Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Dimensions 2-M2 x 3 (Countersunk head Phillips screw for precision instruments) 2-M2 x 3 (Cross recessed head machine screw for precision instruments) 2-M3 x 8 (Bolt with hex. hole) 2-M2 x 5 (Bolt with hex. hole) MXP10/12/16 MXP6 Applicable size Switch rail part no.

Series SV

SX3000-22-2 (M2 x 24) SV2000-21-1 (M3 x 30) Round head combination screw Manifold Specification Sheets 75 Series SV Valve Manifold Specifications Type 16: Cassette Base Manifold Replacement Parts Adding manifold bases (type 16) 1 Loosen the screws a (2 pcs. on one side) that hold the manifold base onto the DIN rail.

Valve Single Unit

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted Series SX3000/5000/7000 Dimensions: Series SX7000 2 position single

Parallel Type Air Gripper Series MHZ

Flat Type Fingers [3] 3.5 2 7.5 7.5 +1.2 0.8 +0.2 0 2 When closed 1 When open 5 3.5 Note) To mount attachments, use M2 hexagon socket head cap screws with 3.3 top diameter, or JISB1101 type M2 round head screws. 7.2 4-M2 x 0.4 thread depth 3 Attachment mounting thread 0 -0.05 4 Weight: 25g Specifications and dimensions other than the above are the same as the basic type. 7 Parallel Type

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 Driver type Nil Without cable S Standard cable R Robotic cable (Flexible cable) Nil Without cable 3 3 5 5 A 10 C 20 Compatible driver Power supply voltage [V] Nil Without driver M2 LECYM2-Vl 200 to 230 U2 LECYU2-Vl 200 to 230 25ALEC * When the driver type is selected, the cable is included. Select cable type and cable length. LEC S LEC SS-T !

Electric Actuator/Slider Type

Note 2) Check the clearance and play of the guide separately. 26 Electric Actuator/Slider Type Belt Drive Series LEFB LEFS25, 32, 40 AC Servo Motor RoHS How to Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

LEC-OM02704CN

CHEMI-CON 16 4 16. 16.2 (1) (2) 16.3 16.4 (LE-S5-LE-S6-LE-S7-LE-S8-)3000[r/min] 16 5 16. 16.5 IP65 (1) 2) 1) 3) 1) 2) 3) 4) 1) 2) 1) 4) 2) (2) M2 0.1Nm : M2 : 0.1Nm M2 0.1Nm : M2 : 0.2Nm M2 0.2Nm : M2 : 0.2Nm (3) (O)(O) (O) 16 6 1 (). 2 2 . 4 3 721-2105/026-000(WAGO) . 4 4 . 5 4.1 . 5 4.1.1 . 5 4.1.2 . 5 4.1.3 . 5 4.2 . 6 5 () . 6 6 () . 7 7 PLCA () . 9 7.1 . 9 7.1.1

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

K E1 E1 E2 E2 L L H1 M1 H2 M2 W Model Applicable tubing O.D.

One-touch Fittings

L2 L2 M2 M2 Release button dimensions X X Y Applicable tubing O.D.: 4, 6 Male Run Tee: KQ2Y-G (Gasket seal) Connection thread M Model H (Width across flats) 2 x Applicable tubing Effective area [mm2] Min. port size Release button dimensions D2 L1 L2 L3 A M Applicable tubing O.D.

VM

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

KJ

(inch) Note) Weight (g) 3-Applicable tubing M1 M2 D L1 L2 P Q Model KJU01-00 KJU03-00 KJU07-00 1 8 28.5 27.9 12.9 12.9 7.6 12.7 12.7 2.6 3 5 8.4 9.3 12 19 18.3 22.7 8.4 9.3 12 5.8 6.3 5 32 1 4 13.6 Note) D: Max. diameter 13.8 32.3 K M H Different Diameter. Union Y: KJU D Applicable tubing O.D.

