Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DHead end lock Rod end lock Releasing the Lock Operating Precautions -X Warning Caution 201.

Integrated Controller

to 400 76 58 25 20 29 22 36 20 to 39 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 48 Easy to Operate EQY H Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor EQY16DH Grease supply port (For 200 mm stroke or more) Vent hole (20) 88 Required space: J5 Opposite end [Origin end]2 Rod operating range1 Origin end2 (35.6) [

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Station L1 L2 Port size One-touch fitting 625 3 Port Pilot Solenoid Valve 10-SYJ500 Type 41 Manifold: Side Ported/10-SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5

CQS

JIS symbol Theoretical Force Unit: N OUT IN Operating pressure (MPa) Rod diameter (mm) Piston area (mm 2) Bore size (mm) Operation 0.3 0.5 0.7 84.8 IN 25 42 59 12 6 CU 113 OUT 34 57 79 151 IN 45 75 106 16 CQS 8 201 OUT 60 101 141 236 IN 71 118 165 CQ2 20 10 314 OUT 94 157 220 MU 378 IN 113 189 264 25 12 491 OUT 147 245 344 Intermediate Strokes Spacer is attached on standard stroke body.

VZS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D side VZS 2-C6, C8 VFS A 2 VS4 B D-sub connector VQ7 10.7 31.5 EVS (Port size: One-touch fitting type) VFN n: Stations L Stations Formula 20n + 21 20n + 30 16 341 350 15 321 330 14 301 310 13 281 290 12 261 270 11 241 250 10 221 230 9 201 210 8 181 190

5 Port Solenoid Valve, Series VQC

C10 1(P) port 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250 260.5 9 201

VQC

C10 1(P) port 13.5 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250 260.5 9 201

Battery-less

(Terminal no.) (5.5) (6.7) (5.7) Connector D AB 1 3 1 4 1 3 1 1.5 3 3 5 5 8 81 6 2 5 1 (18) (14) (13.5) 2 1 AB 15 16 A 101 (14.7) Connector C (10) Connector E B 151 (30.7) L (11) C 201 1 Produced upon receipt of order With lock and sensor Signal Connector A terminal no. A B-1 Cable color Connector D terminal no.

ZP

12.6 19.6 31.2 50.3 122.7 85 107 167 264.9 427 667.3 1042.6 ZCU 80 101 157 249.3 401.9 628 981.3 75 94.5 147 233.7 376.8 588.8 920 AMJ 70 88.2 137 218.1 351.7 549.5 858.6 Vacuum pressure (kPa) 65 81.9 127 202.5 326.6 510.3 797.3 Misc. 60 75.6 118 301.4 471 736 187 55 69.3 108 276.3 431.8 674.6 171.4 50 63.0 98.0 155.8 251.2 392.5 613.3 45 56.7 88.2 140.2 226.1 353.3 552 40 50.4 78.4 124.6 201

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

176 131 106 161 136 201 5 to 50, 75,100 176 136.5 111.5 170.5 145.5 214.5 189.5 136.5 111.5 170.5 145.5 214.5 10 to 50, 75,100 189.5 Data Foot bracket material: Carbon steel Bore size (mm) L LD LG LH LT LX LY LZ X Y 63 80 100 95 3.2 46 5 9 11 91.5 113 16.2 18 118 4.5 59 7 11 13 114 140 19.5 20 137 6 71 7 12.5 13 136 162 23 22 Flange style: CQ2WF/CDQ2WF M FV FT L1 B A + Stroke L2 + Stroke

Table of Contents

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

MGG

11 160 140 182 For long strokes Bracket mounting strokes Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) P Y Z Y X T W S V R Q R U 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 Rc 1/8 100mm or more 88 250 to 400 157 80 30 40 12 26 48 12 21 14 82 Rc 1/8 125mm or more 88 350 to 500 175 80 37 13 46 57 31 12 21 14 100 Rc 1/8 150mm or more 90 350 to 600 201

Modular Type Filter Regulator Series AW

.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model C 48 73 86 92 93 A 25 40 53 70 75 D 25 52 59 75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N

V

ACCESSORIES M A N I F O L D T Y P E 41 B O T T O M P O R T E D DXT201-15-1A Blanking Plate Kit Stations (n) 2 3 4 5 6 7 8 9 10 L1 61 80 99 118 137 156 175 194 213 L2 49 68 87 106 125 144 163 182 201 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

Piping: 41R (Base Mounted), Stations: 13 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41R (Base Mounted), Stations: 12 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 7 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 5 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 8 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 4 Stations, A, B Port: N7T (1/4" One-touch Fitting)