Vacuum Pad to 16 Pad diameter Vertical Dimensions/With Adapter: Vacuum Inlet Bellows Pad type Pad Unit ZP3-T10B;-A5 [Weight: 3.2 g] ZP3-T13B;-A5 [Weight: 3.4 g] ZP3-T16B;-A5 [Weight: 3.5 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 Vertical 3 10 2.5 3 3 10 2.5 With Adapter: Vacuum Inlet 10 2.5 15.5 15.5 15.5 Vertical Vertical With Buffer: Vacuum Inlet
-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.
South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B 10 10 A B 14.4 10 With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 A PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 3.4 01: R 1/8 N01: NP T1/8 3 8 With
2.5 3 SB 8 8 9.5 11 11 VB 4 4 5 6 6 O 4.5 4.5 5 5.5 6 SA 4.2 4.2 5.1 6.6 6.6 UB 10 10 12 16 16 R 44 52 63 78 98 TB 8 8 10 10 12 WA YB 8 8 10 12 12 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074
5 12 1.0 26 14 43 M5 x 0.8 depth 10 M5 x 0.8 14 24 25 40 63 45 31 30 100.005 0.020 25 0 0.052 6.5 20 1.0 31 20 56 M5 x 0.8 depth 10 M5 x 0.8 17 30 31 59 A CDRB2 Series Dimensions: Standard Type (With Auto Switch) 10 Double vane Following figures show the intermediate rotation position when A or B port is pressurized.
How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M
41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.
41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.
41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.
Optional/Semi-standard specifications N.C.: Gray N.O.: Black B B B B B Dimensions Barb fitting Applicable tubing: T0604 Width across flats 14 1/8 Width across flats 17 1/4 M5 x 0.8 Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Model Standard specifications Bracket mount P1 P2 A B C E F G J M 30 41 41 50 50 Q1 24 35 35 40 40 Q2 33 R 5.5 7 7 9 9 S 12 14 14
JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 3 4.5 5 6 8.5 10 16 21 17 20 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 0.5
Form w 1 Material e Vacuum inlet r Mounting Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs Deep Type Connection M5 x 0.8 thread B 10 B5 41 25 2.5 M5 x 0.8 5 16 42 26 25 48 30 3.5 10 N S U F GN GS N4 N6 U4 U6 41 25 2.5 M6 x 1 6 16 42 26 25 48 30 3.5 40 57 39 6 25 B8 48 30 3.5 M8 x 1.25 8 40 57 39 6 ZP Y D C2 B6 Construction p. 117 Adapter Assembly p. 123 Dimensions Per Vacuum
(mm) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.
(mm) Connection threads Universal type Elbow type Meter-in Meter-out Meter-in Meter-out M5 x 0.8 R 1/8 M5 x 0.8 R 1/8 R 1/4 M5 x 0.8 R 1/8 AS1201FG-M5-23 AS2201FG-01-23 AS1201FG-M5-04 AS2201FG-01-04 -02-04 AS1201FG-M5-06 AS2201FG-01-06 -02-06 AS3201FG-02-06 -03-06 AS2201FG-01-08 -02-08 AS3201FG-02-08 -03-08 AS2201FG-01-10 -02-10 AS3201FG-02-10 -03-10 AS4201FG-04-10 AS3201FG-02-12 -03-12 AS4201FG
(mm) Connection threads Universal type Elbow type Meter-out Meter-in Meter-out Meter-in M5 x 0.8 R 1/8 M5 x 0.8 R 1/8 R 1/4 M5 x 0.8 R 1/8 AS1201FG-M5-23 AS2201FG-01-23 AS1201FG-M5-04 AS2201FG-01-04 -02-04 AS1201FG-M5-06 AS2201FG-01-06 -02-06 AS3201FG-02-06 -03-06 AS2201FG-01-08 -02-08 AS3201FG-02-08 -03-08 AS2201FG-01-10 -02-10 AS3201FG-02-10 -03-10 AS4201FG-04-10 AS3201FG-02-12 -03-12 AS4201FG
SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.
MY1B10G Stroke 10 10 7.3 7.8 2 x M5 x 0.8 (Hexagon socket head plug) 2 x 2 x 3.4 through-hole Bottom side M4 x 0.7 depth 7 4 x M3 x 0.5 depth 5 30 50 5.9 5.9 25 26 22 28 17 100 + Stroke 5 Floating bracket mounting thread (2 x M3 x 0.5 thread depth 5) 2 x 5 counterbore depth 2 25 24 3.5 1 2 x M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110
Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5
NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.