Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 11 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 11 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 11 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

1

operation Roller lever Polyacetal roller VM121-01-01A VM131-01-01A VM121U-01-01A VM131U-01-01A VM123-M5-01A VM133-M5-01A 11 g Hard steel roller VM121-01-01SA VM131-01-01SA VM121U-01-01SA VM131U-01-01SA VM123-M5-01SA VM133-M5-01SA 16 g One way roller lever Polyacetal roller VM121-01-02A VM131-01-02A VM121U-01-02A VM131U-01-02A VM123-M5-02A VM133-M5-02A 15 g Hard steel roller VM121-01-02SA

2

Port size Fittings Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00* Same diameter tubing KQ2 KDM6 * Only for Bulkhead union. KDM Spare Parts Use the part number below to order the gasket for M5 thread.

CATALOG

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

ZP

x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 22 22 22 4 4 4 11 11 11 6 6 6 0.5 1.8 1.2 1.8 0.8 0.8 1.8 8 6 4 6.5 8.5 4.5 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04UM;-B5-U4 ZP3-Y06UM;-B5-U4 ZP3-Y08UM;-B5-U4 ZP3-Y04UM;-B5-U2 ZP3-Y06UM;-B5-U2 ZP3-Y08UM;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width across flat 7 (10.5) (12.5) M-5AU-2 [Weight: 1.5 g] 2

Table of Contents

(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

5-Port Solenoid Valve

M5 x 0.8 (PE: External pilot EXH port) 1/8 [5(EA), 3(EB) port] 11 11 9.5 4 3 2 28.6 5.2 SOL.a SOL.b 1 Unused (Without terminal) * These figures show the SY3200-5Z1-WO-01F.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000-39-2A Port size M5 x 0.8 10-SY3000 10-SY5000 1 8 Port size t M5 x 0.8 11 15 t 11 15 10-SY3000 10-SY5000 1 8 Series Assembly part no. SY3000-38-2A SY5000-38-16 A d SY5000-39-16 A Note) The EXH port may be either on the lead wire side or on the end plate side. (An assembly is shipped under the conditions shown in the figure.)

Table of Contents

Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 8.1 11 12.7 M8 x 1.0 4 7 M4 x 0.7 3.2 SNJ-016B NTJ-015A 9.2 14 16.2 M10 x 1.0 4 8 M5 x 0.8 4 NDd9 NDH10 R1 NX U1 Part no.

ZP

x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 22 22 22 4 4 4 11 11 11 6 6 6 0.5 1.8 1.2 1.8 0.8 0.8 1.8 8 6 4 6.5 8.5 4.5 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04UM;-B5-U4 ZP3-Y06UM;-B5-U4 ZP3-Y08UM;-B5-U4 ZP3-Y04UM;-B5-U2 ZP3-Y06UM;-B5-U2 ZP3-Y08UM;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width across flat 7 (10.5) (12.5) M-5AU-2 [Weight: 1.5 g] 2

Table of Contents

0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 12 14 17 23 31.5 8 10 11 15 21.5 2H9 8h9 6 7 9 11 12 3H9 8h9 4H9 10h9 6H9 12h9 8H9 14h9 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5

Compact Cylinder

Standard (mm) Bore size (mm) Stroke range (mm) A B C D E F G H I J K1 K2 L M N Q W Z Th9 P 12 16 20 25 0 0.043 37.2 30.2 6 6 25 10 1.5 M3 x 0.5 32 5.2 5 3.5 15.5 3.5 15 15 M5 x 0.8 5 to 30 0 0.052 38 31 20 8 8 29 10 1.5 M4 x 0.7 38 6 6 3.5 3.5 15 20 M5 x 0.8 5 to 30 0 0.043 25.5 17.5 43 34 7 10 36 9.5 2 M5 x 0.8 47 8 8 4.5 5.5 13 M5 x 0.8 5 to 50 0 28 19 47 37 12 12 40 11 2 M6 x

Table of Contents

bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 counterbore depth 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 8-11-21 21 Series MY1B Standard Type/Centralized Piping Type 16, 20 Refer to page 8-11-9 regarding centralized piping

Series VV100 is suitable for both direct or bracket mounting and can also accommodate various piping sizes including our miniature 2mm one-touch fittings. 

Table of Contents

M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33

Table of Contents

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Air Slide Table

Model Bolt Max. tightening torque [N.m] Screw-in depth L1 [mm] Max. screw-in depth L2 [mm] MXQ6 M4 x 0.7 2.1 5 8 MXQ8 M4 x 0.7 2.1 8 11 MXQ12 M5 x 0.8 4.4 11 15 MXQ16 M6 x 1 7.4 14 19 MXQ20 M6 x 1 7.4 9 MXQ25 M8 x 1.25 18 12 MXQ6A M4 x 0.7 2.1 8 11 MXQ8A M4 x 0.7 2.1 8 11 MXQ12A M5 x 0.8 4.4 8 12 MXQ16A M6 x 1 7.4 12 17 MXQ20A M6 x 1 7.4 9 MXQ25A M8 x 1.25 18 12 MXQ6B M4 x 0.7 2.1 5 8 MXQ8B

NCQ2/CQ2

8 43 34 9.5 M5 x 0.8 7 10 #10-32UNF 4.5 13 0 0.043 M5 x 0.8 M5 x 0.8 25 5 to 50 19 5.5 28 40 2 10 52 10 10 1/4-28UNF 47 37 11 5 12 12 M6 x 1.0 15 0 0.043 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 M5 x 0.8 13.3 5/16-24UNF 39.5 53.5 32 10 to 50 21.5 34 5.5 45 2 4.5 60 14 14 12.5 13 16 M8 x 1.25 7 14 49.5 21 NPT 1/8 0 0.052 RC 1/8 Note 1) 63.5 49.5 75, 100 For details about the rod end nut and accessory