Air Pilot Operated Series NVSA

f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

VPA4

VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

Check Valve Series AK

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

Ozone Resistant

40 30 20 10 0 Initial value Measuring point 6 4.

30

(mm) M Weight (g) D Note 1) L Model 2 x Applicable tube 3.2 4 6 8 10 12 16 KQB2H23-00 KQB2H04-00 KQB2H06-00 KQB2H08-00 KQB2H10-00 KQB2H12-00 KQB2H16-00 9 9 12 14 17 19 24.6 25 26.2 28.2 33.2 35 38.2 42.6 6.8 6.8 12 17.4 27.2 33.7 56.1 3.4 5.6 13.1 26.1 41.5 58.3 113 12 12.6 13.6 16.1 17 18.6 20.8 D M M L Note 1) D is maximum diameter. Note 2) Value of FEP tube.

TM

6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 TMA-08 KQL08-00 KQT08-00 KQH08-00 KEA10 KEB10 KEA12 KEB12 KEC-03 6 TMA-10 KQL10-00 KQT10-00 KQH10-00 6 TMA-12 KQL12-00 KQT12-00 KQH12-00 Dimensions: Multi-holder M4 round head screw (Pitch) N-holding part Cutting groove for separation Applicable tubing O.D.

VSA4

(Manifold base) VVSA430-05N1 1 (2 position single) VSA4134-00 3 (2 position double) VSA4234-00 1 (Blank plate) XTO16-5A 1 5-3-38

OMU0023

0 0 0 0 0 0 0 0 0 1 0 0 1 0 1 35 2nd shift 0 1 1 0 0 0 0 0 0 0 0 0 1 0 0 1 0 Value 36 3rd shift, ExOR A001h 1 0 0 1 0 0 0 0 0 0 0 0 0 1 0 1 1 of 4th 37 4th shift, ExOR A001h 1 1 1 0 1 0 0 0 0 0 0 0 0 0 1 1 1 byte: "00h" 38 5th shift, ExOR A001h 1 1 0 1 0 1 0 0 0 0 0 0 0 0 0 0 1 39 6th shift 6 0 1 1 0 1 0 1 0 0 0 0 0 0 0 0 0 0 40 7th shift 7 0 0 1 1 0 1 0 1 0 0 0 0 0 0 0 0 0 41 8th shift

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa

Quick Exhaust Valve Series AQ 1

0 02 2 0 ASF Standard size Option 1 8 1 2 3 5 H L High temperature (5 to 80C) Low temperature (30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only

VP4

/470 Specifications Fluid Air 0.2 to 0.9 0 to 60 (No freezing.

Quick Exhaust Valve Series AQ

0 02 2 0 Standard size Option 1 8 1 2 3 5 High temperature (5 to 80C) Low temperature (30 to 60C) H L 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Symbol Port size Applicable series 0 5 M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 2 Note) AQ150 only

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

-00 KPQL10-00 18.5 16 25 35 23 6.8 28.4 M L 8 12 KPGL12-00 KPQL12-00 20.9 20 40 50 24 7.5 30.4 Note 1) D indicates the maximum diameter.

HRX-OM-M090

HRS018-W-0 HRS024-W-20) HRS Series 9.3 Flow Chart 9-7 HRX-OM-M090 Chapter 9 Documents 9.4 Cooling capacity 9.4.1 HRS012--10-(BJMT) 2500 2500 Ambient Ambient temperature temperature 2000 2000 or or Cooling capacity[W] Cooling capacity[W] facility water facility water temperature temperature 1500 1500 25 32 40 25 32 40 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid

JXCx-OMT0005CN

INC 50 10.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) 2DRIVEON No.1 (2)(5)(10)(13) DRIVE No.

HRX-OM-R005

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2 0 1 2 0 1 2 0 1 2 HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060

Prevents Micro-Bubbles

(C) 0 to 100 Ambient temperature (C) 0 to 60 Stainless steel (SUS) 0.12 0.18 0.44 1.67 1.96 0.86 Weight (kg) PPS 0.05 0.08 0.18 0.73 0.32 PFA 0.09 0.20 0.90 0.78 0.35 Note 1) 0 to 60C when the diaphragm is NBR or EPR.

NAR Series

M ) a P M ( g i s p ) 0 . 1 ( 0 5 1 e r u t a r e p m e T ) C 0 6 ~ 5 ( F 0 4 1 ~ 3 2 e g n a r g n i t a l u g e r e r u s s e r P ) a P M ( g i s p 0 2 1 7 ) 3 8 . 0 ~ 5 0 . 0 ( 0 3 3 ) 2 . 0 ~ 2 0 . 0 ( 0 2 1 7 ) 3 8 . 0 ~ 5 0 . 0 ( 0 3 3 ) 2 . 0 ~ 2 0 . 0 ( 0 2 1 7 ) 3 8 . 0 ~ 5 0 . 0 ( 0 3 3 ) 2 . 0 ~ 2 0 . 0 ( 0 2 1 7 ) 3 8 . 0 ~ 5 0 . 0 ( 0 3 3 ) 2 . 0 ~ 2 0 . 0 ( y d o B F A 2