Modular Type Regulator Series AR

type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 Round G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

5 Port Solenoid Valve

(B) 2 Port size 1 3 Nil Without sub-plate (For manifold) VF 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2-position double 3-position exhaust center 02 1/4 03 3/8 (A) 4 (B) 2 (A) 4 (B) 2 VP4 Metal 4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 Porting specifications 2-position double 3-position pressure center (A) 4 (B) 2 (A) 4 (B) 2 Rubber Nil Side ported B Bottom ported VQ 4/5 5 1 (P) 5

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

5 Port Solenoid Valve Series SV

-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke mm AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A Model Selection Program

2-Color Display Digital Flow Switch Series PFM

Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications

5 Port Air Operated Valve SYA3000/5000/7000 Series

R port thread type Type of actuation Nil Rc 2 position single (A)4 2(B) G F N NPT 1 NPTF T 1 (P) (EA)5 3(EB) Port size 2 position double 2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

5 (R1) 3 (R2) Circuit diagram Plug lead type Plug-in type Individual SUP spacer 02 03 02 03 VVQ4000-P-1(Plug-in type) 163 (Plug-in type) VVQ4000-P-5(Plug lead type) 115.5 (Plug lead type) 25 12.5 73 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 26.4 1(P) 4(A) Rc 3/8 2(B) 1(P') 5(R1) 3(R2) Circuit diagram Plug-in



(Full span) 0.05 to 0.7 MPa Rc AF Mounting Linearity (3) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Signal pressure (3) IR 1 8 Signal port PA (3) 02 03 02 04 04 06 10 10 12 14 20 01 Port P A R M5 01 M5 01 01 02 VEX Port size Rc (4) (4) 1 2 1 1 1 4 1 1 8 1

Series H, DL, L, LL Self-align Fittings

Thread Rc(PT) L1 L2 M 1 4 1 4 3 8 1 4 1 4 1 4 4 DHF04-02 27 DHF06-02 17 17 10 4 15 30.3 30.8 16 16.5 28 6 11 16 12 DHF06-03 31 19 32.8 18.5 8 DHF08-02 29.8 30 16 20 14 17 15.5 10 12 DHF10-02 30.8 37 DHF12-02 30.8 17 17 40 17 19 34 51 17 17 16.5 16.5 104 Series H, DL, L, LL Self-align Fittings Branch tee: DT Thread R(PT) Part No. Effective orifice (mm2) Applicable tube O.D.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

wire length) 48.5 70.7 [72.9] A 18 20 27 34 R P Manual override 2-4.5 (For mounting) 40 4 (Light/surge voltage suppressor) M5 x 0.8 (SYJ714R: X port) + 58 [65] 54.5 42.6 26 20 X 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector (W0): SYJ74-W001 02 Approx. 300 (Lead wire length) Applicable cable

Power Valve Precision Regulator

VBA VBAT AP100 841 VEX13 Series 0 3 Specifications VEX1A33 VEX1B33 VEX113 0 3 VEX123 0 3 VEX133 0 3 VEX153 0 3 VEX173 0 3 VEX193 0 3 Model Port 1(P) 2(A) 3(R) M5 01 M5 01 01 02 01 02 03 02 04 04 06 10 12 14 10 20 1 8 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 2 1 1 1 1 1 Port size M5 M5 1 2 4 1 4 1 2 Operation Manual knob (Push locking slotted type) and Air operated type Manual knob (Push locking

SYA3000/5000/7000

center 02 With sub-plate 3 3 8 With sub-plate 03 3 position exhaust center 4 3 position pressure center 5 1728 5 Port Air Operated Valve Series SYA3000/5000/7000 Specifications Fluid Operating pressure range MPa Air 0.15 to 0.7 100 kPa to 0.7 100 kPa to 0.7 (0.7 x P + 0.1) to 0.7 P: Operating pressure range 0.1 to 0.7 0.2 to 0.7 10 to 60 (No freezing.)

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fl tube (mm: N6 (Nylon tube ~/4) 16.5 7 2,5 I P Q, R 'U6 ($Oft IIj).'>'6!

JXCx-OMT0023

pulse multiplying factor denominator) PB09 VG2 Speed loop gain P, S PB10 VIC Speed integral compensation P, S PA08 ATU Auto tuning mode P, S PB11 VDC Speed differential compensation P, S PA09 RSP Auto tuning response P, S PB12 OVA Overshoot amount compensation P PA10 INP In-position range P PB13 NH1 Machine resonance suppression filter 1 P, S PB14 NHQ1 Notch shape selection 1 P, S PA11 TLP

AC Servo Motor Driver (Pulse input type/Positioning type ）

SIGNALS AND WIRING (Note 2) I/O signals in control modes Related parameter P P/S S S/T T T/P Pin No.

Manifold Specifications

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.

Direct Solenoid

Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. . p. 19 Made to Order. p. 26 Function Details. . p. 27 Safety Instructions.

Process Pump

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.) Tube extension 0 PAF341 X68 P 13 Products using stainless steel parts (Body tightening bolts, switching valves, etc.)

JXCx-OMT0061CN

->/P.32 10.1 ->/P.15 3.4 ->/P.47 11. 5 (CN1: EMG ->/P.12 3. ) SV1.00 INP ON (INP INP OFF PLC ) ->/P.32 10.1 ->/P.12 3. PLC (PLC) 15ms30ms ->/P.55 12.4 91 - () ->/P.47 11. ->/P.12 3. ->/P.19 5. ->/P.32 10.1 ->/P.12 3. PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.