Hydraulic

20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

SY

20 20 stations D R Includes the number of blanking plate assemblies.

Table of Contents

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

LJ1H

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

CQS

, refer to page 7-6-20.

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 69 16 20 20 25 30 36 36 40 30 35 35 40 40 50 50 56 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 69 16 20 20 25 30 36 36 40 30 35 35 40 40 50 50 56 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160

LEC-OM071xx

Pn081 Pn100 2 Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 Speed Loop Integral Time Constant Pn101 15 to 51200 0.01 ms 2000 Immediately Tuning Pn102 2 Position Loop Gain 10 to 20 0.1/s 400 Immediately Tuning Pn103 2 Moment of Inertia Ratio 0 to 20 1% 100 Immediately Tuning 5.8.1 Pn104 2 2nd Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 2nd Speed Loop Integral Time

SQ1000/2000

AXT661-12AL AXT661-12AL AXT661-14AL AXT661-14ANL AXT661-13ANL AXT661-13AL 300mm 300mm AXT661-14AL-6 AXT661-14ANL-6 AXT661-13ANL-6 AXT661-13AL-6 600mm 600mm AXT661-14AL-10 AXT661-14ANL-10 AXT661-13ANL-10 AXT661-13AL-10 1000mm 1000mm AXT661-14AL-20 AXT661-14ANL-20 AXT661-13ANL-20 AXT661-13AL-20 2000mm 2000mm AXT661-14AL-30 AXT661-14ANL-30 AXT661-13ANL-30 AXT661-13AL-30 3000mm 3000mm Note) When

Base Mounted Metal Seal/Rubber Seal Series VQ

With lead wire ZS-20-A ZS-20-5A-50 0.6 m 3 m 5 m Nil 30 50 (The flow characteristics are for the supply pressure of 0.5 MPa.)

Precautions 1

I-020B I-032B I-040B Bore size 20 25, 32 40 +0.058 0 0.1 0.2 0.1 0.2 +0.058 0 9 9 36 10 20 16 14 46 9 9 18 41 M8 x 1.25 14 10 11 66 M8 x 1.25 +0.058 0 0.1 0.2 0.1 0.2 +0.058 0 9 38 9 20 18 10 14 48 9 9 22 45 14 10 14 69 M10 x 1.25 M10 x 1.25 +0.070 0 0.1 0.3 0.1 0.3 +0.070 0 12 55 16 24 22 20 69 16 12 24 50 20 14 13 92 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting (mm) Double Knuckle

0.4

or less VQ1200 13 or less 10 or less 0.70 0.15 0.16 0.72 0.25 0.18 Metal seal 13 or less Double VQ1201 20 or less 15 or less 0.85 0.20 0.21 1.0 0.30 0.25 Rubber seal 20 or less VQ1300 40 or less 20 or less 0.68 0.15 0.16 0.72 0.25 0.18 Metal seal 26 or less Closed center VQ1301 47 or less 25 or less 0.70 0.20 0.16 0.65 0.42 0.18 Rubber seal 33 or less VQ1000 VQ1400 40 or less 20 or less

PF2A/PF2W

(Add 20 g for the types of analog output whether voltage or current output selected.)

PFxx-OMA1007

(page 141) -142No.PF-OMA1007-B Air Management Hub Base type EXA1-20/30/40-PN/EN/EC-# Model A B C D E F EXA1-20 236.2 35 42 19.1 65.1 30.5 EXA1-30 236.2 43 53 13.6 65.1 30.5 EXA1-40 240.4 51 64.4 4.6 71 35.5 -143No.PF-OMA1007-B EXA1-60-PN/EN/EC-# -144No.PF-OMA1007-B Remote type EXA1-20/30/40-SA-# Model A B C D E F G EXA1-20 236.2 35 42 19.1 65.1 30.5 74.7 EXA1-30 236.2 43 53 13.6 65.1 30.5

Electronic Pressure Switch Series (Separate Type)

kPa 100 to 100 kPa 10 to 101.3 kPa 0.1 to 1 MPa 0 to 100 kPa 0 to 1 MPa 0 to 101 kPa 0.1 to 0.45 MPa 0.1 to 0.4 MPa 20 to 101 kPa 101 to 101 kPa 0.1 to 1 MPa 0.4 to 10 MPa 0.5 to 15 MPa 100 to 100 kPa 0.1 to 1 MPa 0 to 1 MPa Voltage 12 to 24 VDC (Ripple 10% or less) 3% F.S. or less (5 to 40C) 3% F.S. or less (0 to 60C) 3% F.S. or less (0 to 60C) 3% F.S. or less (0 to 60C) 0.01 mm or less