0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

Refrigerated Air Dryer

Example: When the IDFA100F-40 is provided with options C or R or V, the model number will be the IDFA100F-40-CRV. 98 A Refrigerated Air Dryer IDFA100F/125F/150F Series Standard Specifications For use in Asia and Oceania IDFA100F-38 IDFA125F-38 IDFA150F-38 For use in Europe Model Specifications IDFA100F-40 IDFA125F-40 IDFA150F-40 Fluid Inlet air temperature Inlet air pressure Compressed air

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

Process Pump

) (9.5) 40 119 106 13 14 97 77 Silencer: AN20-02 (Option) 43 Foot (Option) FLUID IN 1/2" Tube extension AIR EXH Rc, NPT, G 1/4" 110 63 619 PAF3000-X68 Dimensions: Automatically Operated Type (PAF3000 Series) With nut (with LQ1 fittings): PAF3410S-X68 1S13 1S19 152 2 x M5 x 0.8 Thread depth 9 139 (40) 11 133 114 95 19 63 121 4 x 7 Reset button Bottom view of body Foot (Option) With nut (with

3 Port Solenoid Valve/

(Spring return) VP500/700 X536 X538 X555 VG342 X87 Operation Internal pilot External pilot Operating pressure range 36 to 102 psi [0.25 to 0.7 MPa] 36 to 102 psi [0.25 to 0.7 MPa] External pilot pressure 36 to 102 psi [0.25 to 0.7 MPa] (Same as operating pressure) Maximum operating frequency 30 times/minute Minimum operating frequency 1 time/week Operating and ambient temperature 14 to 122

Table of Contents

60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,

Electric Actuator

55 160.5 130 68 32 16.5 25 60 101 123 64 12 18.5 5.4 50.5 125.5 38.5 30 40 M6 x 1.0 10 8.5 190.5 160 85 102 Step motor Servo motor OA OB P Q S T U V WA WB WC X XA XB Y Z Size Stroke range VA VB VA VB 25 40 70 35 39st or less 40st or more, 100st or less 101st or more, 200st or less 39st or less 40st or more, 100st or less 101st or more, 124st or less 125st or more, 200st or less 201st or

Table of Contents

or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

Plate Cylinder

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Size 25 32 40 50 63 Part no.

3

moment of inertia [kgm2] Allowable moment of inertia [kgm2] 102 102 MK 103 103 50, 63 Standard arm single unit 32, 40 Standard arm single unit 104 50 100 200 104 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 386 Model Selection MK Series Note) Maximum piston speed is equivalent to approximately 1.6x the average piston speed.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Manual override Body option VF Rated voltage 25 32 40 40 50 63 80 100 20 Light and surge voltage suppressor CM2 cylinder CA1 cylinder Cylinder bore size (mm) Electrical entry VFR Flow control specifications( RR) A B VP7 PSystem Figure Solenoid valve VP4 Fitting Silencer Effective area (mm2) 2 Air cylinder VQ 1 VQ4 Speed controller VQZ Operating conditions: Pressure 0.5MPa, Load rate 50% At

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

or less Exhaust center VFS2420 VFS2430 600 40 or less 0.42 Pressure center VFS2530 VFS2520 0.42 600 40 or less Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5 18 6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4 148 137.5 112.5 18 5 148 137.5 123 12.5 6 160.5 150 133.5

e-Rodless Actuator

(A clearance of 40 or more is required.) (60) (74.7) 101.7 60 (40) 80 40 74.7 27 27 4H7 depth 5 Motor 72 43.5 50 42 60 102 102 50.4 40 5 5.1 40 3.5 40 Long hole depth 5 Controller 4 15.5 6 7.2 5.6 (Max. 8.6) 14.4 6.5 4H7 2-6.5 counterbore depth 3.3 28 (60.3) 87.3 2 x 2-3.3 through hole 4 152 + Stroke 4-M4 x 0.7 depth 7 FG terminal M3 T-slot section for mounting I/O cable (9 wires) 5.8 3.5

CJ2

Foot style 40 16 Flange style Mounting bracket weight 15 5 Rod end nut are included in the basic weight.

Valve Single Unit

A: Orange B: Green SX M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 3 4 5 3 4 5 L plug connector (L): SX5 40(R)-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

0.4

Coil +COM Varistor Varistor SOL, B (+) SOL, B () Note) With quick response type, approximately -40 V of coil surge voltage is generated when the valve is switched OFF.

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

CJ2

Axial foot 16 40 Mounting bracket weight Front flange 5 15 This basic weight includes weight of rod end nut.