Manifold Regulator Modular Type ARM2500/3000 Series

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

4/5 Port Air Operated Valve Series SYJA3000 1

center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting) 2-3.2 equivalent (18.5) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2-1 (Bleed port) 21 R2 P P1

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

4/5 Port Air Operated Valve SYJA3000 Series

SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2 x M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2 x M3 x 0.5 (Pilot port) (For mounting) 2 x 3.2 22 3 49 2.5 (For mounting) 2 x 3.2 equivalent (18.5) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2 x 1 (Bleed port) 21 R2 P P1

SYJA3000

01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center 01 02 SYJA7540Note1) P, A, B port: Rc(PT)1/8R1, R2 port: Rc(PT)1/4 Note2

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Process Pump <Fluororesin Type> Series PA3000

Suction port 2 Series PA3000 How to Order PA 3 3 1 0 03 Assembly environment Standard Clean room Nil P Option Body material Nil Body only With foot With silencer (for automatic operation type only) 3 Fluororesin B N* Diaphragm material 1 PTFE * With silencer AN200-02 for AIR EXH. AN200-N02 for NPT.

For Water Digital Flow Switch Series PFW

Note 3) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above). 20 For Air Digital Flow Switch Series PFA How to order PFW3 0 0 A Remote Type Display Unit Unit specification Flow rate range Nil M With unit switching function Fixed SI unit Note) 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 1 0

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

TABLE OF CONTENTS

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS COAST PNEUMATICS 8055 E.

7ND9071en

After connections of electric signal and pneumatic supply the micro controller (C) reads the input signal, position sensor (), pressure sensors (Ps, P1, P2) and spool position sensor (SPS). A difference between input signal and position sensor () measurement is detected by the control algorithm inside the C.

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply, P Port: 2 (ø4, Straight

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1A (Pressure Sensor, 0 to -101kPa, Accuracy ±1% F.S.), Air Pressure

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S