MGP

10 1 100 1 100 10 200 20 30 40 50 2 3 4 5 Eccentric distance l (mm) Eccentric distance l (mm) MXS 75 to 124 stroke 50 to 74 stroke MXQ 100 100 200 63 P=0.5MPa P=0.5MPa MXF 80 50 40 50 100 MXW 40 Load weight m (kg) Load weight m (kg) 30 40 50 32 MXP 20 30 MG 10 20 MGP 5 4 3 10 MGQ 5 10 100 200 20 30 40 50 1 100 10 200 20 30 40 50 2 3 4 5 MGG Eccentric distance l (mm) Eccentric distance l

MB

Also dimensions with boot is same as the basic style (Double acting, Single rod). 6-6-25 25 Air Cylinder: Low Friction Type Double Acting, Single Rod Series MBQ 32, 40, 50, 63, 80, 100 How to Order MB L F 32 50 Q Without auto switch Number of auto switches Nil S 3 n 2 1 3 n MDB L Y7BW F 32 50 Q With auto switch Built-in magnet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

IDG

600 750 1000 Purge air flow rate (l/min(ANR))(3) 3 6 11 22 35 60 65 80 110 Bracket Assembly (Accessory) Part No.

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

CJ2

Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

+ l 130 (138) + l 6 6 7 7 10 12 11 14 32 10 110(118) 44 15 38.5 22 45(53) 3 3.5 7 74 + l 137.5(145.5) + l 36 10 115.5(123.5) 49 15 45 25 45(53) 3 3.5 8 75 + l 139.5(147.5) + l 44 10 117.5(125.5) 58 16 54.5 30 51(60) 3 4 8.5 83.5 + l 155(164) + l 54 10 135(144) 71 16.5 2-LC (Knock pin position) 70.5 40 55(67) 4.5 5 11 95.5 + l 177.5(189.5) + l 66 17.5 157.5(169.5) 86 22 CJ1 LS + Stroke 82.5

HRL

ion (SO42) [mg/L] 50 or less v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Standard item dV dt = Voltage increase ratio dV Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (

Cylinder with Lock Series CNS

F VA BN S + Stroke CX CT N N U L RR H ZZ + Stroke Z + Stroke CL T 2-MA Effective thread depth R GR GL With rod boot Q V 75 15 40 l C B 4-J h + l ZZ1 + l + Stroke Z1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CDH10 CL CT CX D E EA F FA G GA GB GL 125 140 160 50 47 145 205 1/2 3/8 115 25 120 17 32 36 90 63 35 14 16 155 23 25 to 1000 + 0.084 0 0.1 0.3 50 47 161 245

Free Mount Cylinder

51.5 33.5 34 34.5 6.6 5 to 50 19 21.5 23 8 5 to 50 11.5 5 to 50 L H J P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

VQ7-6/7-8

R U side D side A B Side Bottom Cylinder port location Rc Nil NPTF T G F P, R port size L R L side R side Cylinder port size 04 06 C12 Rc 1/2 Rc 3/4 One-touch fitting for 12 Note) It is not applicable to One-touch fittings. 03 04 3/8 1/2 Thread type Rc Nil NPTF T G F Replacement Parts (For manifold block) Description Material Qty.

39

M N O P Q J K L M N O P Q Part no.

Vacuum Pad

adsorption (sec) QL: Leakage volume during workpiece adsorption L/min (ANR) Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (ANR) Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.

SZ3000

0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !0 3 position pressure center (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i Parts list Material Description No.

C95

n S 3 n Auto switch C85 Mounting Without auto switch Bore size Basic/Without bracket Axial foot Front flange Rear flange Single rear clevis Double rear clevis Centre trunnion B L F G C D T Refer to table below for selection of applicable auto switch.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

How to Order RE A B REC L 40 150 CA2Y Without auto switch CX L Y7BW S 40 150 CDA2Y With auto switch CY MQQ M Number of auto switches Built-in magnet RHC Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

KJ

(mm) 3.2 4 6 Effective area (mm2) Nylon Urethane 3.2 4.5 11 3-applicable tubing Note) Weight (g) M Q D L Model 2.7 4.5 11 KJT23-00 KJT04-00 KJT06-00 12.7 12.7 13.5 5.8 6.3 7.3 8.4 9.3 11.6 15 15.8 17.1 2.5 3 4.6 Note) D: Max. diameter K M H Different Diameter Tee: KJT D Applicable tubing O.D.

MQQ

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E 25, 28 H thread effective depth C 2-Rc 1/8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F E J I 4-N through M 0.2 D W K B + Stroke L A + Stroke M 0.2 E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6 29 9 M4 x 0.7 38

MQQ

2-M5 x 0.8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F I 4-N through M 0.2 D E K B + Stroke L M 0.2 A + Stroke E 25, 28 H thread effective depth C 2-Rc 1/8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F E J I 4-N through M 0.2 D W K B + Stroke L A + Stroke M 0.2 E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40