Compact Vacuum Unit

Also, do not use the filter when these chemicals are present in the atmosphere. 2 Series ZB How to Order Manifold S 01 ZZB 08 M5 Stations Pressure Sensor/Vacuum Pressure Switch Mountable Note) Sensor/switch non-mountable base Sensor/switch mountable base Nil S 01 02 1 station 2 stations Note) Select S when the model with either the pressure sensor or the vacuum pressure switch is selected

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115

VQC

B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

Serial Transmission System Series EX250 Series EX500

Stations N R S 01 1 station Note 5) Note 6) The maximum number of stations differs depending on the electrical entry.

SY

Notes: Blanking plate assembly: SX3000-75-1A SUP block disc: SX3000-77-1A EXH block disc: SX3000-77-1A (2 pcs.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SX5000-50-1A-Q C4 C6 C8 SX3000-50-1A-Q C4 C6 1 Manifold block assembly P, R ports SY3000 8 One-touch fitting P, R ports SY5000 10 One-touch fitting 2 SUP/EXH block assembly SX3000-51-1A SX5000-51-1A 3 For D side End block assembly R SX3000-52-1A-Q SX5000-52-1A-Q 4 End block assembly L SX3000-53-1A-Q SX5000-53-1A-Q For U side 5 Connector box VZ3000-106-1A 24VDC only 6 Rail stopper Made by

2

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

Table of Contents

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ1000-1A-2 Note No.

Vacuum System Peripherals:

Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-1A Individual SUP spacer assembly: SY3000-38-3A SUP/EXH block assembly (for R): SX3000-51-6A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-3A SUP/EXH block assembly (for S): SX3000-51-7A SUP/EXH block assembly (for RS): SX3000-51-8A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH

Hydraulic Filters

AL-196H 04 06 08 10 12 16 20 24 28 32 04 06 08 10 12 16 20 24 28 32 JIS B2401-1A-G70 JIS B2401-1A-G35 AL-197H JIS B2401-1A-G90 JIS B2401-1A-G45 JIS B2401-1A-G50 JIS B2401-1A-G105 JIS B2401-1A-G55 AL-198H JIS B2401-1A-G65 Petroleum, Emulsion, Water-glycol FHIA N W JIS B2401-1A-G125 JIS B2401-1A-G70 AL-199H JIS B2401-1A-G80 JIS B2401-1A-G145 JIS B2401-1A-G95 AL-200H JIS B2401-1A-G100 JIS B2401

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

"S" option is not available.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.68 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O N P A R T S A S S E M B L Y FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 2.69 SOLENOID

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01

VFS

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components VS4 System Solenoid valve Speed controller Silencer Tube bore x Length VQ7 Series VFS2000 AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) A T0604 x 1 m 1 8 Rc EVS Series VFS2000 AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) VFN B T1075 x 1 m 1 4 Rc Double Check Spacer/Specifications Can hold an intermediate cylinder

AC Servo Motor Driver (Pulse input type/Positioning type ）

) No alarm (ON) ALM (Malfunction) 2.5 s to 3.5 s 3 16 3.

VFR

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

42

D0 D1 D2 U0 U1 U2 1 to 16 stations Kit L Kit L SD S Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 output points) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 output points) DeviceNet OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) CC-Link Note 1) For the T kit and S kit, 2 stations are required to mount the terminal block