Environment

Check that if it does not exceed the upper limit, by referring to the specifications (Page 133).

10

A B C +0.025 3H9 0 depth 3 2 x 5.5 through (Body mounting hole) 2 4 3 42 1 Dimensions of auto switch mounting groove (Enlarged view) 4 x M5 x 0.8 thread depth 10 (Mounting thread) +0.052 23H9 0 depth 1.5 4 +0.025 3H9 0 depth 3 M5 x 0.8 (Finger opening port) 4 x M6 x 1 (Piston rod and rack screw) Auto switch mounting groove (4 locations)1 M5 x 0.8 (Finger closing port) H 55 22.6 6.5 0.5 10

ML2B

164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x 1.5 ND 5.6 6.8 8.6 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc

3-Position Rotary Table

T0425 T0604 TU 0805 T0806 1/8B T1075 TU 1208 T1209 1/4B TS 1612 3/8B T1613 1/2B 3/4B 1B [Calculation example] Size: 10 Operating pressure: 0.5 MPa Inner sectional area of piping: 12.6 mm2 4.9 4 2.5 12.6 6 4 19.6 8 5 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 16 12 127 12.7 133 16 13 204 16.1 366 21.6 598 27.6 Lengh of piping: 1000 mm Stroke: Center Counterclockwise

MHL2

groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38 54 72 24 39 57 100 142 180 76 118 156 56 78 96 26 42

Mechanical Valves Series NVM, NVFM, NVZNI

E Panel lMounting Panel N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133

DOC1020530

Actuator operation from host . 40 8.1 CiA 402 drive profile . 40 8.1.1 FSA state . 40 8.1.2 Controlword / Statusword . 41 8.1.3 Control mode . 42 8.2 Parameter setting . 43 8.3 Servo-on and Homing . 44 8.4 Positioning operation (Profile position mode) . 45 9.

ZQ-OM01601

ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

Rotary Table/

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

IR1000/2000/3000

Note 3) IR1000 uses KT-IR1000 and IR1010/1020 use KT-IR1010. 14-5-8 8 Precision Regulator Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (Option) 30 2 25 Bracket (Option) F.R.L.

ISA2

0 T E S T E S 9 9 162 0.3 0.3 0.15 0.1 0.05 133 0.4 128 0.4 MPa 0.2 0 103 64.4 SUP port Rc, NPT, G 1/8 SUP port Rc, NPT, G 1/8 Throttle needle 25 40 10 42 With regulator + 2 port solenoid valve With 2 port solenoid valve 16-8-15 16 Series ISA2 Bracket Mounting Position With 2 stations, the bracket is mounted on the second sensor from the left. 1 2 1 2 Left Right 1 2 MPa MPa MPa MPa MPa MPa

Model Selection 1

Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C./N.O. 1/8 to 3/4 0 to 3 (1) 17-2-57 VV2CW2/3/4 N.C./N.O.

VCA

All types are equipped with surge voltage suppressor. 17-2-10 5 Series VCA Direct Operated 2 Port Solenoid Valve For Air Standard Specifications Valve construction Direct operated poppet Fluid Air, Inert gas, Low vacuum (133 Paabs) Withstand pressure (MPa) 2.0 Body material Al Seal material HNBR Valve specifications Ambient temperature (C) 20 to 60 Fluid temperature (C) 10 to 60 (No freezing

VXD21/22/23

46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136) 17.5 23 39 45.5 3 4 VXD2150 VXD2260 1 VXD2152 VXD2262 36.5 133 (150) 20 25.5 41.5 49.5 ( ): N.O. 17-3-40 9 Series VXD21/22/23 Pilot Operated 2 Port Solenoid Valve For Air, Gas, Water and Oil The VX series will be revised shortly.

IIIIIII

T.T 90" .75 PSIG (5 Kgf/cm2) #4n 2V,,tay 3 Way F O F , 3 31 lbs. (1.5 kg ) T T 45" A B c D E F G H J K tl N 3.44 '473' 2.24 '56.81 1.25 31.8) 1.20 0.06 (1.5) 0.12 (3) 0.86 t22.51 1.57 {rto) t.42 361 1.26 (321 1.20 0.24 (6) Millimeters in Parenlheses Millimelrs in Parenthses MECHANICAL VALVES HOWTO ORDER DIMENSIONS Series NVM HOW TO ORDER NVM 220 N02 065 TT t l I LRoller Material (01,02,06,07

Round Type Hydraulic Cylinder

Size Tolerance +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 +0.3 +0.1 +0.058 0 +0.058 0 +0.070 0 +0.070 0 With CDP-3 0.013 0.035 0.013 0.035 0.016 0.043 0.016 0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 Y-020B Y-032B Y-04D Y-04B 9 9 16 16 9 9 12 12 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 10 10 12 12 3.2 3.2 4 4 16 18 22 22 36 38 55 55 20 25 32 40 5 5 13 13 20 20 24 24 14 14 25 25 18 18 38 38 M8 x 1.25

Aluminum High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 45 0.35 XLA Construction/Operation XL XL Internal control

High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 0.35 45 XLA Construction/Operation XL XL Internal control

NCQ8

1.42 1.33 2.50 2.47 056 (9/16") 3.06 075 (3/4") 3.42 106 (1-1/16") 3.73 Single Acting, Spring Extend Unit: lbs 150 (1-1/2") 4.00 6.79 Bore size (in) Pressure (MPa) 45 (0.3) 75 (0.5) 145 (1.0) 200 (1.4) 4.09 6.11 200 (2") 12.1 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 5.81 13.0 27.1 58.9 109 186 11.5 23.6 47.0 101 188 316 25.5 49.5 95.8 205 379 633 36.1 69.1 133

Refrigerated Air Dryer

Pressure switch Pressure switch Condenser Fan motor Evaporation thermometer Capillary tube 93 C IDFAE Series Dimensions IDFA3E to 15E1 A B A D E Q C F G C M N L P K 4 x 13 In case of IDFA3E IDFA4E to 15E1 Dimensions (mm) B C D E F G K L M N P Q A Model Port size IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 15 Rc 3/8 226 410 473 67 125 304 33 36 154 21 330 13 Rc 1/2 453 498 283 275 455 270 31 42