Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: C6 (ø6 One-touch Fitting), Thread: Rc (PT), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: CU (Exhaust Cleaner for U Side Mounting), Option 2: W (IP65 Protection Compatible)

Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: C6 (ø6 One-touch Fitting), Thread: Rc (PT), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: None, Option 2: W (IP65 Protection Compatible)

Stations: 6 Stations, Port Size: ø6 One-touch Fitting, Kit Name: Terminal Box, Common: +COM, Option 1: None, Option 2: DIN Rail Mounting, Option 3: Name Plate, Option 4: -, Option 5: -, CE Compliant: -

Stations: 6 Stations, Port Size: ø6 One-touch Fitting, Kit Name: Terminal Box, Common: +COM, Option 1: None, Option 2: DIN Rail Mounting, Option 3: Name Plate, Option 4: External Pilot, Option 5: Built-in Silencer, Direct Exhaust, CE Compliant: -

Stations: 6 Stations, Port Size: ø6 One-touch Fitting, Kit Name: Terminal Box, Common: +COM, Option 1: None, Option 2: None, Option 3: Name Plate, Option 4: External Pilot, Option 5: Built-in Silencer, Direct Exhaust, CE Compliant: -

Stations: 6 Stations, Port Size: ø6 One-touch Fitting, Kit Name: Terminal Box, Common: +COM, Option 1: None, Option 2: None, Option 3: None, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust, CE Compliant: -

Stations: 6 Stations, Port Size: ø6 One-touch Fitting, Kit Name: Terminal Box, Common: +COM, Option 1: None, Option 2: DIN Rail Mounting, Option 3: -, Option 4: -, Option 5: -, CE Compliant: -

Stations: 6 Stations, Port Size: ø6 One-touch Fitting, Kit Name: Terminal Box, Common: +COM, Option 1: None, Option 2: None, Option 3: Name Plate, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust, CE Compliant: -

Stations: 6 Stations, Port Size: ø6 One-touch Fitting, Kit Name: Terminal Box, Common: +COM, Option 1: None, Option 2: DIN Rail Mounting, Option 3: Name Plate, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust, CE Compliant: -

Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: ø6 One-touch Fitting, Thread: Rc (PT), Kit Name: Terminal Box, Box Mounting Position: U Side Mounting, Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: Exhaust Cleaner for U Side Mounting, Option 2: IP65 Protection Compatible

Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: ø6 One-touch Fitting, Thread: Rc (PT), Kit Name: Terminal Box, Box Mounting Position: U Side Mounting, Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: None, Option 2: IP65 Protection Compatible

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Plug-in manifold for VQ2000 series valve, Terminal box connection, Maximum 20 stations available as standard, Optional

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

High Vacuum L Type Valve

oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 for 0.5MPa 31 61 220 390 680 1420 Air consumption cm3 Note 3) Port size M5 Rc 1/8 Weight kg 0.29 0.49 1.2 1.9 3.3 5.7 Note 1) Conductance is molecular flow measured

XLA Series

60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

XLA- ∗ -F7NJ ∗ - ∗ Series

) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2 for 0.5MPa 19 46 200 360 660 1350 3000 5150 Port size M5 Rc 1/8 Rc 1/4 Weight kg 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 7 XL*-OML0013

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XLDV Series

) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa 0.4~0.7 Main pumping 46 200 360 660 1350 3000 5150 Air consumption cm3 for 0.5MPa Note 3 Initial pumping 3.5 12 15.5 30 42 54 54 Port size M5:1(SUP),3(EXE) port Weight kg

AC Servo Motor Driver (Pulse input type/Positioning type ）

Malfunction RA1 OFF ON MC MC SK Emergency stop switch Driver Servo amplifier Servo motor (Note 6) MCCB CNP1 MC (Note 10) 1-phase 200 V AC to 240 V AC L1 CNP3 (Note 5) U U L2 Motor V V L3 M W NW P3 (Note 1) (Note 9) P4 CNP2 P+ C (Note 2) D (Note 10) Encoder (Note 3) CN2 L11 Encoder cable L21 (Note 7) Main circuit power supply CN1 Forced stop 2 EM2 CN1 24 V DC (Note 11) (Note 4) Servo-on SON