HRX-OM-K003

Alarm Code.01 to 08, 10 to 19, 22, 24, 29, 30: Eliminate the error cause. Press the [RESET] key on the operation display panel or power cycle the main breaker to enable error recovery to take effect. Alarm Code.09: Eliminate the error cause.

MHx-OMY0001

D-P3WA 56mm Nm D-M9(V) D-M9W(V) D-M9A(V) D-P3DWA 0.050.15 -12- (mm) L1 L2 L3 L4 L5 L6 16 5 MHM-16D 1 1 1 1 MHM-25D 36 34 MHM-32D 50 24 MHM-50D 23 25 80 41 / 3 NPN 3 PNP PLC PLC 2 2 PLC PLC PLC PLC -13- AND(),OR() *50ms 3 NPN OR 3 NPN AND 1 1 1 2 2 2 3 PNP AND 3 PNP OR 1 1 1 2 2 2 2 AND 2 OR 2 AND ON , 2 ON 20V 2 OR OFF OFF 1 1 ON 2 2 ON =-2 OFF =2 =1mA2 3k =6V 3k

Cylinder

---J Nil --Without auto switch 9O---D-90(O.5m lead wire) B Nose mount I I I T.

Air Filter

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

LEC-OM036xx

If the cable length exceeds 5m, the speed / pushing force will be reduced by a maximum of 10% per 5m. (If cable length is 15m: Maximum 20% reduction.) [Transportation] Caution 1. Do not carry or swing the product by the motor or the cable 48 - 15. Electric actuators/Common precautions 15.1 Design and selection Warning 1. Be sure to read the Operation Manual.

VFR2000 Series

For 3-position exhaust center valve or single acting cylinder, take appropriate measures to prevent malfunction by using it with an individual EXH spacer assembly(VVFS2000-R-01-1,2 or VVFS2000-R-02-1,2). 5.

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 4 Stations, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 2 Stations, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 8 Stations, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 2 Stations, Voltage: 24 VDC, Electrical Entry: M Plug Connector, Blanking Plate: -, CE-compliant: -

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Suction Flow(l/min): 16, Electrical entry: M-type plug connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Solenoid valve rated voltage: 24 V DC, Valve Type: N.O

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Suction Flow(l/min): 16, Electrical entry: M-type plug connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Solenoid valve rated voltage: 24 V DC, Valve Type: N.O

JXCx-OMX0009

The station No. of CC-Link is shown. (01 to 64) Set the CC-Link communication speed. STATION NO. Switch name Set range Description STATION NO. (X10) Set upper bits of the station. 01 to 64 STATION NO. (X1) Set lower bits of the station. The CC-Link address setting at the time of the factory shipment is set in 01".

1

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CG1 v CJ2l-lA MB V v v v Note 8) 10-, 11CA2 CQ2 CQS v v v v v v v v v v v 25ALuberetainer 20JA v v v v v v v v v XB6 MXH v v v v v v v v XB7 MXQ v XB9 MGP XB13 CY CX v v v v XC3 CK1 C(L)K v v v v v v v XC8 C(L)KU v v v Note 9) XC9 CKQ v v v v v v v v v XC10 CKZ2N v v v Note 9) XC11 WRF v v v v v v v v

2

Example) AC30-F03DM-KSTV-13NR-A r t y w V q Body size 10 20 25 30 40 Symbol Description V w Pipe thread type Nil Metric thread (M5) V Rc V V V V N Note 1) NPT V V V V F Note 2) G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + V e Port size Nil Without auto drain V V V V V C Note 4) N.C.

Table of Contents

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

SFOD-OMT0005CN

01-194) Over current E <> -66- <> <> I sent ALM (1-195) E <> (01-196) E <> <>EEPROM (01-197) E <> (EEPROM 10 ) <>CPU (CPU ) CPU (01-198) CPU E <> *1 (code)-3 Byte16-19 10 -67- 16/ A () (50mm ) () ( ) 5m 5m 10%(15m 20%) -68- 17/ 17.1.

Speed Controller with Indicator

V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS2ll1FSl-G02 1/4 VNote 4) V V V V AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

EXxx-OMO0027

=None 1=2 value average 2=4 value average 3=8 value average 80xA:01 Channel 0 / Analogue average filter Enum0803 80xA:02 Channel 1 / Analogue average filter 80xB:0 Slot x: Range USINT 2 0=-10+10 V 1=-5+5 V 2=-20+20 mA 3=010 V 4=05 V 5=15 V 6=020 mA 7=420 mA 80xB:01 Channel 0 / Analogue input range Enum0804 80xB:02 Channel 1 / Analogue input range : x: Slot No. -83No.EX-OMO0027-A Analogue

Fieldbus system EtherCAT compatible SI Unit

#) (continued) Index Name (Meaning) Type Value 40xA:0 Range UNSIGNED8 Number of Channels 0=-10+10 V 1=-5+5 V 2=-20+20 mA 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080D (AXA) 40xA:01 40xA:02 Channel 0 Channel 1 (Analogue range) 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080E (AXB) 1: x = Unit No.