F

32UNF KJW03-32 7 8.9 17.5 25.5 27 14.5 2.3 6.4 5/32 10-32UNF KJH03-32 8 18.5 15.5 2.3 2.4 5/32 1/16 KJW03-33S 9.5 8.9 17.5 25.5 26 14.5 2.5 8.7 5/32 1/16 KJH03-33S 9.5 22 18 3 5.2 5/32 1/8 KJW03-34S 11.11 8.9 17.5 25.5 26 14.5 2.5 10.6 5/32 1/8 KJH03-34S 11.11 17.5 13.5 3 5.1 1/4 10-32UNF KJW07-32 7 11.9 17.5 27 30 15.5 2.3 7.3 1/4 10-32UNF KJH07-32 20.5 17.5 2.3 5.1 1/4 1/16 KJW07-33S 9.5

IIIIIII

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

Mechanical Valves Series NVM, NVFM, NVZNI

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

Process Pump

Class Symbol PAF341S 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 PAF541S PAF341S PAF541S tubing size (mm) tubing size (inch ) SMC SMC SMC 4 4 5 5 6 6 1 2 1 2 1 2 4 4 5 5 6 6 A B A B A B 1/2" x 3/8" 3/8" x 1/4" Panel mount union U P 3/4" x 5/8" Union 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC Note) Select the fitting after confirming the IN / OUT side fitting size and fitting type.

Modular Type Filter Regulator Series AW

Note 1) Bracket assembly Set nut AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 5) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 5) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 5) Round Square embedded type Round Square embedded type 1.0MPa Note

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VV317 05 1 A 02 02 CE-compliant Base type: 1/4 Nil Q CE-compliant VV317-02-051-02-A VT317 manifold Option Please indicate manifold base type, applicable manifold valve and blanking plate when ordering. Nil A Without mounting bracket With mounting bracket Common exhaust type only Thread type Ordering example: VV317-02-051-02-A 1 pc. (5-station manifold base) VO317-1G 4 pcs.

0.01

Metal Case 1 10 SFD 1 02 Metal case suitable for an atmosphere exposed to organic solvents and chemicals HAA HAW AT Clean air filter Port size Connection size Rc 1/4 NPT 1/4 G 1/4 Symbol IDF IDU Size Max. flow rate 100 L/min (ANR) 02 N02 F02 Symbol 1 Specifications IDF FS The SFD2 is not applicable. The metal case is not available with a clean One-touch fitting.

,

85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8

,

85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(Inch) N1 N3 N7 N9 N11 M5 02 Symbol M5 thread 1/8" 5/32" 1/4" 5/16" 3/8" thread 1 4 Pressure Specifications VQZ100 2(A) port (2) VQZ100 VQZ200/300 Series VQZ200 Metal seal VQZ300 0.1 to 0.7 MPa (1) External pilot pressure range Note) Metric size of One-touch fittings (C) are also available.

NCQ8

1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 #6-32UNC1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-7/8 4 4-1/2 5 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

center/pressure center 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 4 (A) 5 (EA) 1 (P) 3 (EB) 2 (B) 5 (EA) 1 (P) 3 (EB) Parts list 2 position single with back pressure check valve Material Note Description No.

VCC

(colors) Note 2) t Gate valve and cleaning valve mountable number Note 1) e 3 port valve mountable number Note 1) Nil G02 G04 G06 Without gate valve Note 3) 00 02 04 Without 3 port valve 2 pcs. (colors) 4 pcs. (colors) Cleaning valve: 1 pc. + Gate valve: 1 pc. Cleaning valve: 3 pcs. + Gate valve: 1 pc. Cleaning valve: 5 pcs. + Gate valve: 1 pc. 40 40 pcs.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

How to Order Valve T VQZ212 5M N7 Example/Valve VQZ212R 5M C6 External pilot specification Thread (Cylinder ports, and P/R ports) Rc(PT) N NPT External pilot port T NPTF M3 X 0.5 (VQZ200) M5 X 0.8 (VQZ300) F G(PF) Note) R port of VQZ200 is only PF 1/16 Cylinder ports Symbol M5 02 N1 N3 N7 N9 N11 3/8" 1/8" 5/32" 1/4" 5/16" M5 Tube O.D.

Precision Regulator

Description Material Qty. 11 Diaphragm assembly NBR, other P362010-1 1 1 1 1 1 P362020-13 P362020-2 P362020-13 P362020-2 12 Diaphragm assembly NBR, other P362010-2 1 1 1 1 1 P362020-5 P362020-5 P362030-34 P362030-34 13 Diaphragm NBR, other 1 1 P36202019 P36202019 14 Valve Stainless steel, NBR P36201058 1 15 Valve Stainless steel, H-NBR 1 1 P36202068#1 P36202068#1 16 Valve Brass

V

4 09 5/16 11 3/8 Tube T01 1/8NPT T02 1/4NPT 06 6mm Tube 08 8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Table of Contents

8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 5.5 6 6 7 7 AME150 1 8 1 4 3 8 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 , , 1 4 3 8 , AME250 1 2 3 8 1 2 , AME350 3 4 14-20-40 5 Super Mist Separator Series AME AME450 to AME850 Dimensions Courtesy

Free Mount Cylinder

5 5 1 pc. 10 5 10 2 pcs.