Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Function: 2 Position Single, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: Base Mounted w/Sub-plate 1/4 Side Piping, Thread: -

Function: 2 Position Single, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Base Mounted w/Sub-plate 1/4, Body Ported 1/4, Thread: NPTF, Option: -

Function: 3 Position Closed Center, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Base Mounted w/Sub-plate 1/4, Body Ported 1/4, Thread: NPTF, Option: -

Function: 2 Position Single, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Sub-plate Plug-in Terminal 1/4, Non Plug-in Std 1/4, Option: -

Function: 3 Position Closed Center, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Sub-plate Plug-in Terminal 1/4, Non Plug-in Std 1/4, Option: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

VFS2000, body ported and base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm2, Ambient and fluid temperature: -10 to 60 C, Manual override: non locking push style, VALVE SOL/PILOT 110VAC *LQA, VALVE, VFS2000 SOL VALVE 4/5 PORT, 2F, VFS2000, 0.924 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted., VALVE, DBL SOL, BASE MT *LQA, VALVE, SY3000 SOL/VALVE, RUBBER SEAL, 2F, SY NO SIZE RATING, .20539 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted., VALVE, D/SOL, BASE MT, *LQA, VALVE, SY5000 SOL/VALVE, RUBBER SEAL, 2F, SY5000 NO SIZE RATING, .20240 lb

pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less, VALVE, 3 POSITION PLUG-IN *LQA, VALVE, VQ2 SOL VALVE 4 WAY, 2F