CV/MVGQ

For single solenoid valve 1-1. Pilot valve only VO302A-00 1 pc. 1-2. With gasket VO302S-00 1 pc. 2. For double solenoid valve 2-1. Pilot valve only VO302A-00 2 pcs. 2-2. With gasket VO302D-00 2 pcs.

With Factory Installed

-k~-+---F'-i a. ~ " Ci Ora e mark ~ 8 0.2i=--l-t--':=-I:---+-f>__j ~ 8 0. 15 % ~-2~ 0 ~ 0-~ 4~ 00 ~-~ 6~ 00 ~-~ 80 ~0-~ 1 ~ 00 ~ O --j 0 'Ji 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Flow rale / min (ANR ) Inlel pressure MPa 8Turning the adjusting handle clockwise increases the pressure and turning the handle counterclockwise reduces the pressu re. AR2501-03 AR2501-03 0 I !

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

EX) Base: 6 stations, common EXH, A & B port 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

NCM

size 075 and above] 0050 (1/2"), 0100 (1"), 0150 (1-1/2"), 0200 (2"), 0250 (2-1/2"), 0300 (3"), 0400 (4"), 0600 (6") 075 (3/4") 088 (7/8") 106 (1-1/16") 125 (1-1/4") 150 (1-1/2") 200 (2") 0050 (1/2"), 0100 (1"), 0150 (1-1/2"), 0200 (2"), 0250 (2-1/2"), 0300 (3"), 0400 (4"), 0600 (6") Double acting Double rod 075 (3/4") 088 (7/8") 106 (1-1/16") 125 (1-1/4") 150 (1-1/2") 0050 (1/2"), 0100

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

individual SUP spacer assembly (Except VV5Z3-40 type) DXT192-40-1A Applicable interface regulator ARBZ3000-00-P How to Order Type 42 VV5Z3 05 C6 42 1 Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Section 11.8 1 5 1.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type 10-SS5YJ7-20 Body ported Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 10-SYJ723

7.5

1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ2C60 [N.C., N.O. valve x 1 (each)] SJ2C60K with back pressure check valve SJ2C60 [N.C. valve, N.O. valve x 1 (each)] !0 y t r q e u w !2 i !

Modular F.R.L. Units

8, 1/4 Bracket AF30-A 1/4, 3/8 5 AF40-A 1/4, 3/8, 1/2 Float type auto drain AF40-06-A 3/4 P.29 to 35 Mist Separator Series AFM AFM20-A 1/8, 1/4 AFM30-A 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40-A 1/4, 3/8, 1/2 AFM40-06-A 3/4 P.37 to 42 Micro Mist Separator Series AFD AFD20-A 1/8, 1/4 AFD30-A 1/4, 3/8 Bracket 0.01 Float type auto drain AFD40-A 1/4, 3/8, 1/2 AFD40-06-A 3/4 P.37 to 42

Large Size Vacuum Module: Series ZR

How to Order ZSE30A N M 00 X505 Output specifications Option 2 (Operating manual specifications) Output Analog output Type NPN PNP NPN PNP NPN NPN PNP PNP Nil Operating manual (Leaflet) Without operating manual Symbol Voltage Point 1 1 2 2 1 1 1 1 Current Y N P A B C D E F Option 1 (Connector/Lead wire specifications) Nil Without lead wire Lead wire with connector (Length 2 m) L Display unit

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

VQ7-6/7-8

Applicable cable O.D.: 8 to 10 3(1) VK SOL.A ZNR VZ 1(4) DC: Single VF COM 3(1) VFR SOL.B SOL.A ZNR ZNR VP4 1 (4) 2 (2) DC: Double VZS 3(1) ~ + VFS SOL.A ~ ZNR 1(4) VS4 100 VAC: Single VQ7 COM ~ ~ 3 (1) + + Holding screw SOL.A EVS SOL.B ~ ~ ZNR ZNR Ground nut VFN 1 (4) 2 (2) Housing Washer 100 VAC: Double 3 (1) Grommet (Rubber) ~ + SOL.A ~ ZNR 1 (4) 200 VAC or more: Single Terminal block

VQ7-6/7-8

Spacer (1) Spacer (2) Spacer (1) VQ7 Spacer (1) Throttle valve spacer Spacer (1) Spacer (1) Throttle valve spacer Note 2) Note 3) Note 3) Note 1) EVS Note 1) A throttle valve spacer and double check spacer (including those with residual pressure release valve) cannot be combined.

JXCx-OMY0004

Caution 1.

VQ7-6/7-8

Compatible cable Cord outside diameter: 6.8 to 10 ZNR 1 (4) DC: Single COM 3 (1) SOL.B SOL.A ZNR ZNR 1 (4) 2 (2) DC: Double 3(1) ~ + SOL.A ~ ZNR 1(4) 100VAC: Single COM ~ ~ 3(1) + + SOL.A SOL.B ~ ~ ZNR ZNR 1(4) 2(2) Holding screw 100VAC: Double 3(1) Ground nut ~ + Housing SOL.A Washer ~ ZNR Grommet (rubber) 1(4) 200VAC or more: Double COM + ~ ~ 3(1) + Terminal block SOL.A SOL.B ~ ~

VZS

Rc 1 4 VVZS3000-R-02-1 VVZS3000-R-02-2 Body type Plug-in type VVZS3000-10A-1 Non plug-in type VVZS3000-10A-2 Part no. Body type Plug-in type ARBZS3000-00-P-1 Non plug-in type ARBZS3000-00-P-2 Part no. Note) Apply pressure from the P port of the base to operate the interface regulator.

VP4

Model Exhaust specifications P A, B Port size E Applicable valve model Series Common Individual Common Individual VP4154-00 VP4254-00 VP4354-00 VP4454-00 1 , 1 1 3 4 1 2 3 4 3 4 , VVP450 3 4 VVP460 Option Blanking plate assembly XT038N-4A With gaskets and bolts 3-6-9 10 Series VP450/470 Dimensions: VVP450/460 Common EXH: VVP450Station 1Port size VVP460Station 1Port size Grommet Conduit terminal

VS7-6

-P VF VFR VP7 VQC SQ VQ Symbol VQ4 VQ5 A port regulation/ARB250-00-A B port regulation/ARB250-00-B VQZ P port regulation VQD VFS VS VS7 A port regulation VQ7 B port regulation 1.19-7 Series VS7-6 Sub-plate Sub-plate: Series VS7-1/VSA7-1 Specifications Applicable solenoid valve/air operated valve Sub-plate size Series ISO size q ISO size q Side piping 1 4 3 8 Piping Bottom piping 0.37kg 1

Quick Exhaust Valve Series AQ

-06-00 13.7 15.4 6.2 40.7 8 6 6 10.0 11.6 6 11.6 40.7 6.2 14.7 26.7 13.7 13.7 AQ340F-06-06 AQ340F-06-00 13.7 19.5 6.3 44.8 13 6 6 11.8 11.6 11 11.6 44.8 6.3 19.6 31.7 13.7 13.7 AQ240F-07-07 AQ240F-07-00 13.7 15.4 6.2 40.7 8 10.0 1/4" 1/4" 12 6 12 40.7 6.2 15.1 27.3 13.7 13.7 AQ340F-07-07 AQ340F-07-00 16.8 20.3 7.1 52.2 13 11.8 1/4" 1/4" 13.2 11 13.2 52.2 7.1 20.0 33.1 16.8 13.7 557

Quick Exhaust Valve Series AQ 1

Model Tubing O.D. d AQ240F-04-04 6 4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8 6 11.6 11 6 11.6 6.3 44.8 AQ240F-07-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8