MHZ

3@2@3@4 MHZAJ-A0603 Piston assembly MHZAJ2-6S wo!1!3!

MHZ

0 @2 o !2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

IDG

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (

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Wh'rl 1pc 4) 85 + 30{n 2 4l 10+30(2 2) 75+~24 80+30(11 2 With n pes , . f-f-("::--=-=2.c..; 4 ::-.6 8 '-c---4.,, 8 e.'-,-~.-,-,-'~')c-t-_-"_ _ c..;.-= 8. 12. ' 6 .. )_+_"",":.:=:.: 4 ,,-.",8." "L __--+_-" "'.-= .. ,L)_+--, (" =-,12 '6 (" =4 ',,,2'-.. , ,,,6 ::" ) _~ Wlth2pcs (DiHe!'

High Vacuum Angle Valve, XL Series

Electrical entry Fitting size Grommet Conduit Terminal DIN terminal G C T D 2 3 1/4 B 3/8 B Refer to table 1 below for applications. Refer to Table 2 below for applications.

Series AP500

) Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld 3.

Rotary Actuator/Vane Type

D2 = CB = C X = [mm] Size CRB2, CRBU2 Y L2 max D2 10 2 to 8 Y-1 3 [mm] Size CRB2 CRBU2 X L1 max D1 X L1 max D1 10 4 to 14 X-3 3 2 to 14 X-1 3 15 5 to 18 X-4 3 to 4 3 to 18 X-1.5 3 to 4 20 6 to 20 X-4.5 3 to 5 3 to 20 X-1.5 3 to 5 30 6 to 22 X-5 3 to 6 3 to 22 X-2 3 to 6 15 3 to 9 Y-1.5 3 to 4 20 3 to 10 Y-1.5 3 to 5 30 3 to 13 Y-2 3 to 6 40 6 to 15 Y-4.5 3 to 8 86 Simple Specials CRB2 Series

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Operating pressure (MPa) Flow Characteristics/Weight Flow characteristics Pilot port size Weight (kg) b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size Valve model 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 2 position single 2 position double 3 position closed center 3 position

Auto Switch Guide

PC Connector model M83 pin M84 pin M124 pin 1 2 1 4 Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

Series VQ Base Mounted Metal Seal/Rubber Seal

0 1 3 4 5 2 6 7 8 9 1 2 3 6 7 0 4 5 Sl unit output No. Sl unit output No.

Table of Contents

For replacement parts, refer to page 2-4-103. 2-4-9 10 Series VQ1000 Body Ported Plug-in Unit: Flip Type Model Response time (2)(ms) Flow characteristics Weight (g) Number of solenoids Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Series Standard: 1 W Low wattage: 0.5 W H: 1.5 W AC C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VQ1130 Metal seal 0.77 0.14 0.18 0.84 0.14 0.19 12 or less 15 or less

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

332 332 344 356 69 81 93 77 89 101 83 95 107 VVX21 VVX22 VVX23 Manifold composition 2 stns. x 1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 (mm) V DIN terminal Electrical entry A B C D E F H J N R Grommet T Conduit W Conduit terminal Model Q 49 62 66.5 S 41.5 54 59 U 58 62 64.5 X 63 66 68 Y 94.5 97.5

SFOD-OMT0009CN

B6 5 A6 B1 A1 2 1 B3 A3 (d) (5.7) 15 16 L (11) (30.7) (c) 10.6 [820m] (a) (b) LE CP *B 2 A B-1 1 A A-1 L 6 B B-2 5 ) 8 8m B A-2 3 COM-A/COM B-3 ) 4 A 10m COM-B/A-3 (c) ) B 15m Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 ) 7 A A-5 6 () B B-6 9 B A-6 8 3 (d) + B-1 4 A-1 5 + B-3 1 A-3 2 2 1 (5.5) (14) (a) (6.3) B1 A1 (17.7) 5 6 (14.2) (b) A6 B6 (c) (10.2) 2 1 B1 A1 (18)

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

Thermo-chiller/Rack Mount Type

2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Vacuum Unit

Fig.1 Fig.2 Fig. 3 Protrusion of junction box B Fig. 2 Clip in. Fig. 3-A When ordering ejector for vacuum pump system, spacer is included.

LJ1H

B A C D 3 4 Standard Motor Series LJ1H10 Motor Output Rolled Ball Screw High Rigidity Direct Acting Guide 50W 12mm/12mm lead Horizontal Mount How to Order Stroke LJ1H101 NB 1 F 2 Cable entry direction Top entry Power supply voltage 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Cable entry direction Cable length Left entry 1 2 F R L T B Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage VQ0 VQ1000 VQ2000 1 2 3 4 5 2 position single 1 3 5 6 100V AC (50/60Hz) Note 2) 2 position double (latching) 110V AC (50/60Hz) 24V DC 12V DC (1) (2) 3 position closed center (1) (2) 3 position exhaust center Electrical entry (2) 3 position pressure center LO MO L plug connector without connector Note 1) Two stations required. Note 2) L plug connector is used for AC.