Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

VFM300

Roller lever VFM250-02-01 VFM250-02-01S 14 polyacetal or head steel roller JIS Symbol (Pilot exhaust port) 0.5 MPa supply 2.2 mm P.T. 8 N F.O.F. 4.0 mm O.T. 3-4.5 mounting hole 6.2 mm T.T.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

(mm) 04 06 08 10 12 Type 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Control type Meter-out Meter-in 0 1 With residual pressure release valve With One-touch fitting 15-9-36 Speed Controller with Residual Pressure Release Valve with One-touch Fitting, Elbow Type/Universal Type Needle Valve/Flow Characteristics AS2201FE-02, AS2211FE-02 AS2301FE-02, AS2311FE

Speed Controller: Standard Type Series AS In-line Type

14.1 1.5 31.6 12.7 AS220-N02-ST NPT 1/4 NPT 1/4 AS220-F02-ST G 1/4 AS220-02-ST Rc 1/4 R 1/4 17 18 19.5 7 27.2 40.7 18 1.5 36.7 17.5 AS320-N02-ST NPT 1/4 NPT 1/4 AS320-F02-ST G 1/4 AS320-02-ST Rc 1/4 R 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 19 22.5 AS320-N03-ST NPT 3/8 NPT 3/8 AS320-F03-ST G 3/8 AS320-03-ST Rc 3/8 R 3/8 24.3 9.5 30 53.7 20.8 1.5 47.4 19 22.5 AS420-N04-ST NPT 1/2 NPT 1/2 AS420

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

24 (58) VF (C10) (02) VFR VP7 38.5 31.5 24.5 3 VP4 23.4 Mounting holes 48 (58) 15 15 1.5 1.5 VQ P 3 5 1 2-PE port 2-Rc(PT)1/8 R port VQ4 22.2 Die cast hole For manifold gasket positioning Rc(PT)1/4 P port VQZ VQD 3 4 5 3 4 5 0 1 0 1 DIN connector (Y): VQZ3 2 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ3 2 (R)wLwC6, C8, C10, 02 VZS 155.5 <157.5> 300 (Lead wire length) 71 <72> VFS Indicator

VFA3000

8 16 (0.9) 18 (1) 02 03 VFA31402 position single 0.31 1 8 1 4 3 8 16 (0.9) 18 (1) 02 03 VFA32402 position double 0.33 1 8 Body ported 1 4 3 8 12.5 (0.7) 14.5 (0.8) 02 03 VFA3340-X1 3 position closed center 0.48 1 8 JIS Symbol 1 4 3 8 16 (0.9) 18 (1) 02 03 VFA3440-X1 3 position exhaust center 0.48 1 8 2 position double 2 position single 1 4 3 8 12.7 (0.7) 8.2 (0.45) 13.3 (0.75) 8.7 (0.5) 02

VZ5000

) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-71 Series VZ5000 2 Position Double VZ5240 Grommet (G), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L

5 Port Air Operated Valve

52 52 3 position closed center/exhaust center/pressure center VFA5 20(-P) 02 03 3 4 5 138 59.5 (78.5) 66 47 (28.2) (Distance between ports) 4A 24 32 3 2B 1/8 (Pilot port: Upward) 28 2 x 4.3 (For mounting) 1/4, 3/8 [4 (A), 2 (B) port] 44 1/8 [Pilot port: Lateral (-P)] 36 4.5 45 40 22.5 27 3 x 4.3 (For mounting) 2 x 3 (Breathing hole) 70 51 4.4 1P 3EB 5EA 4.4 1/4, 3/8 [1 (P), 5 (EA), 3 (EB

Fieldbus System

One-touch fitting (Metric) 1 2 3 4 5 A B C 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center 4-position dual 3-port valve (N.C./N.C.) 4-position dual 3-port valve (N.O./N.O.) 4-position dual 3-port valve (N.C.

Soft Start-up Valve

flats 30 33 AV4000-04-5 to 6G(Z)-A 1/2 1/2 1/2 AV5000-06,10-1 to 4G(Z)-A 3/4,1 3/4,1 3/4 128 59 53 37 37 53 Width across flats 36 52 AV5000-06,10-5 to 6G(Z)-A 3/4,1 3/4,1 3/4 Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-02-1 to 4G(Z)-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV2000-02-5 to 6G(Z)

5 Port Air Operated Valve Series VFA3000 1

exhaust center 3 position pressure center VFA3122-01-F VFA3130-01 2 1 8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

L2 M D2 M M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 21.1 25.5 15.8 22.3 26.7 23.5

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

Prevents Micro-Bubbles

) LVH A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations LVD 02 2 stations LVQ 05 5 stations LQ LVN How to Order Valve TI/ TIL LVA 2 0 02 C A PA PAX Option Body class Nil 1 4 Symbol 2 3 4 5 None With flow rate adjustment With indicator Body class 2 3 4 5 Orifice dia. 4 8 12 20 PB Valve type 0 1 2 N.C.

Valve Single Unit

) 1-6-39 Base Mounted Series SX3000/5000/7000 Dimensions: Series SX7000 3 position closed center/exhaust center/pressure center Grommet (G), (H): SX7 40(R)3 4 5 G H 02 03 Polarity indication Manual override (Press and turn for the locking type.)

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

Fieldbus system EtherCAT compatible SI Unit

Port1-Port power off/on UNSIGNED8 2 0=One time switch off (Power Off Time) 1=Switch PortPowerOff 2=Switch PortPowerOn 40x5:01 3 Port Power Mode Enum0815 40x5:02 3 Power Off Time UNSIGNED16 0x01F4 to 0xF 40x6:0 3 Port2-Port power off/on See Port1-PortPower off/on 40x7:0 3 Port3-Port power off/on 40x8:0 3 Port4-Port power off/on 40x9:0 Device read/write UNSIGNED8 6 40x9:01 Request Enum0819