXH16 MXH20 18 10 28 12 18 10 28 16 114 20 29 19 36 11 27 23 13 36 13 23 13 36 20 132 25 34 19 44 15.2 32 23 13 36 16 23 13 36 20 156 30 38 19 44 20 38 27 15 42 20 27 15 42 25 186 35 44 26 58 26 43 33 19 52 25 214 40 49 26 64

LEC-OM07605CN

. 117 11.2.2 . 119 11.2.3 . 119 11.2.4 . 11-11 11.3 MR ConfiguratorTM(MR Configurator2) . 11-12 11.4 (LEC-MR-BAT6V1SET) . 11-14 11.5 . 11-15 11.6 () . 11-18 11.7 () . 11-18 11.8 . 11-19 11.9 . 11-26 11.10 EMC() . 11-29 12 121 126 12.1 . 122 12.2 . 123 12.3 . 124 12.4 . 125 12.5 . 126 13 STO 131 13-14 13.1 . 132 13.1.1 . 132 13.1.2 . 132 13.1.3 . 132 13.1.4 STO . 133 13.1.5

CV/MVGQ

11 13 16 147 157 173 189 203 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note Solenoid assembly Epoxy/Stainless steel DXT170-APush rod Body Resin NBR O-ring NBR 13 x 11 x 1 Common with Series VZ 000 3 5 o EXH poppet Back up spring FKM V seal Stainless steel Brass, NBR Retainer assembly Stainless steel Poppet spring 3-3-11 11 Series VZ1000 2 Position Single Grommet (G), (H) VZ1120-M5 G H VZ1120 (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm Manual override

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Series SV

Quantity 20 19 18 17 16 15 13 12 11 14 10 9 8 7 6 5 4 3 2 1 Valve stations Single solenoid Double solenoid Closed center Exhaust center Pressure center N.C./N.C. N.O./N.O. N.C.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.