High Vacuum L Type Valve

Material 63 80 100 160 Exterior seal (3) Standard AS568-043V AS568-045V AS568-050V AS568-167V Specific AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Valve seal (2) Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Specific AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** S Valve seal Standard XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Specific XLD63-2-9-1A ** XLD80

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

Large Size Vacuum Module: Series ZR

pressure supply port (PS) Filter block Spacer A Valve unit 84 2 x 4.2 (Mounting hole) Rc 1/8 PV port Air pressure supply port(PV) A 2 2 1.2 1 Adapter C Ejector Bracket A Bracket A Rc 1/8 Vacuum port (V) A: Release flow rate adjusting needle with lock nut ZR1 1-K1M-D10 13 15 7.2 1 For port exhaust 9 (Needle fully open) Exhaust (EXH.) port Rc 1/8 A A B B A A B B S S A A B B 73 Digital pressure

XM, XY

AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi

Modular Type Lubricators Series AL

Y M B O L S H O W T O O R D E R L U B R I C AT O R S E R I E S NAL NAL800-N12 (1 14 NPT) NAL800-N14 (1 12 NPT) NAL900-N20 (2 NPT) T E C H N I C A L SPECIFICATIONS D I M E N S I O N S L U B R I C AT O R NAL800 NAL900 Max Supply pressure 1.5MPa / 220PSI Max Operating Pressure 1MPa / 145PSI Operating Temp Range 5~60C /40~140F Recommended lubricant Turbine oil #1 (ISO VG32) Bowl Polycarbonate

10

A 24 VDC 5 Size 2 B E A B 4 N.C. Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet 7 N.O. 110 VAC With surge voltage suppressor 200 VAC Size 3 C F A B 5 N.C.

/

Nil/G N/T 2-port 7 MPa 3 MPa SGH100 3 MPa SGH1-16-1A SGH100 7 MPa 3-port 7 MPa 3 MPa EBKX-W4005 EBKY-D8006 SGH200 2-port 7 MPa SGH2-16-1A 7 MPa 3 MPa SGH1-16-1A SGH200 3 MPa 3-port SGH300 7 MPa SGH2-16-1A 7 MPa 2-port 7 MPa SGH3-16-1A EBKX-Z2003 EBKY-D8007 3 MPa SGH400 3 MPa SGH2-16-1A SGH300 7 MPa 3-port 7 MPa SGH3-16-1A 2-port 7 MPa SGH4-16-1A 3 MPa SGH3-16-1A SGH400 3-port 7 MPa SGH4-16

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

3.5 163 130 44 62 95 When U side mounting (S) 6 6 73 When D side mounting (SD) 15 35.5 X 12 X 12 n B A 8 2 4 MODEL SQ (SI No.EX124-SDN1) B A TM 4632 MOD/NET PWR 1 7 SETTINGS 2 4 Manual override B A 6 4 2 B A A B 5 SMC SMC SMC SMC SMC B A 2 4 L2 L1 A B A B 4 B A Indicator light 2 4 A B A B 3 B A 2 4 B A A 2 A 44 P = 25 P = 25 50.5 2 4 B A A 1 A 4 2 D side Stations 38 26.5 2-Rc 1/8 (External

air-filter-e

X77 A B X78 Symbol Port size Accessory Port size Rc 3/8 1/2 3/4 Accessory Symbol Nil None Bracket 03 04 06 B Symbol Element seal material Note 1) Symbol Element category Element seal material Non-asbestos Fluororesin NBR FKM Material Bronze Stainless steel Polypropylene Glass fiber Cotton Cotton Stainless steel 304/Epoxy Stainless steel 316 Element type A Note 2) B S T G H P M L Sintered

Air Preparation Equipment

X77 A B X78 Symbol Port size Accessory Port size Rc 3/8 1/2 3/4 Accessory Symbol Nil None Bracket 03 04 06 B Symbol Element seal material Note 1) Symbol Element category Element seal material Non-asbestos Fluororesin NBR FKM Material Bronze Stainless steel Polypropylene Glass fiber Cotton Cotton Stainless steel 304/Epoxy Stainless steel 316 Element type A Note 2) B S T G H P M L Sintered

XMD/XYD Series

1A S Valve seal Assy (4) Specific XLD40-2-9-1A ** XLD50-2-9-1A ** XLD63-2-9-1A ** XLD80-2-9-1A ** Standard AS568-009V AS568-016V AS568-016V Initial pumping valve seal (5).

Modular F.R.L. Units

C B IN OUT OUT IN Q V R F Plate thickness AR10-A: Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S

AC

2401 P3 JIS B 2401 P22 JIS B 2401 P5 131545 JIS B 2401 P5 131647 JIS B 2401 P5 131647 JIS B 2401 P5 JIS B 2401 G50 JIS B 2401 P6 JIS B 2401 G55 131336 JIS B 2401 P14 1.5-34 AR1000 to 6060 Dimensions AR1000 to 5060 Panel mounting hole AR1000 to 3060: Max. 3.5t AR4060/5060: Max. 5t AR6060 Model Port size A B C D M N P E F G H J K L Bracket mounting dimensions 25 40 53 53 70 75 90 95 11 15 25

3 Port Air Operated Valve Series SYJA300 1

N.O. 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Effective area (mm2) Pilot port size Type of actuation Port size SYJA312-M3 SYJA322-M3 SYJA314-M5 0.41 0.18 0.086 0.35 0.33 0.086 Body ported N.C. N.O. N.C.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

JXCx-OMT0023

Power supply AC100120V 50,60Hz AC200230V 50,60Hz a) Motor cable / Lock cable / Encoder cable A S C S M Connector Direction Motor Type A S Axis side AC Servo motor B Opposite axis side Cable Content Motor cable M Lock cable B Encoder cable E Cable Length (L) [] 2m 2 5m 5 10m A Cable Type Standard cable S Robot cable R 1 12 1.

AC Servo Motor Driver

Connector Direction Motor Type A S Axis side AC Servo motor B Opposite axis side Cable Content Motor cable M Lock cable B Encoder cable E Cable Length (L) [] 2m 2 5m 5 10m A Cable Type Standard cable S Robot cable R 1 8 1.

VS 8-2/VS 8-4

How to Order Applicable solenoid valve model Interface regulator model Regulating port VVS8040-ARB-A-1 VVS8040-ARB-B-1 VVS8040-ARB-P-1 VVS8040-ARB-AB-1 A VSS R8-4 (Size 26 mm) B P A, B Unit: mm 50 54.5 148 SMC SMC 2 3/5 14 4 1 109.5 90 90 27 VVS8040-ARB-AB-1 VVS8040-ARB-1 A B P Regulating port: A Regulating port: A, B Regulating port: B Regulating port: P 25 Series VS 8-2/VS 8-4 S R S R Conforms

Title not found

Vcior on up to 4 S des Ava able (lvlagnet Type) s NCQT very Cornpact sides and do Black Line s NCOB Outer Rcd C rcll] is B;mba Flat lrt Fla'.1r, s re!'

VQ5000

B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted