Air Cylinder

20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 (Reference) JW Bore size e f h IJ JH Bore size TB TDe8 TR TZ Z ZZ (Reference) l Z ZZ 20 11 8 0.025 0.047 39 47.6 93 (101) 106 (114) 25 11 10 0.025 0.047 43 53 98 (106) 111 (119) 32 10 (11) 12 0.032 0.059 54.5 67.7 101 (108) 113 (121) 40 10 (12) 14 0.032 0.059 65.5 78.7 118 (125) 130 (139) 50 12 (13) 16 0.032 0.059

2

) Note 20) Note 20) Note 20) Note 20) Note 20) Note 20) Note 15) The combination of metal bowl: 2 and 8 is not available.

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring Dual 3-port valves, 4 positions VQC1000/2000 (Rubber seal only) Model A side B side JIS symbol Two

Series SV

pins) Common Common Common Common 20 26 19 25 SOL.

A

20 14 72 M10x1.5 7 18 5 80 300 37 40 101 50 25 20 89 M10x1.5 11 22 5 100 300 37 40 101 60 30 20 110 M12x1.75 11 26 7 *Trunnion mounting threads in flats NA are not available for 80, 100 bores.

Compact Hydraulic Cylinder

19 22 19 47 12 37 34 M12 1.25 M20 1.5 50 25 to 800 75 52.3 60 1/2 74 20 57 33 29 28 18 11 32 30 25 28 53 24 42 9 42 M12 1.25 M27 2 63 25 to 800 90 64.3 60 1/2 80 20 55 33 29 36 17 13 32 30 32 36 68 13 30 50 39 M16 1.5 M33 2 80 25 to 800 115 82.7 80 3/4 93 28 66 40 34 45 20 17 39 40 41 45 41 76 9 60 46 M16 1.5 M42 2 100 25 to 1000 130 96.9 100 3/4 101 36 67 40 50 56 20 19 54 50 52

Made to Order

50 stroke or less 34 (46) 37.5 (47.5) 40 (50) 46.5 (56.5) 48.5 (58.5) 54 (64) 63.5 (73.5) 75 (85) 28 35 35 43 59 20 25 32 40 50 63 80 100 CQ2W series A L Bore size (mm) 75, 100 stroke 84 86.5 88 101 114.5 50 stroke or less 74 (84) 76.5 (86.5) 78 (88) 91 (101) 104.5 (114.5) 17 18 18 20 22 40 50 63 80 100 5 5 L + Stroke L A + 2 (Stroke) RQ series (mm) Bore size (mm) A L F T 20 25 32 40 50

CV/MVGQ

81 ZZ 229 239 247 280 292 Z 101 111 115 138 144 Z 93 103 107 129 135 ZZ 221 231 239 271 283 15 0.032 0.059 15 0.032 0.059 18 0.032 0.059 25 0.040 0.073 25 0.040 0.073 38 20 20 20 24 24 45 50 57 69.5 79.5 23 23 28 35 43 85 95 110 140 162 77.5 87.5 102 124.5 144.5 115 125 146 190 212 8 0 0 0 0 18 18 18 20 20 43.5 49 63 73 The minimum stroke of the one with rod boot is 20 mm or more. 10-15

CV/MVGQ

247 280 292 Z 101 111 115 138 144 Z 93 103 107 129 135 ZZ 221 231 239 271 283 40 50 63 80 100 15 0.032 0.059 15 0.032 0.059 18 0.032 0.059 25 0.040 0.073 25 0.040 0.073 38 20 20 20 24 24 45 50 57 69.5 79.5 23 23 28 35 43 85 95 110 140 162 77.5 87.5 102 124.5 144.5 115 125 146 190 212 8 0 0 0 0 18 18 18 20 20 43.5 49 63 73 The minimum stroke of the one with rod boot is 20 mm or more. 10-15

AC Servo Motor Driver (Network card type ）

Software limit . 20-101 20.8.4 Torque limit . 20-102 10 - 20.8.5 Polarity . 20-103 20.8.6 Touch probe. 20-104 20.8.7 One-touch tuning . 20-109 20.8.8 Driver life diagnosis function . 20-110 20.8.9 Machine diagnosis . 20-111 20.8.10 Quick stop . 20-112 20.8.11 Halt . 20-113 20.8.12 Ramp Stop . 20-113 20.8.13 PROFIdrive parameter definitions related to alarms . 20-114 20.8.14 Parameter . 20

