LEC-OM071xx *5 reference unit/s 10 1st Linear Deceleration Constant *1 Pn80D 2 1 to 65535 100 Setup Immediately*5 reference unit/s2 1.
B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.
PD07PD09 (DO) ON/OFF 4.5.1(1)(d) JOGDO TM 4.5 MR Configurator2 No.PC09 MR Configurator2 11.8 TM master-slave masterslave C1 5.4.3 1 5 1 1.5 (1) LECS S 1 S5 50W,100W SSCNET S ACS5, S6 S5 ACS7 S7 200W ACS8 S8 400W AC100VAC120V 50Hz60Hz 1 AC200VAC230V 50Hz60Hz 2 1 6 1 (2) aSSCNET 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R bSSCNET LE-CSS-MR-J3BUSM 1 LE C S S
speed] 1 *1) 1 mm/s (0023)h Return-to-origin acceleration and deceleration [ORIG ACC/DEC] 1 *1) 1 mm/s2 (0024)h Creep speed 1 Fixed value 1 mm/s Origin sensor [ORIG sensor] Upper-level byte 0 to 2 1 mm/s2 (0025)h ORIG switch direction [ORIG SW DIR] Lower-level byte Fixed value (0026)h Undefined parameter 21 1 Fixed value 40 - JOG motion data addresses (motion parameter items) Controller
S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!
S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!
Valve side Chamber Bellows side Vacuum pump Recommended direction of pumping 11 XL-OMM0005-A 7 Parts Replacement Procedure Replacement procedure Division 1 Model High Vacuum Angle Valve Step 1 Step 2 Step 3 Step 4 Step 5 Step 6 3 Screw for fixing valve S assembly Bottom of gas release 1 2 Valve S seal assembly 4 Solenoid valve for main pumping 1(P) SUP Solenoid valve for initial pumping 1
Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications
Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications
0.024 0.008 0.016 V114 V114A V124 Note 1) V124A Note 1) Note 1) For both V124 and V124A, pressure from port 3 and exhaust from port 1.
Flat Ribbon Cable Type 21P Applicable solenoid valve How to Order 1 3 5 6 4(A), 2(B) port Stations VV4Z1 05 21P VZ1120MOZ-M5 Applicable blanking plate assembly DXT170-25-3A Applicable connector assembly DXT170-127-A 1: 100 VAC, 3: 110 VAC, 4: DC P, R port thread type 03 3 stations 3(R) port Nil Rc G NPT 12 00F 12 stations 00N Refer to page 3-3-7 regarding how to order applicable connector
S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .
G H L LN LO M MN MO L type plug connector M type plug connector Proper Combination of Blank Plate Ass'y and Manifold Base Blank plate ass'y SYJ3000-21-1A Blank plate ass'y SYJ3000-21-2A Blank plate ass'y SYJ3000-21-4A Blank plate ass'y SYJ3000-21-3A Phillips head screw SYJ3000-33 -2 (M1.7 7, Non-gloss nickel plated) Blank plate SYJ3000-21-1 Blank plate SYJ3000-21-1 Phillips head screw SY100
Double solenoid V110N-D5MOZConnector assembly (for junction common) SJ3000-46-SC Single solenoid V110N-S5MOZConnector assembly (for junction common) SJ3000-46-DC Common wiring Connector assembly SJ3000-46-S (Example) VV100-10-04U1-C6 1 set V110N-S5MOZ-C4 2 sets V110N-D5MOZ-C4 2 sets SJ3000-46-S 1 set (Connector assembly for single solenoid) SJ3000-46-SC 1 set (Connector assembly for single
SYJ500 SYJ5000 SYJ5000 3 A B Assy CE M2.5 : 0.45N.m 19 No.SYJ300-OMU0003 Assy SYJ52(R)(-Q)) (SYJ54(R)(-Q)) SYJ500-10-3A(-Q) CE -Q M2.5-0.45N.m () 20 No.SYJ300-OMU0003 SYJ700 1 1 SYJ700-9-1(-Q) 1/8 7 2 SYJ700-9-2(-Q) 1/4 3 8 V111(T)4 Assy SYJ5000-13-3A 5 Assy 6 SUS CE -Q 3 SYJ700 SYJ7000 SYJ700 SYJ7000 SYJ7000 3 A B Assy SYJ700-3-1A(-Q) SYJ700-3-2A(-Q) SYJ700 SYJ700
SMC VVQ1000-3A-1-F-S end plate assy, VQ1000/VQ20/VQ30 VALVE*** $48.98 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-50A-C4 fitting
S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .
(Valve) DXT199-22-3A 1 pc. (Blanking plate assembly) DXT192-52-1-4A 3 pcs. (Connector assembly) DXT192-52-2-4A 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.
) PD20 (LSP)(LSN)OFF PD20 PD20 (LSP)(LSN) 0 1 2 3 (LSP) (LSN) 0() 1() 2() 3() PD20 0 S S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m
e l H ZZ f h ZZ C85 84 1/4 51 186 43 11.2 59 1/4 stroke 194 40 202 C95 50 90 3/8 58 206 52 11.2 66 1/4 stroke 214 222 63 98 3/8 58 214 52 11.2 66 1/4 stroke 222 230 CP95 80 116 1/2 71 258 65 12.5 80 1/4 stroke 267 276 100 126 1/2 72 270 65 14.0 81 1/4 stroke 279 288 NCM Axial Foot Style: CA2WLH NCA S + Stroke H H + Stroke 2-P (Rc, NPT, G) K A G G F K A F B1 4-J AL AL Width across flats KA