VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

Compact Manifold Regulator Series ARM5

ITV IC SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC SMC SMC SMC SMC MADE IN JAPAN PVQ K K K P P P C C C U U U K K K P P P O O O S S S C C C L L L H H H U U U O O O S S S L L L H H H VEF VEP Front handle/Bottom ported Front handle/Top ported Mixed manifold Mixed manifold Types and sizes of the One-touch fittings can be changed.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. . p. 19 Made to Order. p. 26 Function Details. . p. 27 Safety Instructions.

Fieldbus System

9 P. 11, 12 P. 17 P. 19 How to Order Specifications Parts Description Dimensions Series SY (IP67) Digital Unit Unit to input or output digital (switch) signals P. 9 P. 13, 14 P. 18 P. 20 How to Order Specifications Parts Description Dimensions P.27 Series SV (IP67) Analog Unit Manifold solenoid valves Unit to input or output analog (voltage/current) signals P. 10 P. 15, 16 P. 18

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Order seal kit in accordance with the bore size. 6-5-59 60 Series CBG1 Rubber Bumper Type: CBG1BN Head end lock: CBG1BN Stroke H Bore size MM H GA GB Width across flats B1 2-Rc P 2-TC TD D E 0 0.05 0 0.05 I E AL TE 2-TC K F TA DL2 TF TG A F Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Modular Type Lubricators Series AL

40 53 70 W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E

VQ5000

How to order single valves (example) T 5 04 VQ5100 Thread type (ports P, R and A, B ) Cylinder port size How to order valves (example) Nil N T F Rc NPT NPTF G VQ5100 R 5 04 External pilot specification How to order manifolds (example) VV5Q51 T 08 03 FU1 Thread type (ports P, R and A, B) Cylinder port size Nil N T F Rc NPT NPTF G External pilot port 2-Rc1/8 External pilot port Rc1/8

Process Pump

Note) One of Nil, F or N is entered as thread symbol.

Power Valve Precision Regulator

N Port P1 0 3 ITV Thread type Fittings for M5 IC Nil F N T Rc G Note 1) Body size Port size Body size Port Port size 1(P), 2(A) 3(R) ITVH NPT NPTF 8 1 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 ITVX 1 4 1 For VEX13 (NBR seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3 For VEX1 33B (FKM seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3B

125

How to Order Sub-plate and Base Gasket Body size 22 42 VEX VEX VEX1 2 9 A VEX4 2A 1 A Port size Thread type Port size Thread type Symbol Port size A 1/8 B 1/4 Symbol Thread type Nil Rc F G N NPT T NPTF Symbol Port size A 1/4 B 3/8 C 1/2 Symbol Thread type Nil Rc F G N NPT T NPTF Sub-plate Base gasket VEX1 11 2 VEX4 4 Options/Part Number Description Part number VEX312-01 02 VEX322-01 02 VEX33202

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

One-touch Fittings

P.101 M R G Uni UNF NPT M R Uni Metric size P.5 P.101 P.65 P.173 P.57 P.165 P.87 P.201 P.29 P.133 Inch size P.29 P.133 P.73 P.185 P.49 P.157 P.81 P.195 P.49 P.157 P.95 P.209 CAT.ES50-37D KQ2 Series One-touch Fittings KQ2 Series Compact and lightweight Improved tube insertion/removal Length 23% shorter Max. 1 30% reduction Dimensions Dimensions Insertion : force Height 24% shorter 1 20 15.5

VCC

Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve

Table of Contents

Operating pressure P (MPa) P 0.7 MPa MTS 4.

Hydraulic Filters

After washing the element, make sure the base seal is properly mounted. 4 Vertical Suction Filter Series FHIA Dimensions Differential pressure indicator 16 lB (34) F OUTLET Removal dimension K H F OUTLET D E C H Differential pressure indication switch 62 (65) F INLET 4 x I OUTLET A J lG (mm) A B C D E F G H I J K Model Weight (kg) FHIAl-04 FHIAl-06 FHIAl-08 FHIAl-10 FHIAl-12 FHIAl-16 FHIAl

VQ7-6/7-8

YZ NPTF T G F Side ported Rc 3/8 Bottom ported Rc 1/4 1 (P) 5 (R1) 3 (R2) Bottom ported Rc 3/8 (A) 4 (B) 2 Port R is Rc 3/8 Seal FHG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Option FJG Nil Z V None Light/Surge voltage suppresor Individual pilot exhaust 1 (P) 5 (R1) 3 (R2) When two or more symbols are specified, indicate them alphabetically.

LEC-OM071xx

0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D

Booster Regulator/Air Tank

Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1lA VBA2lA VBA4lA 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil G N P P P P P P P P P P P P S P P P P P P P P P P GN P P P P P P P P P P P P GS P P P P P P P P P P LN P P P P LS P P GLN P P P

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Type 2-Port Solenoid Valve JSXM Series p. 39 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Brass p. 19 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Aluminum p. 21 Glossary of Terms Bracket Options p. 23 How to Order p. 39 Flow Rate Characteristics, Common Specifications p. 40 Construction p. 41 Dimensions p. 42 Modular Connection Examples p. 44 Spacer / Spacer with Bracket

2-Color Display Digital Flow Switch Series PFM

Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications