Vacuum Pad

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2011 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing PQ printing PQ 12450SZ Printed in Japan. D-DN

Vacuum Pad

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2011 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing PQ printing PQ 12450SZ Printed in Japan. D-DN

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QY printing QY 8150SZ Printed in Japan. D-G

Vacuum Pad

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2011 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing PQ printing PQ 12450SZ Printed in Japan. D-DN

Vacuum Pad

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2011 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing PQ printing PQ 12450SZ Printed in Japan. D-DN

Electric Actuators

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Integrated Controller

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2024 SMC Corporation All Rights Reserved Specifcations are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

5 Port Solenoid Valve

1 A, B port size q Series y Pilot valve option Thread piping 3 5 Standard (101 psi (0.7 MPa)) Quick response type (101 psi (0.7 MPa)) High pressure type (145psi (1.0 MPa)) Nil B K Applicable series SY3000 SY5000 Symbol M5 01 Port size M5 x 0.8 1/8 SY3000 SY5000 w Type of actuation Only metal seal type is available for the high pressure type.

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 10 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 10 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8)

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Base Mounted Plug-in w/Terminal Blocks, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/8, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

Fieldbus System

1 A, B port size q Series y Pilot valve option Thread piping 3 5 Standard (101 psi (0.7 MPa)) Quick response type (101 psi (0.7 MPa)) High pressure type (145psi (1.0 MPa)) Nil B K Applicable series SY3000 SY5000 Symbol M5 01 Port size M5 x 0.8 1/8 SY3000 SY5000 w Type of actuation Only metal seal type is available for the high pressure type.

MQQ

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing December, 2000 D-SMC.L.A. P-80 (N)

Cylinder with Lock

Auto switch model Bore size [mm] 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 D-A3/A44 D-G39/K39 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-A5/A6/A59W BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 D-P3DWA BA10-032S BA10-040S BA10-050S BA10-050S BA10-063S BA10-063S D-P4DW BMB3T-040 BMB3T

VCA

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing May, 2000 D-SMC.L.A. P-80 (D)

Table of Contents

For details, refer to page 8-11-101.

Modular F.R.L. Unit

-20 IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04