Body Size: 30, Backflow: without Backflow Function, Thread: F (G), IN Port Size: 03 (3/8), OUT Port Size: 02 (1/4), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: Rc, IN Port Size: 02 (1/4), OUT Port Size: 01 (1/8), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 04 (1/2), OUT Port Size: 02 (1/4), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 30, Backflow: without Backflow Function, Thread: F (G), IN Port Size: 03 (3/8), OUT Port Size: 02 (1/4), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: Rc, IN Port Size: 02 (1/4), OUT Port Size: 01 (1/8), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 02 (1/4), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 04 (1/2), OUT Port Size: 02 (1/4), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 02 (1/4), OUT Port Size: 01 (1/8), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Backflow: without Backflow Function, Thread: Rc, IN Port Size: 02 (1/4), OUT Port Size: 01 (1/8), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 02 (1/4), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 02 (1/4), OUT Port Size: 01 (1/8), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Power Valve: Economy Valve Series VEX5

Port 3 (R) side Port 1 (P) side Model P1 P2 P3 External pilot External pilot Plug VEX500 Note) External pilot External pilot Pilot exhaust VEX501 External pilot External pilot External pilot VEX510 Note) External pilot External pilot Pilot exhaust VEX511 Note) For pilot exhaust port, silencer AN210-02 is mounted. 2.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Regulator How to Order ARP 30 03 BG K 10 Less particle generation in a clean room Grease:Fluorinetype Packaging:Doublepackaging Clean room compliant Specialapplications 10 Clean room compliant, copper-free, fluorine-free, silicone-free Less particle generation in a clean room Wettedparts:Aluminumdie-cast Stainless steel, HNBR, NBR Grease:Lithiumsoapbasedtype Clean room compliant Clean room

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Regulator How to Order ARP 30 03 BG K 10 Less particle generation in a clean room Grease:Fluorinetype Packaging:Doublepackaging Clean room compliant Specialapplications 10 Clean room compliant, copper-free, fluorine-free, silicone-free Less particle generation in a clean room Wettedparts:Aluminumdie-cast Stainless steel, HNBR, NBR Grease:Lithiumsoapbasedtype Clean room compliant Clean room

IR1000-A/2000-A/3000-A

Precision Regulator IR1000-A/2000-A/3000-A Series How to Order 0 0 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

IR1200-A/2200-A/3200-A

Regulator IR1200-A/2200-A/3200-A Series How to Order 0 2 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

Body Size: 30, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 02 (1/4), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: R (Right to Left), Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: w/o Backflow Function, Thread: F (G), Port Size: 02 (1/4), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa