HRX-OM-W032

Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check Monitor Menu . 5-9 5.5.1 Check monitor menu . 5-9

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

CNA

G59W G5PW K59W G5BA G59F 100 V Relay, PLC Grommet Reed switch Solid state switch PLC 100 V, 200 V Yes Relay, PLC 12 V PLC 24 V 2-wire 100 V Relay, PLC 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 24 V 5 V, 12 V Grommet 5 V, 12 V 12 V 100 V, 200 V 2-wire 3-wire (NPN) IC circuit Terminal conduit 12 V 2-wire Relay, PLC

CNA

G59W G5PW K59W G5BA G59F 100 V Relay, PLC Grommet Reed switch Solid state switch PLC 100 V, 200 V Yes Relay, PLC 12 V PLC 24 V 2-wire 100 V Relay, PLC 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 24 V 5 V, 12 V Grommet 5 V, 12 V 12 V 100 V, 200 V 2-wire 3-wire (NPN) IC circuit Terminal conduit 12 V 2-wire Relay, PLC

Clean Room Rodless Cylinder Series CYP ø15, ø32

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y69A Y59A 3-wire (NPN) IC circuit 5 V, 12

ISO Standard Hydraulic Cylinder

Note 3) For mounting types FY, FZ, or TA, indicate port position with the symbol B. 5 V, 12 V Water resistant (2-color indicator) M9PA 3-wire (PNP) 2-wire M9BA 12 V F59F 4-wire (NPN) 5 V, 12 V IC circuit Diagnostic output (2-color indicator) Z76 Z73 Z80 A54 5 V 3-wire (NPN equiv.)

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-196 Manifold Options VZS VFS Name plate [-N] VVQ0-57A-5 DIN rail mounting bracket [-D] Blank plate assembly VVQ0-10A-5 VVQ0-N5-Station (1 to Max. stations) Silencer AN103-X233 VS VS7 SUP/EXH block plate VVQ0-16A-5P R PR Blank plug KQP-X19 Built-in silencer, Direct exhaust [-S] 23 04 06 08 Double check block VQ1000-FPGIndividual EXH spacer VVQ0-R-5-C4 Individual SUP spacer VVQ0-P-5-

Modular Type Filter Regulator Series AW

2) Note 3) Pressure gauge Symbol 0.2MPa Note 3) Note 4) AD37 AD37NNote 5) AD47 AD47NNote 5) AD47 AD47NNote 5) Float type auto drain N.O.

CLA

MlaXt.5 32 35 11( I 86 11,5 V, ~ 2( 40 1102 1 26 67 18 37 140 1119 1102 1129 y , y, 78 I 25 52 1,,3 I 21 I 30 72 I 23 " 1 17 IMl2x1. 111 17 17 I M22 Xl .5 Wthboot .. f h , ZZ 43 15 59 ~ 52 15 66 ~ 52 17.5 66 'I, 65 2 1.5 81 % I 4( 1133 116 140 V, V. ' 92 3( 52 1124 I 21 I 31 I 76 I 25 100 -1 0IX 119 IM12X17!

IDG

Component equipment Standard performance conditions Micro mist separator with prefilter Regulator (Type V only) (1) AR20 AR25 AR40 (2) (2) (2) Compressed air Fluid Range of operating conditions Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 Inlet air temperature (C) 5 to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (

Series IDG

Component equipment Standard performance conditions Micro mist separator with pre-filter Regulator (V type only) AR2001 AR2501 AR4001 Compressed air Fluid Range of operating conditions Inlet air pressure 0.3 to 0.85MPa (43 to 123psi) 0.3 to 1.0MPa (43 to 145psi) 5 to 55C (23 to 131F) Note 1) 5 to 55C (23 to 131F) 5 to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) Inlet air temperature Ambient

Pin Cylinders Series CJP2/CJP

Relay, PLC 24 V Yes Grommet 3-wire (NPN) IC circuit Diagnostic indication (2-color) 5 V, 12 V 3-wire (PNP) 12 V 2-wire A96V A96 IC circuit 5 V 3-wire (NPN equiv.)

VM

6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

3 Port Solenoid Valve/

VDC, 1 mA (Load resistance) 5 VDC, 5 mA (Load resistance) Max. voltage 24 VDC Max. load current 50 mA Max. load inductance 0.5 H Insulation voltage 300 V 600 V Protection against electric shock Class II (EN60947-5-1: 2004) 4 VP500/700-X536, X538, X555 Symbols Safety limit switch Made by OMRON Terminal/Pin Numbers (Built-in switch 2N.C.)

Series VS

IN 0-15) H H 9 9 10 10 11 11 2 3 1 B 2.IN21 2.IN21 4.IN20 4.IN20 1.24V 1.24V 3.0V 3.0V 5.PE 5.PE 5 5 2 2 4 4 (FEMALE) (FEMALE) 5PIN 5PIN MICRO CONNECTOR MICRO CONNECTOR INPUT INPUT 1 1.24V 1.24V 1 1 3 3 PWR PWR EPR EPR VLV VLV 2.IN17 2.IN17 4.IN18 4.IN18 4.IN19 4.IN19 2.NC 2.NC 3.0V 3.0V 3.0V 3.0V 3.0V 3.0V 3 5.PE 5.PE 5.PE 5.PE 12 12 13 13 4 5 5 5 5 2 2 4 4 5 5 2 2 4 4 I I J J IN16 IN16

Digital Flow Switches

View A 1 2 3 4 5 6 7 8 Analog output 1 to 5VDC 8 7 6 5 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Max. measured flow rate value Real-time flow rate [l/min] Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Standard condition Standard condition Basic condition Basic condition Minimum measured Maximum measured

CNA

MXS 50 50 50 40 40 40 80 80 80 100 100 63 63 63 MXQ Load weight m(kg) Load weight m(kg) 50 50 50 40 40 40 50 40 30 50 40 30 MXF 20 20 [Example] MXW 10 10 MXP 5 4 3 5 4 3 MG 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 MGP Max. speed V(mm/s) Max. speed V(mm/s) MGQ Graph m Graph v 0.5MPa P 0.5MPa P MGG 1000 1000 100 100 100 80 80 80 MGC 500 400 300 500 400 300 63 63 63

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Model Uni thread size Metric size Inch size Elbow type 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Gasket AS22l1FSl-U01 1/8 V V V V V V V V V AS22l1FSl-U02 1/4 V V V V V V V V V V Female thread AS32l1FSl-U02 1/4 V V V V V V V Rc, G NPT, NPTF Uni thread AS32l1FSl-U03 3/8 V V V V V V V AS42l1FSl-U04 1/2 V V V V V Shape of Uni thread ridge Use of the chamfered surface of the female thread

PF-OMN0009_C

1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L

4-channel Flow Monitor ( compatible)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.