Pin Cylinders Series CJP2/CJP

Applicable bore size (mm) Round type CJ-CR004 CJ-CR006 CJ-CR010 CJ-CR016 Flat type CJ-CF004 CJ-CF006 CJ-CF010 CJ-CF016 NTJ-004 NTP-006 NTP-010 NTP-015 4 M2 x 0.4 1.6 4 4.6 4 5 6 9 M2 x 0.4 3 6 5 6 M3 x 0.5 1.8 5.5 6.4 6 6 8 11 M3 x 0.5 5 8 6 10 M4 x 0.7 2.4 7 8.1 10 8 10 13 M4 x 0.7 6 10 8 16 M5 x 0.8 3.2 8 9.2 16 10 12 15 M5 x 0.8 7 12 10 30 Pin Cylinder: Double Acting, Single Rod Series

Table of Contents

x 0.4 x 13 2 2 2 2 2 2 2 4 4 M2 x 0.4 x 23 M2 x 0.4 x 48 M2 x 0.4 x 53 M2.5 x 0.45 x 41 M2.5 x 0.45 x 17 M2.5 x 0.45 x 21 M2.5 x 0.45 x 66 M2.5 x 0.45 x 70 w Common and port exhaust style for nozzle size 18, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20

Membrane Air Dryer

.: 10 (NPT threads: 3/8 inch) Hexagon width across flats 17 3/8 1/2 232 91 24 25 Membrane Air Dryer/Unit Type Series IDGM2 IDG75<M2 IDG100<M2 Single Unit Type Model Selection Made to Order Specific Product Precautions Unit Type C (A) Q (B) Port size H Q D M R Purge air for L N dew point indicator K 37 22 P G IN OUT 18 OUT (F) M V

AC Servo Motor Driver

Connector for encoder Screw size: M2 Tightening torque: 0.1 [Nm] lock Connector for electromagnetic brake Screw size: M2 Tightening torque: 0.2 [Nm] Connector for power supply Screw size: M2 Tightening torque: 0.2 [Nm] (3) The servo motor fitting part of each connector is provided with a splash-proof seal (O ring).

LEC-OM02904

CHEMI-CON 13 4 13. 13.2 (1) (2) 13.3 13.4 (LE-S5-LE-S6-LE-S7-LE-S8-)3000[r/min] 13 5 13. 13.5 IP65 (1) 2) 1) 3) 1) 2) 3) 4) 1) 2) 1) 4) 2) (2) M2 0.1Nm : M2 : 0.1Nm M2 0.2Nm : M2 : 0.2Nm M2 0.2Nm : M2 : 0.2Nm (3) (O)(O) (O) 13 6 1 . 2 1.1 . 2 1.2 . 3 2 . 4 3 (WAGO) . 4 4 AC . 5 5 . 6 6 . 7 6.1 . 7 6.1.1 . 7 6.1.2 . 7 6.1.3 . 7 6.2 . 8 7 () . 8 8 EC . 9 8.1 EC

New

In the case of liquid: $P Q = 1.9 x 106 Av .(9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] $P : Pressure differential [MPa] G : Specific gravity [water = 1] In the case of saturated steam: Q = 8.3 x 106 Av $P (P2 + 0.1) .(10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] $P : Pressure differential [MPa] P1 : Upstream pressure [MPa]: $P = P1 P2 P2 : Downstream pressure [MPa] 31

MY1

Y g: Gravitational acceleration, a: Average speed 24 Series MY1W Maximum Allowable Moment/Maximum Load Weight Maximum allowable moment Maximum load weight (kg) m1 Maximum allowable moment (Nm) M1 Bore size (mm) Model M2 M3 m2 m3 Select the moment from within the range of operating limits shown in the graphs.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CY1H15 CY1HT32 CY1HT25 CY1H25 64 56 (Nm) 50 40 30 50 40 30 20 28 26 M1 M2 M3 M2 M3 M1 Model Model 20 CY1H20 CY1H15 16 Moment (Nm) Moment (Nm) CY1H10 CY1H25 1.5 2.5 1.5 28 26 28 13 10 10 CY1H15 CY1HT25 10 16 10 56 85 56 2 2.5 3 4 5 2 3 4 5 CY1H20 CY1HT32 13 16 13 64 96 64 CY1H10 CY1H10 1.5 1 M3 1 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 Piston speed (mm/s) Piston speed (mm/s) M1 M2

ML2B

(Nm) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) Pitch moment M1/M1e 10 20 40 Roll moment M2 1.2 2.4 4.8 Yaw moment M3/M3e 3.0 6.0 12 MI W S 40 Model 20 30 YES 20 5 4 3 10 ML2B25 ML2B32 ML2B40 CEP1 If speed or load changes, stopping time may vary and positioning accuracy may be compromised.