Environment

5 !0 i !9 o !5 !8 !7 !1 y qw t r e u !2 !3 !4 !6 @3 @2 !0 #4#5 #6 #7 @6 #1 #3 #9 #8 When rod end male thread selected Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

VQ5000

How to order manifolds U side VV5Q 5 5 08 03 C 5 W n Base mounted Plug-in Kit designation 1 2 4 3 1. Stations 5.

Slider Type/Ball Bushing Bearing

6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

High Vacuum Angle Valve, XL Series

-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200

CL

4 3/8 3/8 1/2 1/2 11 10 13 15 15 153 168 182 208 226 16 19 23 28 36 6 7 7 11 11 42 46 48.5 55 56.5 45 50 60 70 80 30 35 40 48 58 20 21 23 23 25 71 80 99 117 131 10 12 16 20 25 8 0 0 0 0 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke CLAC40SCLA40, #5 (#1+#5+#11) CLAC50SCLA50, #5 (#1+#5+#11) CLAC63SCLA63, #5 (#1+#5+#11) CLAC80SCLA80, #5 (#1+#5+#11) CLAC100SCLA100, #5 (#1+#5+#11) 3.1

AC Servo Motor Driver (SSCNET /H Type)

Select 'MR-J4-B' through Model" "New" and "Project". -5- 1.

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 2 DI1 CN1-23 DI2 DI1 DI0 Program method DI-1 0 0 0 Program No. 1 0 0 1 Program No. 2 0 1 0 Program No. 3 0 1 1 Program No. 4 1 0 0 Program No. 5 Point table No.

Secondary Batteries

connector 4 Cable length (mm) 300 500 1000 2000 5000 Symbol W1 W2 W3 W4 W7 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 5 5 (EA) 1 (P) 3 (EB) Rated voltage 4 position dual 3 port valve: N.C.

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

HRS100/150

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 97 Thermo-chiller Standard Type HRS100/150 Series

25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

NCA1

G Across flat A A 1/16 Radial float H 1 Spherical motion E D B C E Dimensions H 1 1/2 2 1/4 2 1/4 Part No. NCA1-AC325 NCA1-AC800 NCA1-AC1000 A 3/4-16 1-14 1 1/4-12 B 1 3/4 2 1/2 2 1/2 C 2 5/16 2 15/16 2 15/16 D 5/16 1/2 1/2 E 1 1/8 1 5/8 1 5/8 F 31/32 1 3/8 1 3/8 G 7/8 1 1/4 1 1/4 Pivot Pins CP DD CL CD CL CD Dimensions Dimensions CL 2 5/8 3 1/8 4 1/8 CP 2.72 3.22 4.25 Part No.

Dedicated Controller

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

LEKF-OMZ0035

Part name Qty (1) Electric Actuator / LEF Series 1 (2) Driver / LECS Series 1 (in case with driver) (3) Motor cable 1 (in case with cable) (4) Encoder cable (5) Lock cable (6) I/O Connector 1 (in case with I/O connector) (2) Driver *2 1 (3) Motor cable (4) Encoder cable (5) Lock cable 24VDC Host controller, (1) Electric Actuator etc (6) I/O connector 2 *1 This picture is LECSA *2 The shape

CRJ

1 y !2 With external stopper/CRJU !3 !8 !4 !5 !8 !7 !

Modular F.R.L. Units

3.5 29 AC25B-B 1/4, 3/8 1/8 110.2 115.1 28 30 55.1 35 27.5 0 41 35 7 14 4 41 AC30B-B 1/4, 3/8 1/8 110.2 115.1 30.7 30 55.1 35 29.4 3.5 41 35 7 14 4 41 AC40B-B 1/4, 3/8, 1/2 1/8 145.2 147.1 35.8 38.4 72.6 40 33.8 3.5 50 40 9 18 5 48 AC40B-06-B 3/4 1/8 155.2 149.1 35.8 38.4 77.6 40 33.8 3 50 40 9 18 5 48 AC50B-B 3/4, 1 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 AC55B-B 1 1/8

CLQ

weight kg Load weight kg 80 80 B W 63 63 10 10 50 50 B: Retraction locking F: Extension locking 5 5 40 40 32 32 25 25 1 0.5MPa 0.4MPa 0.5MPa 0.4MPa 1 20 20 0.5 0.5 100 500 100 500 Maximum speed mm/s Maximum speed mm/s 29 Series CLQ Specific Product Precautions 2 Be sure to read before handling.