Stations: 8 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: NPT

Stations: 9 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: Rc

Stations: 9 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: NPT

Stations: 5 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPTF

Stations: 3 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: Rc

Stations: 8 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: Rc

Stations: 2 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: Rc

Stations: 5 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: G

Stations: 20 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPTF

Stations: 11 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Stations: 14 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPTF

Stations: 14 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPTF

Stations: 4 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: G

Stations: 16 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: NPT

Stations: 16 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

High Vacuum L Type Valve

Valve size Valve size Material 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 (3) Standard B2401-P8V B2401-P10V Special B2401-P8 B2401-P10 Note 1) Add the seal material symbol shown on page 8 at the end of the model number (in place of ).

High Vacuum L Type Valve

AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

XL-OMV0005

AS568-025 AS568-030 AS568-035 AS568-039 Nut assembly (9) SUS304 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 Standard B2401-P8V B2401-P10V (3) Special B2401-P8 B2401-P10 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

High Vacuum L Type Valve

AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

XLA Series

Material 63 80 100 160 Standard AS568-043V AS568-045V AS568-050V AS568-167V Exterior seal (3) Specific AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Valve seal (2) Specific AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** Note1) List the optional seal material symbol after the model number, except for the standard sealant material