Aluminum High Vacuum Angle Valve

With Bypass Valve (Flange size: 100) (40) 185 154 3 (40) (40) I G H H V A C 154 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) XLA-16-X65 e u t w y Pilot port: Rc1/8 r Shaft seal (FKM) Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Scraper (FKM) 0.2 Pilot port: M5 131 Lock nut Width across flats 13 299 (Max. 13) 7.5 102 132 134 8-2 108 8-1 i !

ZP

Buffer body (Material: Aluminum alloy) ZP100H ZP125H ZP100HB ZP125HB Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 30 (Hexagon) ZPB-T3J25-B01 ZPB-T3J25-N01 ZPB-T3J25-T01 ZPB-T3J50-B01 ZPB-T3J50-N01 ZPB-T3J50-T01 ZPB-T3J75-B01 ZPB-T3J75-N01 ZPB-T3J75-T01 ZPB-T3J100-B01 ZPB-T3J100-N01 ZPB-T3J100-T01 24 A 13 (B) 8 8 50 M22 x 1.5 Dimensions Model 44 80 120 155 A 131 167

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y A Connection thread 10 83 49 23 Width across flats 12 20 121 59 51 30 131 69 40 167 79 77 50 177 89 10 13 38 22 D C B 2.5 6 M10 x 1 14 3 10 83.5 49.5 23 20 121.5 59.5 51 30 131.5 69.5 40 167.5 79.5 77 50 177.5 89.5 Width across flats 7 16 38.5 22.5 N4 N6 U4 U6 A10 10 87 53 23 20 125 63 51 30 135 73 40 171 83 77 50 181 93 E2

MY1

17.5 26 26 R 1.1 1.1 1.8 1.8 Applicable O-ring Model MY1B 50G MY1B 63G MY1B 80G MY1B100G C15 P22 MY1B Bore size G SMY1B Bore size , #2 (#2 + #6) 16 Mechanically Jointed Rodless Cylinder Series MY1B 1 in = 25.4 mm Dimensions (mm) Side Support Side support A MY-S A 2-G 2-H F E C D A B Side support B MY-S B 2-J E A B C D Model A 35 43 53 61 70 87 113 136 170 206 B 43.6 53.6 65.6 75 84 105 131

CV/MVGQ

1.25 15 34.5 M26 x 1.5 22 12 19.5 17 32 26 0 0.033 -X Up to 300 16 50 154 16 7 88 29.8 8 10 84.5 46.5 21.5 42.5 M32 x 2 M14 x 1.5 14 24 21 22 41 32 0 0.039 With Rod Boot 20l h f B3 e Bore size (mm) 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Data 20 25 32 40 68 12.5 17 30 36 81 93 106 131

JA/JAH/JB/JS

Model Allowable eccentricity U Center of sphere R Weight (kg) H A B L C D T J G ML2B Nominal size Pitch Standard Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa C J G5-S JAF20-8-125 JAF30-10-125 JAF40-14-150 JAF63-18-150 JAF80-22-150 JAF100-26-150 JAF140-30-150 JAF160-36-150 20 25, 30 40 50, 63 80 100 125, 140 160 19 25 32 65 75 90 125 150 8 10 14 18 22 26 30 36 32.5 36 49 61.5 76.5 94 131

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

MY1

Model B3 C1 14 20 22 C2 39 44 54 E1 1 1 1 E2 1 1 1 B1 28 40 44 78 88 108 96 111 131 MY-J25 MY-J32 MY-J40 8-11-29 29 Series MY1B Floating Bracket Facilitates connection to other guide systems. Applicable bore size Floating Bracket Operating Precautions Caution Make sure that the amount of divergence from the external guide is within the adjustable range.

JA/JAH/JB/JS

Model Allowable eccentricity U Center of sphere R Weight (kg) H A B L C D T J G ML2B Nominal size Pitch Standard Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa C J G5-S JAF20-8-125 JAF30-10-125 JAF40-14-150 JAF63-18-150 JAF80-22-150 JAF100-26-150 JAF140-30-150 JAF160-36-150 20 25, 30 40 50, 63 80 100 125, 140 160 19 25 32 65 75 90 125 150 8 10 14 18 22 26 30 36 32.5 36 49 61.5 76.5 94 131

Floating Joint

125 JAF30-10-125 JAF40-14-150 JAF63-18-150 JAF80-22-150 JAF100-26-150 JAF140-30-150 JAF160-36-150 8 10 14 18 22 26 30 36 19 25 32 65 75 90 125 150 48 52 70 36 40 52 45 55 65 82 100 21 24 31 41 50 59.5 79 96 6 6 9 12 16 19 24 29 6.6 6.6 9 9 11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 19 20.5 27 34.5 43.5 52 73.5 86 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 32.5 36 49 61.5 76.5 94 131

Cylinder with Lock

37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4 51 8 M6 x 1.0 50 35 32 66 65 33 49 55.5 78 1/8 46.5 20 40 14 64 15.5 47 23 5 58 11 M8 x 1.25 63 35 32 78 75 39 52.5 59.5 90 1/4 56.5 20 45 14 73 16.5 53 20.5 9 58 11 M8 x 1.25 80 40 37 98 95 49 64.5 71.5 113 1/4 72 25 45 20 92 19 65 26 11.5 72 13 M10 x 1.5 100 40 37 116 114 58 73.5 80.5 131

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Basic With rear lock: CBM2B Bore size A-HN Stroke 20 Manual release non-locking style (Suffix: N) With air cushion (mm) S ZZ Double lock 137 141 141 167 Bore size (mm) 20 25 32 40 WB WA Double lock 83 83 83 101 Rear lock 72 72 72 93 Rear lock 126 130 130 159 Front lock 73 73 75 96 Front lock 127 131 133 162 8.5 10 11.5 15 11.5 11.5 11.5 14.5 -H -R -W N L Axial foot: CBM2L Bore size Stroke

Table of Contents

Refer to page 100 for part numbers. 131 132 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Slider Guide Type Motor Output: 200W TSUBAKI CABLEVEYOR Specification Series LJ1S30 How to Order L 200 Horizontal Mount Specification X40 2 G C 1 F S 3 LJ1S30

LJ1H

Refer to page 100 for part numbers. 131 132 Made to Order Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series LJ1S30 Slider Guide Type Motor Output: 200W TSUBAKI CABLEVEYOR Specification How to Order L 200 Horizontal Mount Specification X40 2 G C 1 F S 3 LJ1S30

Table of Contents

Specific Product Precautions. 126 127 127 128 129 130 131 131 131 134 135 136 138 139 139 139 143 146 148 150 151 152 152 153 154 155 156

SX

center 0.82 [0.54] 0.35 [0.38] 3.4 [2.1] 0.65 0.39 2.5 SV 125 126 3 position 0.58 0.39 2.2 0.97 [0.61] 0.23 [0.32] 4.3 [2.4] SZ 1(P) port Rc 114 116 122 124 0.82 0.37 3.2 0.77 0.26 3.2 2 position 1 4 C8 SY 0.62 0.31 2.4 0.63 0.24 2.6 SX720--C8 5, 3 (EA, EB) Port One-touch fitting for 8 Exhaust center Pressure center Single Double Closed center 0.70 [0.56] 0.42 [0.46] 2.6 [1.9] 0.57 0.25 2.4 131

Proposals for Energy Saving

S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 126 126 127 127 131 131 131 132 133 133 134 135 144 144 145 145 149 149 150 151 152 153 153 153 154 154 155 161 161 162 163 165 176 176 Series Variations. How to Order . Dimensions . Series KQ2 Inch-size Uni One-touch Fittings . Specifications.

Electric Actuator Triple Axis P&P Unit

length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5 4-6.5 20 20 12.5 C 31 63.5 13.5 E-100 4H10depth5 5 (26) (44) 110 100 Stroke69 (Stroke+131

LEC-OM02904

103 10.3 105 10.3.1 105 10.3.2 106 10.4 107 10.5 107 11 1-37 11.1 112 11.1.1 113 11.1.2 116 11.1.3 118 11.1.4 11-10 11.1.5 SSCNET 11-12 11.2 11-14 TM 11-17 11.3 MR Configurator2 11.4 LEC-MR-J3BAT 11-19 3 - 11.5 11-20 11.6 () 11-24 11.7 11-25 11.8 11-31 11.9 EMC() 11-34 12 121 125 12.1 122 12.2 123 12.3 124 12.3.1 124 12.4 124 12.5 125 13 131