Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 port 12, 14 port 1/8-2 port 2, 4 port 1/8 1 port 1/8-2 port 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator

Soft Start-up Valve

98 DC 96 Dimensions (mm) Standard specifications Model Port size A C D E1 E2 G H J 1(P) 2(A) 3(R) AV2000-02-1 to 4G(Z)-A 1/4 1/4 1/4 66 47 24.5 20 20 33 Width across flats 22 30 AV2000-02-5 to 6G(Z)-A 1/4 1/4 1/4 AV3000-03-1 to 4G(Z)-A 3/8 3/8 3/8 76 50 29.5 20 20 38 Width across flats 24 35 AV3000-03-5 to 6G(Z)-A 3/8 3/8 3/8 AV4000-04-1 to 4G(Z)-A 1/2 1/2 1/2 98 56 39.5 26 26 49 Width across

42

2) x G1/2 Conduit port SYJ M5 x 0.8 Ground screw 10.7 SZ U side 1/4" 4(A), 2(B) port 129.5 106 47 94.7 9 9 71.7 VF VP4 27 36.1 X 12 X 12 n VQ 1/2 B A 8 VQ 4/5 VQ 4/5 2 4 B A 7 VQC 1/2 2 B 2 B 2 B 2 B 2 B 2 B 4 6 A A A A A A B B B B B B VQC 4/5 1/4" Note) 5 SMC SMC SMC SMC SMC VQZ L2 L1 4 SQ 3 VFS VFR 2 P = 25 44 VQ7 1 2 50.5 Stations 38 D side 27 11.7 80.8 47.7 43.2 1/8" External pilot port

Valve Single Unit

84.9 (5.5) 48.6 (Light/Surge voltage suppressor) 123.6 33.3 31.5 28 1.5 H: 600 G: 300 (Lead wire length) 121.9 1.2 (EA, EB port) 2-Rc 1/8 52.4 (5.5) 48.6 12.5 Polarity indication 18 18 0.9 18 3 4 5 SX7 20-02 G H 2 A COMB + P EA EB 20 (A, B port) 2-Rc 1/4 (P port) Rc 1/4 42.4 For manifold gasket positioning 2-2.2 die-cast holes 41 31.5 28 121.9 3 4 5 L plug connector (L): SX7 20-L3 4 5 M plug

Fieldbus system EtherCAT compatible SI Unit

channel) 0 (4 channels) Analogue output Unit EX600-AYA (2 channels) 0 4 (2 bytes per channel) Analogue I/O Unit EX600-AMB 4 4 (2/2 channels) (2 bytes per channel) (2 bytes per channel) EX600-AT# 1 8 Temperature (2 bytes per channel) 0 measurement Unit (4 channels) Frequency count Unit EX600-DFB 1 8 (2 bytes per channel) 0 (4 channels) IO-Link master Class A EX600-LAB1 1 (4 ports) 22, 38,

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

SYJ300/500/700

(For details, refer to page 4-4-11.) 4-4-6 7 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Construction (A) 2 (A) 2 N.C.

0.4

1 4 3 2 1 4 4 3 2 1 IP65 compliant VV5Q11 VV5Q21 Direct electrical entry.

KQ2

(mm) Connection thread Rc 3.2 Note) Effective area (mm2) T (M) Mounting Mass (g) L1 L2 M hole Nylon Urethane Mounting plate thickness 7 mm or less 1 4 M12 x 1 13 31.5 15 15.5 3.4 2.9 17 14 13 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 Connection thread 4 M12 x 1 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 KQ2E04-02 17 15 35 Applicable tubing KQ2E06-01 28 11 30 30 17 6 KQ2E06-02 15

0.01

) 12 (One-touch fittings) Rc, NPT, G 1/4 SFD100 SFD101 Note 2) SFD102 Note 2) SFD200 Note 1) The maximum flow rate when the inlet pressure is 0.7 MPa.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

1.90 C8 1.80 0.16 0.23 0.45 0.44 SS5Y5-42 2 to 20 (1) 1/4 1.90 C8 1.90 0.12 0.20 0.43 0.46 Valve stations Location SS5Y7-42 1/4 3.00 C10 3.00 0.12 0.25 0.66 0.75 Base 4/2 (A/B) Porting spec.

3 Port Air Operated Valve Series SYJA300 1

) 12 With filter (80 mesh) 23 15 , 8 1 4 1 48 (P, A, R port) 5-4-8 1 3 Port Air Operated Valve Series VZA200/400 Specifications SA Fluid Air 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VZA2 2, 2 4 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VA Operating pressure range (MPa) 0.1 to 1.0 0.15 to 1.0 VZA2 2, 2 4 0.1 to 1.0 0.15 to 1.0 SA Pilot pressure range (MPa) Impact/Vibration resistance (m/s2) Note) 150/50 VA Operating

0.

(A) 2 1 Metal seal Rubber seal 1 (P) 3 (R) Port size [2(A) port] N.O. (A) 2 Symbol Port size VQZ200 VQZ300 p p p p p p 2 Nil Without sub-plate Rc 1/8 Rc 1/4 Rc 3/8 01 02 03 1 (P) 3 (R) N.C. (A) 2 3 Note) For optional thread type, refer to page 32. 1 (P) 3 (R) Manual override N.O.

Modular Design with Uniform Body Style

Series AWmK Series p. 76 p. 76 p. 94 p. 94 Port size Port size Port size Port size 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 Size 20 V V V V V V V V Size 30 V V V V V V V V Size 40 V V V V V V V V V V V V Size 40-06 V V V V Size 50 V V V V Size 60 V V V V V V Lubricator New Spacer p. 48 AL Series p. 87 Port size 1/8 1/4 3/8 1/2 3/4 1 Size 20

Modular Type Regulators Series AR

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Option Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30 AR 25

OMU0023

Check End Details of code error sum code ) 1 byte 2 bytes 2 bytes 2 bytes 2 bytes 2 bytes The MSB of the Problems 01-FF code Note 4) LRC CR, LF function code is changed to 1.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

center (A) 4 (B) 2 (A) 4 (B) 2 In common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

VT317

VV317-02-051-02-A Valve stations A port size (Base piping) 1/4 Ordering example: VV317-02-051-02-A 1 pc. (5-station manifold base) VO317-1G 4 pcs. PVT317-53-1A 1 pc.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

2 Component Parts Description No. Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle 1 2 3 4 !1 q i !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch