MXS Series Air Slide Table

K KA 21 Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 6 12 3.5 (With stroke adjuster at retraction end) Stroke adjuster at extension end N-M5 X 0.8 thread 6 deep (Helisert) 6 4-M5 X 0.8 thread 7 deep 1 18 (With stroke adjuster at extension end) 26 35 62 48 F 20 5H9 4 deep +0.030 0 N -1 x F 2 2-M6 X 1 thread 10 deep 21 5H9 4 deep +0.030 0 10 M 0.5 36.5 40

Manifold Specifications

entry) n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 L1 L2 3-7-33 Series VZS3000 Manifold Non plug-in type VV5ZS3-51Station 1Port size Grommet (G) 2-4.5 mounting hole 2n-Rc 1/8, 1/4 Manual override U side (n) (2) (1) Stations D side 300 (Lead wire

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

21 21 21 44.5 44.5 44.5 44.5 Refer to the page 68 for dimensions with connector cable. 20 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations A port Porting specifications Valve

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

CQS

For details, refer to pages 7-9-23 and 7-9-21. 7-4-45

Modular F.R.L. Unit

116 128 129 169 176 K 34 34 40 54 54 66 66 C 26.5 28 31 36 36 43 46 U 14 16 19 21 21 D 57 55 59 68 68 87 87 V 6 6 7 7 7 E 65 64 66 74 74 84 84 L 44 44 46 54 56 65.8 65.8 F 29.5 28.5 30.5 35 35 44.5 44.5 M 5.4 5.4 6.5 8.5 8.5 11 11 G 2 Note) N 15.4 15.4 8 10.5 10.5 13 13 P 55 55 53 70 70 90 90 Q 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 25 26 31 35.5 37 T 28.5 32.5 38.5 42.5 42.5 AR20K AR25K

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 (5) Pressure Sensor/Pressure Switch for Vacuum Symbol Type Pressure range [kPa] Specifications P Pressure sensor Note 10) 0 to -101 Analog output 1 to 5V T -100 to 100 Analog output 1 to 5V A Unit selection function Note 12) NPN 2 outputs B SI unit only Note 13) 0 to -101 C PNP Unit selection function Note 12) 2 outputs D SI unit only Note 13) Pressure switch for vacuum E Unit

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

up to 750 21 25 78 14 13 32 65.8 M22 X 1.5 204 102 52 116 18.5 80.5 M12 X 1.75 21 17 37 40 11 23 0 37 40 22 72 21 up to 750 30 21 92 14 16 41 72.8 M26 X 1.5 215 116 52 87.5 M12 X 1.75 126 20 21 17 40 40 11 23 0 37 40 26 With rod boot Non-locking CBAI40SCBA11, #1 CBAI50SCBA12, #1 CBAI63SCBA13, #1 CBAI80SCBA14, #1 CBAI100SCBA15, #1 Locking CBAIB40SCBA11, #2 CBAIB50SCBA12, #2 CBAIB63SCBA13,

Modular F.R.L. Unit

116 128 129 169 176 K 34 34 40 54 54 66 66 C 26.5 28 31 36 36 43 46 U 14 16 19 21 21 D 57 55 59 68 68 87 87 V 6 6 7 7 7 E 65 64 66 74 74 84 84 L 44 44 46 54 56 65.8 65.8 F 29.5 28.5 30.5 35 35 44.5 44.5 M 5.4 5.4 6.5 8.5 8.5 11 11 G 2 Note) N 15.4 15.4 8 10.5 10.5 13 13 P 55 55 53 70 70 90 90 Q 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 25 26 31 35.5 37 T 28.5 32.5 38.5 42.5 42.5 1/8, 1/4 1/4

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

21 71 32 65.8 80.5 M12 X 1.75 M22 X 1.5 116 204 40 37 11 17 23 37 21 0 40 22 up to 750 92 30 52 14 21 21 72 116 16 20 41 72.8 87.5 M12 X 1.75 M26 X 1.5 126 215 40 37 17 40 21 40 11 23 0 26 With rod boot Bore (mm) e Stroke range (mm) f h ZZ l 40 50 63 80 100 1/4 stroke 20 to 500 43 11.2 59 154 1/4 stroke 167 20 to 600 52 11.2 66 1/4 stroke 20 to 600 52 11.2 66 178 1/4 stroke 20 to 750 65

KQ2

8 39.0 26.6 28.5 19 H 1 2 KQ2S10-U04 29 21 36 20 22 21 1 4 3 8 8 KQ2S12-U02 KQ2S12-U03 30.5 31 46.0 25 19 12 22 44.5 KK 60.0 9 1 2 KQ2S12-U04 28.5 20.5 30 21 Reference dimensions after Uni thread installation.

CEx-OMB0060

Signal Meaning 1 D0 Digit of 10-2 Bit0 19 D12 Digit of 101 Bit0 2 D1 Digit of 10-2 Bit1 20 D13 Digit of 101 Bit1 3 D2 Digit of 10-2 Bit2 21 D14 Digit of 101 Bit2 4 D3 Digit of 10-2 Bit3 22 D15 Digit of 101 Bit3 5 D4 Digit of 10Bit0 23 D16 Digit of 102 Bit0 6 D5 Digit of 10Bit1 24 D17 Digit of 102 Bit1 7 D6 Digit of 10Bit2 25 D18 Digit of 102 Bit2 8 D7 Digit of 10Bit3 26 D19 Digit of 102 Bit3

MQQ

See pages 19 through 21 for safety instructions and actuator precautions.

Air Fittings & Tubing

10 18.5 18.5 21 24.5 45.5 KQ2ZF10-03S 74 77 101 25.2 31.5 24.5 45.5 50 KQ2ZF12-03S 25.2 32.5 12 20.9 20.9 22 MS 25 27 33 KQ2ZF12-04S Reference dimensions after R(PT) thread installation.

HEC-OM-S008

Host ENQ 32H Check sum CR (H) (L) Thermo-con STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Note) 2DH is entered in 101 digit is attached to temperature data.

SYJ3000/5000/7000

-11 15 15 15 R2 R2 Individual EXH spacer SJ7000-17-1 Individual EXH spacer SJ7000-17-2 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 R R1 R R1 Manifold gasket DXT199-21-10 Manifold gasket DXT199-21-11 L Blanking Plate Assembly SYJ7000-21-1A Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold

A_HEC-OM-J017

Host ENQ 32H Check sum CR () () Thermo-con STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 () () Host ACK CR (Possible to omit) Note2DH is entered in 101 digit is attached to temperature data.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

manifold base Type 10-SS5YJ7-20 Type 10-SS5YJ7-21 Type 10-SS5YJ7-40 Type 10-SS5YJ7-41 Type 10-SS5YJ7-42 Type 10-SS5YJ7-41SA Applicable manifold base Type 10-SS5YJ7-40-Q Type 10-SS5YJ7-41-Q Type 10-SS5YJ7-42-Q Type 10-SS5YJ7-41SA-Q Gasket SYJ7000-21-1A-2-Q SYJ7000-21-3A Round head combination screw Blanking plate SYJ7000-21-3A-Q Gasket (Positioning pin) Dust cap Applicable manifold

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

25 350 to 500 175 80 37 46 57 100 88 13 14 31 12 M6 x 1 depth 13 21 125 st or more 32 32 32 350 to 600 201 82 37 52 65 114 90 16 14 38 12 M6 x 1 depth 13 21 150 st or more 40 40 40 350 to 800 238 92 44 62 84 138 101 20 15 47 12 M8 x 1.25 depth 16 25 200 st or more 50 50 50 350 to 1000 285 104 55 75 94 164 116 25 16 58 14 M10 x 1.5 depth 21 26 250 st or more 8-21-22 22 Guide Cylinder Series

AC Servo Motor Driver (Pulse input type/Positioning type ）

CHARACTERISTICS 101 to 10-7 10.