MLGP

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50

Table of Contents

1/16 (2) (1) Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 0.06 0.26 0.21 0.44 0.47 1.17 1.22 Note 1) Pressure gauge connection threads are not required for regulator with a square embedded type pressure gauge (AR20 to AR60).

PSE550/300

Applicable pressure sensor PSE531 PSE541 PSE561 PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) pressure range 5%R.D.

ZP

Model Model ZPT20B-0-A10 ZPT40B-0-A14 12.4 47.5 24.4 20 22 23.5 32.5 25 40 48 16 43 34 10.5 ZPT25B-0-A10 ZPT50B-0-A14 15.6 25 27 24 33 28 51.5 32.4 50 57 19 53 38 ZPT32B0-A10 32 34 29 38 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 20 25 32 Model F F H E E F H F E E E F Model G: 6 G: 8 G: 6 G: 8 ZPTB10-0-A14 150.5 60 64 145 149 154.5 G: 4 G: 6 G: 4 G: 6 G: 4 G: 6 ZPTB10-0-A10

SYJ300/500/700

F Nil Rc G N T NPT NPTF Brackets are not installed.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

-t 1-' I . '" ~ III 1-. ~. 101 B P A B P A B P -I: e-' ~ .'" III III III _ ...J _ -I: """'. T '"'Iii A B P A eH~ I I--!._';':: 1--2.9~75) 3.98(101) 5.93(150.5) 6.22(158) Dsi Bottom porting NWSFR2-01-( stations )2-( port size) With Indlca10r light 0.85 (2 t.5) and surge vollage SUpOre or '.NPTF 2 ports PilO1 oper8~lor="'E""XH:;-:port=2-G(PF)'.

ZP

Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

Electric Actuator

LEFS LECS: LECA6 LECP6 LEC-G LECP1 LECPA LEFB DIN rail is locked.

Valve Single Unit

(Light/Surge voltage suppressor) (Light/Surge voltage suppressor) Polarity indicator (Lead wire length) G: 300 H: 600 1-6-21 Body Ported Series SX3000/5000/7000 Dimensions: Series SX5000 Foot bracket SX5220-F1 C4 C6 C8 2 position double Grommet (G), (H): SX5220C4 C6 C8 G H G H (Light/Surge voltage suppressor) (Mounting hole) 2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 (

Valve Single Unit

A: Orange B: Green G: 300 H: 600 (Press and turn for the locking type.)

VZ100/300/500

NPT NPTF Stainless steel 4-6-15 16 Series VZ300 Body Ported Grommet (G), (H) VZ32-M5(-F) G H (Mounting hole for manifold) Manual override (Non-locking) G: 300 mm H: 600 mm (Lead wire length) Bracket Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Mounting hole)

Compact Vacuum Unit

Example) 5-station manifold with pressure sensors 0.035 (16) Weight Ibs (g) 0.049 (22) 0.062 (28) 0.075 (34) 0.09 (41) 0.104 (47) 0.117 (53) 0.132 (60) 0.146 (66) 0.159 (72) 0.174 (79) 0.187 (85) 0.088 Ibs x 5 pcs. + 0.011Ibs x 5 pcs. + 0.09 Ibs = 0.585 Ibs (40 g x 5 pcs. + 5 g x 5 pcs. + 41 g = 266 g ) 4 Series ZB Ejector Exhaust Characteristics/Flow-rate Characteristics K J Nozzle Size

42

H G H G H G H G H 3-position double check: VQ465 -l 0 1 VQ7 178.5 73 42.5 50 Indicator light 164.5 178.5 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light 59 73 42.5 50 11(12.5) 11(12.5) 2 4 4(A) port 2(B) port 24.6 38 48 4 2 B A A B 24.6 38 48 14 12 5 3 1 B A 30 45 14 12 3 5 Manual override 2 x 5.6 Mounting hole 2 x 5.6 Mounting hole 30 45 Manual override 129 91.5 41.3 32 30.6 27 78.8

Air Slide Table Series MXS

Model F 25 25 40 50 38 50 N 4 4 4 4 6 6 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 GA 17 12 33 43 43 83 HA 20 30 20 28 46 56 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60 96 K 23.5 33.5 43.5 53.5 63.5 88.5 KA 82.5 132.5 NA 2 2 2 2 4 4 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 ZZ 56 61 72 90 108 158 -X MXS8L-10 MXS8L-20 MXS8L-30 MXS8L-40 MXS8L-50 MXS8L-75 Individual

VZS

Other dimensions are the same as the grommet type. 3-7-12 13 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS2250-G H(S)-01 3 position closed center: VZS2350-G H(S)-01 3 position exhaust center: VZS2450-G H(S)-01 3 position pressure center

MXS

My=1 X 9.8(10+30)/1000=0.39 A3=30 M=W(Ln+An)/1000 Corrected value for center position distance of moment An: Table 3 May=1 X 1 X 15.9=15.9 Mymax=15.9 K=1 g=1 a2=0.39/15.9=0.025 Mar=15.9(Same value as May) Calculate allowable static moment Ma (Nm) Ma=K g Mmax Work mounting coeficient K: Fig.3 Allowable moment coeficient g: Graph 2 Max. allowable moment Mmax: Table 4 a2=M / Ma Calculate load

Step Motor Controller

(Screw mounting) 6.0oz (170 g) (DIN rail mounting) Weight [g] Note 1) Do not use the power supply of inrush current prevention type for the controller power supply.

Series VQ Base Mounted Metal Seal/Rubber Seal

The electrical entry port {VQ1000: G(PF)1/2, VQ2000: G(PF)3/4} permits connection of conduit fittings. Max. 24 stations. Enclosure: dust-resistant/jetproof type (IP65) available.

SMC

H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 depth 3 +0.025 0 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 HA 20 30 20 28 46 56 H 28 30 20 28 23 28 GA 17 12 33 43 43 83 G 9 12

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.