stepper motor 5 phase stepper motor 2 5 Number of auto/proximity switches Ball screw B Lead screw type 1 2 1 pc. 2 pcs.
Wh'rl 1pc 4) 85 + 30{n 2 4l 10+30(2 2) 75+~24 80+30(11 2 With n pes , . f-f-("::--=-=2.c..; 4 ::-.6 8 '-c---4.,, 8 e.'-,-~.-,-,-'~')c-t-_-"_ _ c..;.-= 8. 12. ' 6 .. )_+_"",":.:=:.: 4 ,,-.",8." "L __--+_-" "'.-= .. ,L)_+--, (" =-,12 '6 (" =4 ',,,2'-.. , ,,,6 ::" ) _~ Wlth2pcs (DiHe!'
Ambient temperature C 2 to 45 Circulating fluid*1 Tap water, Deionized (pure) water Set temperature range C CH1: 15 to 25, CH2: CH1 + 0 to 15 Cooling capacity (CH1, 2 total) 50/60 Hz*2 kW 4.8/5.8 Heating capacity (CH1, 2 total) 50/60 Hz*3 kW 1.3/1.6 Temperature stability*4 C CH1: 0.1, CH2: 0.5 Circulating fluid system Rated flow 50/60 Hz*5 L/min CH1: 21/26, CH2: 2/2 Max. flow rate 50/60
O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)
500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load [kg] Work load [kg] Work load [kg] 807 A LEFB Series Motorless Type Calculation of Guide Load Factor Mounting Orientation 1.
D2 = CB = C X = [mm] Size CRB2, CRBU2 Y L2 max D2 10 2 to 8 Y-1 3 [mm] Size CRB2 CRBU2 X L1 max D1 X L1 max D1 10 4 to 14 X-3 3 2 to 14 X-1 3 15 5 to 18 X-4 3 to 4 3 to 18 X-1.5 3 to 4 20 6 to 20 X-4.5 3 to 5 3 to 20 X-1.5 3 to 5 30 6 to 22 X-5 3 to 6 3 to 22 X-2 3 to 6 15 3 to 9 Y-1.5 3 to 4 20 3 to 10 Y-1.5 3 to 5 30 3 to 13 Y-2 3 to 6 40 6 to 15 Y-4.5 3 to 8 86 Simple Specials CRB2 Series
) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8
) LVH A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations LVD 02 2 stations LVQ 05 5 stations LQ LVN How to Order Valve TI/ TIL LVA 2 0 02 C A PA PAX Option Body class Nil 1 4 Symbol 2 3 4 5 None With flow rate adjustment With indicator Body class 2 3 4 5 Orifice dia. 4 8 12 20 PB Valve type 0 1 2 N.C.
) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8
(2) (2) Compressed air Fluid Range of operating conditions Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 Inlet air temperature (C) 5 to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Inlet air flow rate (l/min (ANR)) (4) Standard performance 20 62 125 250 375 625 900 1190 725 31 Outlet air flow rate (l/min (ANR))
(For details, refer to page 359.) 344 5 Port Solenoid Valve 10-SYJ7000 Construction (A)4 2(B) 2(B) (A)4 2 position single 2 position double 1 (P) (R1)5 3(R2) 3(R2) 1 (P) (R1)5 y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 t q r w 3(R2) 1 (P) (R1)5 (A) 4 (B
XL 2-P PB GB GA 2-P Q J K (Plug) PA + Stroke S G FA FB C + Stroke Refer to "Manufacture of Intermediate Strokes" on page 2 for intermediate strokes other than the standard strokes.
Cooling Capacity HRSH100-A-20/40HRSH100-W-20/4014 16 Ambient temperature 32C Facility water temperature 32C 14 12 Cooling capacity [kW] Cooling capacity [kW] 10.5 10 11.5 12 10 Ambient temperature 43C 8 8 Facility water temperature 40C 6 6 Ambient temperature 45C 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH150
(4) Weight (kg) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust
Aluminum (setting temp.: 120C [248F]) Stainless steel (setting temp.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2
(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54
B6 5 A6 B1 A1 2 1 B3 A3 (d) (5.7) 15 16 L (11) (30.7) (c) 10.6 [820m] (a) (b) LE CP *B 2 A B-1 1 A A-1 L 6 B B-2 5 ) 8 8m B A-2 3 COM-A/COM B-3 ) 4 A 10m COM-B/A-3 (c) ) B 15m Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 ) 7 A A-5 6 () B B-6 9 B A-6 8 3 (d) + B-1 4 A-1 5 + B-3 1 A-3 2 2 1 (5.5) (14) (a) (6.3) B1 A1 (17.7) 5 6 (14.2) (b) A6 B6 (c) (10.2) 2 1 B1 A1 (18)
Note 2) l/min (ANR) Operating pressure (MPa) Inlet air temperature (C) Ambient temperature (C) Pressure dew point (C) Working fluid Inlet air temperature (C) Inlet air pressure (MPa) Ambient temperature (C) Electrical Specifications Rated Conditions Operating Ranges 35 0.7 40 32 10 Compressed air 5 to 50 0.15 to 1.0 2 to 40 (Relative humidity of 85% or less) Single phase, 100/100 to 110VAC