5 Port Solenoid Valve Series SV1000/2000/3000/4000

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

80 P1 60 15 60 40 10 40 Air consumption Q1 Qmax 20 5 20 Suction flow Maximum suction flow Flow characteristics are expressed in ejector vacuum pressure and suction flow.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25 30 35 40 45 50 75 50 40 30 100 8 9 10 11 12 13 12 80 Allowable lateral load at end (N) 16 18 20 22 24 26 16 20 63 28 31 34 37 40 44 47 50 53 56 20 10 50 44 48 53 57 62 66 71 75 80 84 25 40 32 25 78 86 227 93 101 109 117 125 133 140 148 187 32 5.0 4.0 3.0 109 117 258 125 133 140 148 156 164 172 180 219 40 20 16 407 187 199 211 223 236 248 260 272 285 346 50 2.0 474 254 266 278

Integrated Controller

[mm] Double Clevis Size Stroke range [mm] A CL CB CD CT CU CW CX CZ L RR 16 30 to 100 128.4 119.4 20 8 5 12 18 8 16 10.5 9 25 30 to 100 166.2 156.2 10 5 14 20 18 36 14.5 10 101 to 200 191.2 181.2 32 30 to 100 185.6 175.6 10 6 14 22 18 36 18.5 10 101 to 200 215.6 205.6 Material: Cast iron (Coating) The A and CL measurements are when the unit is in the original position.

Compact Cylinder

10 5 10 5 10 10 20 12 50 412 742 1072 16 20 25 32 Weight 40 (g) Weight 50 Action Bore size (mm) Cylinder stroke (mm) (N) Single Acting, Spring Extend 5 10 15 20 Bore size (mm) Stroke (mm) Spring reaction force (N) Second First 12 16 20 25 32 40 50 12 16 20 25 32 40 50 29 35 42 51 2.9 2.8 3.9 3.9 5.3 5.9 9.8 9.8 20 20 20 20 24 24 11 9.7 20 20 27 27 29 29 29 29 29 29 83 83 5 10 5 10 5

5 Port Solenoid Valve

mmm J kit: PC wiring compatible flat ribbon cable 325 20 Max. 16 stations T kit:Terminal block box 660 20 Max. 20 stations 455 Note 4) L kit: Lead wire 20 Max. 24 stations M kit: Circular connector 390 20 Max. 24 stations M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") C kit: Connector 115 20 Max. 20 stations SS0755-mCmC (Manifold pitch: 8.5) Rc1/8 S kit: Serial transmission (EX510)

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

NCQ2/CQ2

5 10 5 10 5 10 5 10 5 10 5 10 10 20 11 9.7 20 20 27 27 29 29 29 29 29 29 83 83 2.9 2.8 3.9 3.9 5.3 5.9 9.8 9.8 20 20 20 20 24 24 Spring return Spring extend 12 63 76 87 101 16 125 145 20 196 217 357 426 25 29 35 32 43 50 67 78 40 92 104 50 135 151 206 223 374 429 Single acting, Spring extend Spring state with first mounting load Spring state with second mounting load

CQ2

W/o auto switch B L L1 With auto switch Bore (mm) 5st 10 A 20 20 20 20 5st 10 5st 10 5st 10 32 48 58 12 33.5 58 68 17 38.5 40 64.5 12 33.5 64.5 74.5 17 38.5 45.5 50 67.5 77.5 18 43.5 87.5 97.5 28 53.5 Rod end male thread Double clevis (mm) A Without auto switch B CL A B CL With auto switch Bore (mm) Double clevis/CQ2D, CDQ2D 5st 10 20 20 20 20 20 20 5st 10 5st 10 5st

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

) direction 0.3 75 50 45 40 0.7 35 30 0.5 25 20 15 10 100 12 59 60 42 54 47 25 41 35 29 IN 12 16 79 84 57 76 67 34 59 50 42 OUT 20 178 165 152 106 140 127 75 114 101 45 88 75 63 IN 16 25 216 202 187 141 173 158 101 144 129 60 115 100 86 OUT 32 471 318 297 277 165 256 235 118 214 193 71 173 152 131 IN 576 20 40 597 413 390 367 220 344 321 157 298 275 94 252 229 206 OUT 717 50 951 659