Rotary Clamp Cylinders

5 !3 !7 !8 !6 !6 !0 !2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !

Programless controller Step motor (servo 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

Step Motor Driver （ Pulse input type ）

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

REA/REB

Contents Data Set of nos. above @8, @9, #0, #1, #2, #3, #4 REAL10-PS 15 REAL15-PS 10-2-43 43 Series REAL Construction: 20 to 40 @3 !7 #3 !6 @8 #1 !0 !2 !9 u o i @7 @9 @5 @6 @4 e y r !3 q #0 !1 w @0 !8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

HRX-OM-M090

. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection monitor menu . 5-9 5.5.2 Checking of the Inspection monitor menu . 5-9 5.6 Key-lock

HRX-OM-I051

When using accessory [by-pass piping set] flow becomes total of flow on customer side and flow on by-pass (*2). HRZ Series 5.3 Operation Screen 5-3 HRX-OM-I051 Chapter 5 System Operation 5.3.3 Status screen 2 1 2 3 4 Figure 5-5 Status Screen 2 Table 5-4 Status Screen 2 No.

HRX-OM-X010

See 5.3.16 Initial Setting screen 1 (page 5-19) for details. HRZ Series 5.3 Operation Screen 5-5 5-5 HRX-OM-X010 Chapter 5 System Operation 5.3.3 Status screen 2 POWER ON 2 1 3 4 Figure 5-5 Status screen 2 Table 5-4 Status screen 2 No.

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

HRX-OM-R016

. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection monitor menu . 5-9 5.5.2 Checking of the Inspection monitor menu . 5-9 5.6 Key-lock

HRX-OM-W038

. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection monitor menu . 5-9 5.5.2 Checking of the Inspection monitor menu . 5-9 5.6 Key-lock

REA/REB

5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

Vacuum Pad

across flat 14 Width across flat 14 Width across flat 14 5 5 5 2 2 7 2 2 2 2 12 18 18 12 18 12 Vertical M12 x 1 M12 x 1 M12 x 1 Vertical 30 30 30 Width across flat 14 Width across flat 14 Width across flat 14 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 5 5 5 7 7 Lateral Lateral With Adapter: Vacuum Inlet With Adapter: Vacuum Inlet 1.8 1.8 1 1.8 1.2 1.2 10 13 16 11 14 17 Lateral With

Vacuum Pad

across flat 14 Width across flat 14 Width across flat 14 5 5 5 2 2 7 2 2 2 2 12 18 18 12 18 12 Vertical M12 x 1 M12 x 1 M12 x 1 Vertical 30 30 30 Width across flat 14 Width across flat 14 Width across flat 14 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 5 5 5 7 7 Lateral Lateral With Adapter: Vacuum Inlet With Adapter: Vacuum Inlet 1.8 1.8 1 1.8 1.2 1.2 10 13 16 11 14 17 Lateral With

Vacuum Pad

across flat 14 Width across flat 14 Width across flat 14 5 5 5 2 2 7 2 2 2 2 12 18 18 12 18 12 Vertical M12 x 1 M12 x 1 M12 x 1 Vertical 30 30 30 Width across flat 14 Width across flat 14 Width across flat 14 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 5 5 5 7 7 Lateral Lateral With Adapter: Vacuum Inlet With Adapter: Vacuum Inlet 1.8 1.8 1 1.8 1.2 1.2 10 13 16 11 14 17 Lateral With

OMR0031

An example is shown below. +3 +3 +3 +3 direction + direction direction + direction 0 5 10 0 5 10 2 8 [mm] 2 8 [mm] This example shows the Target Position set at +3 mm. The table moves +3 mm from the current position.

0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)

Fieldbus system Ethernet POWERLINK compatible SI unit

Content of diagnosis 0 There is an error in unit 0. 1 There is an error in unit 1. 2 There is an error in unit 2. 3 There is an error in unit 3. 4 There is an error in unit 4. 5 There is an error in unit 5. 6 There is an error in unit 6. 7 There is an error in unit 7. 8 There is an error in unit 8. 9 There is an error in unit 9. 10 Reserved 11 Reserved 12 Reserved 13 Reserved 14 Reserved

HRX-OM-R005

1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2 0 1 2 0 1 2 0 1 2 HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060-A-2060Hz 9.5.1 HRS060-A-20-(BJM) 2000 2000 Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 1500 e e 40 40 32 32 1000 1000

A-HEC-OM-J004

. 5-1 5.2 Setting of Values . 5-2 5.3 Cautions for Operation Control. 5-2 5.4 Operation of Controller . 5-4 5.4.1 Details of Operation and Display Panel .5-4 5.4.2 Setting of Data .5-5 5.4.3 Selection of Operation Mode .5-6 5.4.4 Details of Operation Mode .5-7 5.4.5 Selection of Setting Mode .5-9 5.4.6 Selection of Initial Setting Mode . 5-10 5.4.7 Details of Initial Setting Mode . 5-10